Vetenskapliga artiklar vid Fasta Tillståndets Elektronik 1990-1999
Hitta här de vetenskapliga artiklarna från Avdelningen för Fasta Tillståndets Elektronik i perioden mellan 1990 och 1999 enligt DIVA katalog:
Publikationer
Artiklar i tidskrift (granskade)
-
Compositional variations of sputter deposited Ti/W barrier layers on substrates with pronounced surface topography
Ingår i THIN SOLID FILMS, s. 227-232, 1999.
-
Decreasing the optical path length in an optoelectronic module using silicon micromachining
Ingår i JOURNAL OF MICROMECHANICS AND MICROENGINEERING, s. 127-129, 1999.
-
Designed abrasive diamond surfaces
Ingår i WEAR, s. 387-394, 1999.
-
Diamond microstructures for optical micro electromechanical systems
Ingår i SENSORS AND ACTUATORS A-PHYSICAL, s. 41-47, 1999.
-
Diamond replicas from microstructured silicon masters
Ingår i SENSORS AND ACTUATORS A-PHYSICAL, s. 24-29, 1999.
-
Effect of gas and cathode material on the r.f. hollow cathode reactive PVD
Ingår i SURFACE & COATINGS TECHNOLOGY, s. 704-708, 1999.
-
Effect of impurities in the CdS buffer layer on the performance of the Cu(In,Ga)Se-2 thin film solar cell
Ingår i JOURNAL OF APPLIED PHYSICS, s. 6858-6865, 1999.
-
High precision crystallographic alignment of InP(100)
Ingår i Electrochemical and solid-state letters, s. 407-408, 1999.
DOI för High precision crystallographic alignment of InP(100)
-
Ion assisted deposition of Zn-Mg coatings by unbalanced magnetron sputtering
Ingår i Surface and Coatings Technology, s. 751-754, 1999.
-
Laser beam induced current characterization of high efficiency chalcopyrite solar cells
Ingår i SOLID STATE PHENOMENA, s. 69-74, 1999.
-
Low cost micromachined mirrors for display systems
Ingår i Journal of Micromechanics and Microengineering, s. 85-88, 1999.
-
Measurement of low-frequency base and collector current noise and coherence in SiGe heterojunction bipolar transistors using transimpedance amplifiers
Ingår i IEEE Transactions on Electron Devices, s. 993-1000, 1999.
-
Modelling of fibre holding elements in silicon
Ingår i JOURNAL OF MICROMECHANICS AND MICROENGINEERING, s. 277-282, 1999.
-
Na incorporation in Mo and CuInSe2 from production processes
Ingår i SOLAR ENERGY MATERIALS AND SOLAR CELLS, s. 255-264, 1999.
-
Optoelectronic images of polycrystalline thin-film solar cells based on CuInSe2 and CuInGaSe2 obtained by laser scanning
Ingår i SEMICONDUCTORS, s. 1037-1039, 1999.
-
Preferential sputtering effects in thin film processing
Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 1916-1925, 1999.
-
null
Ingår i Journal of the Electrochemical society, s. 1104-1105, 1999.
-
Quartz-to-quartz direct bonding
Ingår i Journal of the Electrochemical Society, s. 1104-1105, 1999.
-
Residual stress in sputtered gold films on quartz measured by the cantilever beam deflection technique
Ingår i IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, s. 981-992, 1999.
-
Target compound layer formation during reactive sputtering
Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 1827-1831, 1999.
-
The behaviour of Na implanted into Mo thin films during annealing
Ingår i SOLAR ENERGY MATERIALS AND SOLAR CELLS, s. 199-208, 1999.
-
The chemical bath deposited CdS/Cu(In,Ga)Se-2 interface as revealed by X-ray photoelectron spectroscopy
Ingår i JOURNAL OF THE ELECTROCHEMICAL SOCIETY, s. 1816-1823, 1999.
-
A lateral symmetrically bistable buckled beam
Ingår i Journal of Micromechanics and Microengineering, s. 29-32, 1998.
-
An analytical analysis of a compressed bistable buckled beam
Ingår i SENSORS AND ACTUATORS A-PHYSICAL, s. 212-216, 1998.
-
Composition control by current modulation in dc-reactive sputtering
Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 1868-1872, 1998.
-
Computer modeling as a tool to predict deposition rate and film composition in the reactive sputtering process
Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 1277-1285, 1998.
-
Etch rates of crystallographic planes in Z-cut quartz - experiments and simulation
Ingår i JOURNAL OF MICROMECHANICS AND MICROENGINEERING, s. 1-6, 1998.
-
Features of a nonequilibrium microwave electrode discharge
Ingår i PLASMA PHYSICS REPORTS, s. 891-895, 1998.
-
Modeling of the deposition of stoichiometric Al2O3 using nonarcing direct current magnetron sputtering
Ingår i J Vac Sci Technol A, s. 1286-1292, 1998.
-
Passive and fixed alignment of devices using flexible silicon elements formed by selective etching
Ingår i Journal of Micromechanics and Microengineering, s. 39-44, 1998.
-
Selective SiO2-to-Si3N4 etching in inductively coupled fluorocarbon plasmas: Angular dependence of SiO2 and Si3N4 etching rates
Ingår i J Vac Sci Technol, s. 3281-, 1998.
-
Spherical Microwave Electrode Discharge. Phenomenology and results of probe measurements
Ingår i Technical Physics, s. 1428-, 1998.
-
Temperature and injection dependence of the Shockley-Read-Hall lifetime in electron-irradiated p-type silicon
Ingår i JOURNAL OF APPLIED PHYSICS, s. 4206-4212, 1998.
-
A high-resolution X-ray photoelectron spectroscopy study of
Ingår i Jap J Appl Phys, s. 2167-2175, 1997.
-
A production process of silicon sensor elements for a fibre optic pressure sensor
Ingår i Sensors and Actuators A-Physical, 1997.
-
A production process of silicon sensor elements for a fibre-optic pressure sensor
Ingår i Sensors and Actuators, A, s. 69-74, 1997.
-
Angular dependence of the polysilicon etch rate during dry etching in SF6 and Cl-2
Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 686-691, 1997.
-
Bulk silicon holding structures for mounting of optical fibres in v-grooves
Ingår i J Microelectromech Syst, s. 35-40, 1997.
-
Characterization of the linear arc discharge (LAD) source for film deposition
Ingår i SURFACE & COATINGS TECHNOLOGY, s. 578-582, 1997.
-
Determination of charge carrier collecting regions in chalcopyrite heterojunction solar cells by electron-beam-induced current measurements
Ingår i SOLAR ENERGY MATERIALS AND SOLAR CELLS, s. 299-309, 1997.
-
Diamond deposition from halogenated methane precursors on Si and SiC substrates
Ingår i Diamond and Related Materials, s. 85-88, 1997.
-
Diamond deposition in a microwave electrode discharge at reduced pressures
Ingår i DIAMOND AND RELATED MATERIALS, s. 224-229, 1997.
-
Discharge disruptions in a helicon plasma source
Ingår i J Vac Sci Technol A, s. 2864-2874, 1997.
-
Electrical investigation of the silicon/diamond interface
Ingår i Microelectronic Engineering, s. 245-248, 1997.
DOI för Electrical investigation of the silicon/diamond interface
-
Improved lifetime characteristics in heavy ion irradiated silicon
Ingår i NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, s. 410-413, 1997.
-
In situ diagnostic studies of reactive co-sputtering from two targets by means of soft x-ray and optical emission spectroscopy
Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 145-148, 1997.
-
Linear arc discharge (LAD): A new type of hollow cathode plasma cource
Ingår i Surface & Coatings Technology, s. 377-380, 1997.
-
Linear arc discharge source for large area plasma processing
Ingår i Appl Phys Lett, s. 577-579, 1997.
-
Micromechanics in optical microsystems - with focus on telecom systems
Ingår i JOURNAL OF MICROMECHANICS AND MICROENGINEERING, s. 93-98, 1997.
-
Physical models in device simulation of SI power pindiodes for optimal fitting of simulation results to measured data
Ingår i Compel, s. 144-156, 1997.
-
Preferential Sputtering Effects in the Deposition of TiAl Films by Filtered Cathodic Arc Deposition
Ingår i Nucl Instr Phys Res B, s. 207-209, 1997.
-
Studies of reactive sputtering of multi-phase chromium nitride
Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 248-252, 1997.
-
Temperature dependent electron beam induced current experiments on chalcopyrite thin film solar cells
Ingår i APPLIED PHYSICS LETTERS, s. 1011-1013, 1997.
-
The ambipolar Auger coefficient: Measured temperature dependeble in electron irradiated and highly injected n-type silicon
Ingår i J Appl Phys, s. 2256-2262, 1997.
-
Thin film processing by the radio frequency hollow cathodes
Ingår i SURFACE & COATINGS TECHNOLOGY, s. 723-728, 1997.
-
A Method for the Determination of the Angular Dependence during Dry Etching
Ingår i Journal of Vacuum Science & Technology B, s. 3239-, 1996.
DOI för A Method for the Determination of the Angular Dependence during Dry Etching
-
A non-contacting sensor system for respiratory air flow detection
Ingår i Sensors & Actuators, s. 81-85, 1996.
-
Compensation Doping of Polysilicon Films for Stable Integrated Circuit Resistors
Ingår i Solid State Phenomena, s. 561-566, 1996.
-
Electrical characterisation of silicon pn-junctions terminated with diamond
Ingår i Diamond and Related Materials, s. 1457-1461, 1996.
DOI för Electrical characterisation of silicon pn-junctions terminated with diamond
-
Electrostatically excited diaphragm driven as a loudspeaker
Ingår i Sensors & Actuators, s. 211-215, 1996.
-
Enhanced enzyme activity in silicon integrated enzyme reactors utilizing porous silicon as the copuling matrix
Ingår i Sensors & Actuators, s. 161-166, 1996.
-
Impurities in chemical bath deposited CdS films for Cu(In,Ga)Se-2 solar cells and their stability
Ingår i JOURNAL OF THE ELECTROCHEMICAL SOCIETY, s. 2662-2669, 1996.
-
Lifetime in proton irradiated silicon
Ingår i JOURNAL OF APPLIED PHYSICS, s. 3906-3914, 1996.
-
Limitations to the piezoelectric effect for materials with finite resistivity
Ingår i Sensors & Actuators, s. 690-694, 1996.
-
Linear arc discharge (LAD): A new type of hollow cathode plasma source
Ingår i SURFACE & COATINGS TECHNOLOGY, s. 377-380, 1996.
-
Microwave surfatron system for plasma processing
Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 474-477, 1996.
-
Modification of silicon surfaces with H2SO4:H2O2:HF and HNO3:HF for wafer bonding applications
Ingår i JOURNAL OF THE ELECTROCHEMICAL SOCIETY, s. 1709-1714, 1996.
-
Oxygen in Solution Grown Cds Films for Thin Film Solar Cells
Ingår i Solid State Phenomena, s. 533-540, 1996.
-
Precise mask alignment to the crystallographic orientation of silicon wafers using wet anisotropic etching
Ingår i J Micromech Microeng, s. 279-284, 1996.
-
Radio frequency hollow cathodes for the plasma processing technology
Ingår i SURFACE & COATINGS TECHNOLOGY, s. 648-656, 1996.
-
Reliability Evaluation of Manufacturing Processes for Bipolar and MOS Devices on Silicon-On-Diamond Materials
Ingår i J Electrochem Soc, s. 1326-1334, 1996.
-
Resputtering effects during ion beam assisted deposition and the sputter yield amplification effect
Ingår i Surface & Coatings Technology, s. 353-362, 1996.
-
Simulation of forward bias injection in proton irradiated silicon pn-junctions
Ingår i Solid-State Electronics, s. 1087-1092, 1996.
DOI för Simulation of forward bias injection in proton irradiated silicon pn-junctions
-
Temperature and injection dependence of the Shockley-Read-Hall lifetime in electron irradiated n-type silicon
Ingår i J Appl Phys, s. 9142-9148, 1996.
-
Terracing of (100) Si with one mask and one etching step using misaligned V-grooves
Ingår i Journal of Micromechanics and Microengineering, s. 39-42, 1996.
DOI för Terracing of (100) Si with one mask and one etching step using misaligned V-grooves
-
The radio frequency hollow cathode plasma jet arc for the film deposition
Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 3033-3038, 1996.
-
A bioacoustic method for timing of respiration at cardiac investigation
Ingår i Clinical Physiology, s. 151-157, 1995.
-
A new method for film deposition in the discharge of target metal vapour
Ingår i Surface and Coatings Technology, s. 174-180, 1995.
-
Abnormal High Rate Deposition of TiN Films by the Radio Frequency Plasma Jet System
Ingår i J Electrochem Soc, s. 883-887, 1995.
-
Controlled topography production - True 3D simulation and experiment
Ingår i Vacuum, s. 971-975, 1995.
-
Fabrication of 45 Mirrors Together with Well-Defined V-Grooves Using Wet Anisotropic Etching of Silicon
Ingår i Journal of microelectromechanical systems, s. 213-219, 1995.
-
High Current Gain Hybrid Lateral Bipolar Operation of DMOS Transistors
Ingår i IEEE Transactions on Electron Devices, s. 1628-1635, 1995.
DOI för High Current Gain Hybrid Lateral Bipolar Operation of DMOS Transistors
-
Hysteresis effects in the sputtering process using two reactive gases
Ingår i Thin Solid Films, s. 181-186, 1995.
-
Improved Direct Bonding of Si- and SiO2 surfaces by Cleaning in H2SO4:H2O2:HF
Ingår i Appl. Phys. Lett, s. 650-652, 1995.
-
Ionized dopant concentrations in silicon - an analytical approach
Ingår i Solid-State Electronics, s. 2059-2061, 1995.
-
Metastable assisted deposition of TiN films
Ingår i Appl Phys Lett, s. 1521-1523, 1995.
-
Modeling of Mass Transport and Gas Kinetics of the Reactive Sputtering Process
Ingår i Journal de Physique IV, Colloque C5, suppl au de Jorurnal de Physique II, 5, s. C5/45-C5/54, 1995.
-
Optically trapped non-linear particles as probes for scanning near-field optical microscope
Ingår i Ultramicroscopy, s. 309-312, 1995.
-
Respiratory monitoring during postoperative analgesia
Ingår i J Clin Monit, s. 365-372, 1995.
-
Silicon wafer integrated enzyme reactors
Ingår i Biosensors & Bioelectronics, s. 289-299, 1995.
-
Synergistic sputtering effects during ion bombardment with two ion species
Ingår i J Vac Sci Technol, s. 831-833, 1995.
-
The effect of emitter shortings on turn-off limitations and device failure in GTO thyristors under snubberless operation
Ingår i IEEE Trans on Electron Devices, s. 178-187, 1995.
-
The effects of HF-cleaning prior to silicon wafer bonding
Ingår i Journal of the Electrochemical Society, s. 1297-1303, 1995.
DOI för The effects of HF-cleaning prior to silicon wafer bonding
-
Titanium nitride deposited by high rate rf hollow cathode plasma jet reactive process
Ingår i VACUUM, s. 1433-1438, 1995.
-
Transient Measurements of Heat Distribution in Devices Fabricated on Silicon-On Diamond Material
Ingår i Japanese Journal of Applied Physics, s. 4706-4714, 1995.
-
Vacancy related defect profiles in MeV cluster-ion irradiated silicon
Ingår i Nuclear Instruments and Methods in Physics Research Section B, s. 233-236, 1995.
DOI för Vacancy related defect profiles in MeV cluster-ion irradiated silicon
-
2-D characterization of dynamic charge distribution in MOS controlled thyristors: Experiment and simulation
Ingår i IEEE Electron Device Letters, s. 221-223, 1994.
-
A micro machined enzyme reactor in <100>-oriented silicon
Ingår i Sensors and Actuators A-Physical, s. 55-58, 1994.
-
A study of design influence on anode-shorted GTO thyristor turn-on and turn-off
Ingår i IEEE transactions on power electronics, s. 514-521, 1994.
-
A system for passive implantable pressure sensors
Ingår i Sensors and Actuators A-Physical, s. 55-58, 1994.
-
Assembling three-dimensional microstructures using gold-silicon eutectic bonding
Ingår i Sensors and Actuators A-Physical, s. 227-236, 1994.
-
Buried cobalt silicide slyers in silicon created by wafer bonding
Ingår i Journal of the Electrochemical Society, s. 2829-2833, 1994.
-
Characterization of an inchworm prototype motor
Ingår i Sensors and Actuators A-Physical, s. 322-329, 1994.
-
Characterization of spontaneously bonded hydrophobic silicon surfaces
Ingår i Journal of the Electrochemical Society, s. 562-566, 1994.
-
Continuous ink-jet print head utilizing silicon micromachined nozzles
Ingår i Sensors and Actuators A-Physical, s. 311-316, 1994.
-
Deposition of carbonaceous films onto internal walls of tubes
Ingår i Journal of the Electrochemical Society, s. 374-377, 1994.
-
Effect of the space charge sheath on properties of carbon and diamond films grown in the radio frequency plasma jet
Ingår i Diamond and related materials, s. 528-530, 1994.
-
Effect of the space charge sheath on properties of carbon and diamond films grown in the radio sheath on properties of carbon and diamond films grown in the radio frequency plasma jet
Ingår i Diamond and related materials, s. 528-530, 1994.
-
Enhancement of the reactive deposition rate of TiN films at low nitrogen content
Ingår i Journal of the Electrochemical Society, 1994.
-
Evaluation of local lifetime in proton irradiated silicon
Ingår i Journal of Applied Physics, 1994.
-
Gallium arsenide as a mechanical material
Ingår i Journal of Micromechanics and Microengineering, s. 1-13, 1994.
-
Large area selective thin film deposition by bias sputtering
Ingår i Thin Solid Films, s. 1-8, 1994.
-
Measurements of failure phenomena ininductively loaded multi-cathode GTO thyristors
Ingår i IEEE Transactions on Electron Devices, s. 251-257, 1994.
-
Microloading effect in reactive etching
Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, s. 1962-1965, 1994.
-
Micromachined gyroscopes
Ingår i Sensors and Actuators A-Physical, s. 65-71, 1994.
-
Micromachined optical planes and reflectors in silicon
Ingår i Sensors and Actuators A-Physical, s. 330-333, 1994.
-
Micro-MOS - a first principle based 3D Monte Carlo simulation program for sub-half micron SI MOSFET:s
Ingår i Solid-State Electronics, 1994.
-
Modelling of bias sputter deposition processes
Ingår i Surface and Coatings technology, s. 325-331, 1994.
-
Numerical and experimental studies of the sputter yield amplification effect
Ingår i Radiation effects and defects in solids (Print), s. 281-291, 1994.
-
Preferential sputtering of silicon from metal silicides at elevated temperatures
Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, s. 1542-1546, 1994.
-
Pressure microsensor system using a closed-loop configuration
Ingår i Sensors and Actuators A-Physical, s. 7881-, 1994.
-
The ambipolar diffusion coefficient in silicon: Dependence on excess-carrier concentration and temperature
Ingår i Journal of Applied Physics, s. 2855-2859, 1994.
-
The Piezoelectric effect of GaAs used for resonant sensors and actuators
Ingår i Journal of Micromechanics and Microengineering, s. 28-34, 1994.
-
The piezoelectric effect of GaAs used for resonators and resonant sensors
Ingår i Journal of Micromechanics and Microengineering, s. 28-34, 1994.
-
The stady state in net erosion and net growth regimes during simultaneous ion bombardment and atomicdeposition processes
Ingår i Radiation effects and defects in solids (Print), s. 315-333, 1994.
-
Theoretical Models for the Action Spectrum and the Current-Voltage Characteristics of Microporous Semiconductor Films in Photoelectrochemical Cells
Ingår i The Journal of Physical Chemistry C, s. 5552-5556, 1994.
-
Three-dimensional simulation of surface evolution during growth and erosion
Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, s. 61-68, 1994.
-
X-ray reflection, a technique for measuring sputtering yields of thin film
Ingår i Nuclear Instruments and Methods in Physics Research Section B:: Beam Interactions with Materials and Atoms, s. 395-403, 1994.
-
A new respiratory rate monitor: development and initial clinical experience
Ingår i International Journal of Clinical Monitoring and Computing, s. 101-107, 1993.
-
A Self-Aligned Lateral Bipolar Transistor Concept Realized on SIMOX-material
Ingår i IEEE Transactions on Electron Devices, s. 2359-2360, 1993.
DOI för A Self-Aligned Lateral Bipolar Transistor Concept Realized on SIMOX-material
-
A time-dependent two-dimensional analysis of the turn-off process in a gate turn-off thyristor (GTO)
Ingår i IEEE Transactions on Electron Devices, s. 2352-2358, 1993.
-
An r.f. plasma jet applied to diamond, glassy carbon and silicon carbide film synthesis
Ingår i Diamond and related materials, s. 517-522, 1993.
-
Anisotropic etching of Z-cut quartz
Ingår i Journal of Micromechanics and Microengineering, s. 65-73, 1993.
-
Characteristics of quasi-buckling
Ingår i Sensors and materials, 1993.
-
Characterization of a prototype active joint for micro-robotics driven by piezoelectric bimorphs
Ingår i Sensors and Actuators A-Physical, 1993.
-
Characterization of spontaneously bonded hydrophobic silicon surfaces
Ingår i Journal of the Electrochemical Society, 1993.
-
Continuous ink jet print head utilizing silicon micromachined nozzles
Ingår i Sensors and Actuators A-Physical, 1993.
-
Electro-chemical etch stop obtained by accumulation of free carriers without pn junction
Ingår i Journal of the Electrochemical Society, s. 271-275, 1993.
-
Evaluation and interpretation 3D Monte Carlo simulation results of submcron MOS transistors
Ingår i Journal of Communications, s. 22-31, 1993.
-
Evaluation of carrier lifetime in power semiconductors using both optical and electrical measurements supported by two-dimensional computer simulation
Ingår i Journal of Communications, s. 14-22, 1993.
-
Experimental evaluation of two new sensors for respiratory rate monitoring
Ingår i Physiological Measurement, s. 171-181, 1993.
-
Flexural vibrations in piezoelectric semi-insulating GaAs
Ingår i Sensors and Actuators A-Physical, s. 133-139, 1993.
-
Flexural vibrations in piezoelectric semi-insulating GaAs
Ingår i Sensors and Actuators A-Physical, 1993.
-
High bias sputtering for large area selective deposition
Ingår i Thin Solid Films, s. 87-90, 1993.
-
Influence of different etching mechanisms on the angular dependence of silicon nitride etching
Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, s. 1226-1229, 1993.
-
Ion-assisted selective deposition of aluminium for via-hole interconnections
Ingår i Vacuum, s. 197-201, 1993.
-
Micromachined gyroscopes
Ingår i Sensors and Actuators A-Physical, 1993.
-
Post-anesthesia monitoring revisited: Incidence of true and alse alarms from different monitoring devices.
Ingår i Journal of clinical anesthesia, 1993.
-
Pressure microsensor system using a closed-loop configuration
Ingår i Sensors and Actuators A-Physical, 1993.
-
Quasi-buckling of micromachined beams
Ingår i Journal of Micromechanics and Microengineering, 1993.
-
Radio frequency plasma jet applied to boating of internal walls of narrow tubes
Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, s. 1486-1490, 1993.
-
Radio frequency plasma jet applied to coating of internal walls of narrow tubes
Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, s. 1486-1490, 1993.
-
Reactive deposition of diamond and Si carbide films by hydrogen plasma etching of graphite and Si in rf plasma jet
Ingår i Thin Solid Films, s. 218-222, 1993.
-
Self aligned micromachined ink jet nozzles
Ingår i Transducers, s. 246-249, 1993.
-
Serial cosputtering of metals: Modelling of sputtering from a periodically codeposited surface
Ingår i Surface and Coatings Technology, s. 287-292, 1993.
-
Serial cosputtering of some metal alloys: Enhancement of partial sputtering yields of light metals
Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, s. 314-318, 1993.
-
Similarities betwen piezoelectric, thermal and other internal means of exciting vibrations
Ingår i Journal of Micromechanics and Microengineering, s. 24-31, 1993.
-
Spontaneous bonding of hyydrophobic silicon surfaces
Ingår i Applied Physics Letters, s. 1362-1364, 1993.
-
Studies of the optical emission from a hydrogen-hydrocarbon rf plasma jet stream during diamond film deposition
Ingår i Diamond and related materials, s. 347-352, 1993.
-
The evolution of atomic scale topography by sputtering erosion
Ingår i Surface and Interface Analysis, s. 90-94, 1993.
-
The theory of ion beam polishing and machining
Ingår i Vacuum, s. 303-309, 1993.
-
Very High Current Gain Enhancement by Substrate Biasing of Lateral Bipolar Transistors on Thin SOI
Ingår i Microelectronic Engineering, s. 379-382, 1993.
-
A novel technique for the simulataneous measurement of ambipolar carrier lifetime and diffusion coefficient in silicon
Ingår i Solid-State Electronics, s. 1223-1227, 1992.
-
A study of turn-off limitations and failur mechanisms in GTO thyristors by means of 2-D time-resolved optical measurements
Ingår i Solid-State Electronics, s. 1683-1695, 1992.
-
A suggested mechanism for silicon direct bonding from studying hydrophilic and hydrophobic surfaces
Ingår i Journal of Micromechanics and Microengineering, s. 158-160, 1992.
-
A system for wireless intraocular pressure measurements using a silicon micromachined sensor
Ingår i Journal of Micromechanics and Microengineering, s. 202-204, 1992.
-
Activation and detection of mechanical vibrations in piezoelectric beams
Ingår i Sensors and Actuators A-Physical, s. 567-571, 1992.
-
Active joints for microrobot limbs
Ingår i Journal of Micromechanics and Microengineering, s. 221-223, 1992.
-
Atom assisted sputtering yield amplification
Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, s. 1592-1596, 1992.
-
Bond-strenght measurements related to silicon surface hydrophilicity
Ingår i Journal of the Electrochemical Society, s. 2299-, 1992.
-
Deposition and properties of diamond films - a review
Ingår i VakuumNytt, s. 91-95, 1992.
-
Deposition of thin diamond films - a short review
Ingår i Czechoslovak Journal of Physics, s. 141-150, 1992.
-
Enhanced sputtering of one species in the processing of multielement thin films
Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, s. 1765-, 1992.
-
Investigation of buried etch stop layer in silicon by nitrogen implantation
Ingår i Journal of the Electrochemical Society, s. 561-566, 1992.
-
Investigation of the Current-Voltage Behavior of a Combined Schottky-p-n diode
Ingår i Solid-State Electronics, s. 1229-1231, 1992.
DOI för Investigation of the Current-Voltage Behavior of a Combined Schottky-p-n diode
-
Low pressure rf plasma jet - a new tool for surface processing
Ingår i Surface and coatings Technology, s. 91-95, 1992.
-
Micro vials on a silicon wafer for sample introduction in capillary electrophoreses
Ingår i Journal of chromatography. B, 1992.
-
Micro vials on a silicon wafer for sample introduction in capillary electrophoresis
Ingår i Journal of chromatography. B, 1992.
-
Micromachined sensor structures with linear capacitive response
Ingår i Sensors and Actuators A-Physical, s. 200-205, 1992.
-
New shapes in (100) Si using KOH and EDP etches
Ingår i Journal of Micromechanics and Microengineering, s. 75-79, 1992.
-
On the impact parameter probability distribution in atomic collisions for Monte Carlo simulations
Ingår i Nuclear Instruments and Methods in Physics Research Section B, s. 28-32, 1992.
-
Post-anesthesia monitoring: More than 75% of pulse oximeter alarms are trivial
Ingår i Anesthesiology, s. 582-, 1992.
-
Sputte erosion amplification
Ingår i Surface and Coatings Technology, s. 131-135, 1992.
-
The IPOP-IOL: A probe into the eye
Ingår i Acta Ophthalmologica, s. 266-268, 1992.
-
Two-dimensional etching diagrams for z-cut quartz
Ingår i Journal of Micromechanics and Microengineering, s. 215-217, 1992.
-
A lateral bipolar transistor concept on SOI using a self-aligned base definition technique
Ingår i Microelectronic Engineering, s. 341-344, 1991.
-
A phenomenological method of predicting the performance of piezoelectric beams
Ingår i Journal of the Acoustical Society of America, s. 693-699, 1991.
-
A phenomenological method of predicting the performance of piezoelectric beams
Ingår i Journal of Micromechanics and Microengineering, s. 16-24, 1991.
-
An optical systm for bilateral recombination-radiation diagnostics of the carrier redistribution in switching power devices
Ingår i IEEE Transactions on Instrumentation and Measurement, s. 956-961, 1991.
-
Bond-strength measurements related to silicon surface hydrophilicity
Ingår i Electrochemical Society, s. 682-, 1991.
-
Dynamic behavior of a piezoelectric beam
Ingår i Journal of the Acoustical Society of America, s. 686-692, 1991.
-
Evaluation of boron distributions in amorphous 49BF2+-implanted silicon
Ingår i Journal of the Electrochemical Society, s. 571-576, 1991.
-
Highly excited states of nitric oxide studied by high-resolution resonance-enhanced multiphoton ionization spectroscopy
Ingår i Chemical Physics, s. 473-481, 1991.
-
Microphone design for bio-acoustic signals with suppression of noise and artefacts
Ingår i Sensors and Actuators A-Physical, s. 527-533, 1991.
-
Modeling of multicomponent reactive sputtering
Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 1991.
-
Piezoelectric beams and vibrating angular rate sensors
Ingår i IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 1991.
-
Silicon surface damage caused by reactive ion etching in fluorocarbon gas mixtures containing hydrogen
Ingår i Journal of Vacuum Science & Technology B, s. 34-40, 1991.
-
T-DYN Monte Carlo simulations applied to ion assited thin film processes
Ingår i Nuclear Instruments and Methods in Physics Research Section A, s. 21-27, 1991.
-
A time-resolved optical system for spatial characterization of the carrier distribution in a gate turn-off thyristor (GTO)
Ingår i IEEE Transactions on Instrumentation and Measurement, s. 473-478, 1990.
-
A time-resolved optical system for spatial characterization of the distribution in a gate turn-off thyristor (GTO)
Ingår i IEEE Transactions on Instruments and Measurements, s. 473-478, 1990.
-
An analysis of space-dependent electric fields used in exciting flexural vibrations of piezoelectric beams
Ingår i Measurements Science and Technology, s. 731-737, 1990.
-
An equivalent circuit description of two coupled vibrations
Ingår i Journal of the Acoustical Society of America, 1990.
-
an utlrashallow diffused n0p-junction using antimony for device applications
Ingår i Journal of Applied Physics, s. 7413-7416, 1990.
-
Angular dependence on reactive ion beam etching
Ingår i Vuoto, s. 467-, 1990.
-
Batch processing of laterally mobile structures in single-crystalline silicon
Ingår i Sensors and Actuators A-Physical, s. 987-981, 1990.
-
Deep level transient spectroscopy analysis of fast ion tracks in silicon
Ingår i Journal of Applied Physics, s. 1266-1271, 1990.
-
Design of a solid-state gyroscopic sensor made of quartz
Ingår i Sensors and Actuators A-Physical, s. 293-296, 1990.
-
Dynamic modeling of the process control of reactive sputtering
Ingår i Vacuum, s. 1974-1976, 1990.
-
Electric equivalent circuit for flexural vibrations in piezoelectric materials
Ingår i IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 1990.
-
Investigations of evaporated silicon p-n junctions and their application to junction field-effect transistors
Ingår i Journal of Applied Physics, s. 2148-2152, 1990.
-
Monte Carlo simulations of ion assisted selective deposition
Ingår i Thin Solid Films, s. 13-17, 1990.
-
Passive silicon transensor intended for biomedical, remote pressure monitoring
Ingår i Sensors and Actuators A-Physical, s. 58-61, 1990.
-
Patterning of silicon wafers using the plasma jet dry etching technique
Ingår i Vacuum, 1990.
-
Patterning with the use of ion assisted selective deposition
Ingår i Vacuum, s. 1074-1076-, 1990.
-
Precision accelerometers with ug resolution
Ingår i Sensors and Actuators A-Physical, s. 297-302, 1990.
-
Pressure measurement techniques inurodynamic investigations
Ingår i Neurourology and Urodynamics, 1990.
-
the very high rate plasma jet dry etching technique
Ingår i Journal of the Electrochemical Society, s. 1588-1591, 1990.
Publikationer
Artiklar i tidskrift (ickegranskade)
-
Core level spectroscopy study of N-2 adsorbed on (2x2)K/graphite
Ingår i SURFACE SCIENCE, s. 118-130, 1998.
-
Probe depth variation in grazing exit soft-X-ray emission spectroscopy
Ingår i NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, s. 558-562, 1997.
-
The influence of the deposition angle on the composition of reactively sputtered thin films
Ingår i SURFACE & COATINGS TECHNOLOGY, s. 242-246, 1997.
Publikationer
Konferensbidrag (granskade)
-
A Capacitance-Voltage Measurement Method for DMOS Transistor Channel Length Extraction
Ingår i Proc. of IEEE ICMTS, s. 135-140, 1999.
-
A CMOS Compatible Power MOSFET for Low Voltage GHz Operation
Ingår i IEEE European Microwave Conf vol 2, s. 21-24, 1999.
-
Analysis and Simulation of Mask Erosion During Etching
Ingår i American Vacuum Society 46th National Symposium, Seattle, USA, 1999.
-
Baseline Cu(In,Ga)Se2 Device Production: Control and Statistical Significance
Ingår i 11th International Photovoltaic Science and Engineering Conference, Sapporo, Japan, September 20-24, 1999.
-
Basic Understanding of the Pulsed DC Reactive Sputter Deposition Process
Ingår i Invited to Second Asian-European Int Conf on Plasma Surface Engineering (AEPSE´99), Beijing, September 15-19, 1999.
-
Damages in oxygen plasma bonding
Ingår i The 5th Int Symp Semicind Wafer Bond, 196th Electrochem Soc Meeting, Honolulu, Hawaii Abstract no 1001, 1999.
-
Design of Grided Cu(In,Ga)Se2 Thin Film PV Modules
Ingår i 11th International Photovoltaic Science and Engineering Conference, Sapporo, Japan, September 20-24, 1999.
-
Diamond Membrane Based Miniature X-ray Source
Ingår i 10th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides & Silicon Carbide, Prague, September 12-17, s. 5.509-, 1999.
-
Direct bonding for true all quartz package and new resonator design
Ingår i Proc of the 1999 joint meeting of the European frequency and time forum and the 1999 IEEE International Frequency Control Meeting, Becanson, France, 1999.
-
Feasibility Study of a Miniature X-Ray Source Employing Field Emitting Carbon Fibres
Ingår i Proceedings MME99, Gif sur Yvette, France, s. 140-, 1999.
-
Field emitting structures intended for a miniature x-ray source
Ingår i Transducers´99, Digest of Technical Papers Vol 1, Sendai, Japan, June 7-10, s. 208-211, 1999.
-
Growth of Cu(In,Ga)Se2 thin films by coevaporation using alkaline precursos
Ingår i E-MRS Spring Meeting, Strasbourg, France, June 1-4, 1999, 1999.
-
Integration of silicon and diamond, aluminum nitride or aluminum oxide for electronic materials
Ingår i MRS conference proceedings:III-V and IV-IV Materials and Processing Challenges for Highly Integrated Microelectronics and Optoelectronics. Symposium., 1999.
-
Low Temperature Anodic Bonding of a Sub-Micrometer Fabry-Perot Cavity
Ingår i Proc Fifth Int Symp on Semiconductor Wafer Bonding: Science, Technology and Applications, Honolulu, 17-22 Oct 1999, pp 1015, s. 1015-, 1999.
-
Space qualification of direct bonded silicon microsystems
Ingår i Micro Nano Technology for Space Applications, Pasadena, Calif., USA, 1999.
-
Weibull fracture probability for silicon wafer bond evaluation
Ingår i 5th International Symposium Semicond. Wafer Bonding, Honolulu, 1999.
-
A large micromachined resonant scanning mirror
Ingår i MSW´98 (Micro Structure Workshop), 25-26 March, Uppsala Sweden, 1998.
-
An empirical high frequency large signal model for high voltage LDMOS transistors
Ingår i Proceedings of the IEEE European Microwave Conference, Vol.1, s. 733-738, 1998.
-
Atomic layer epitaxy growth of ZnO buffer layers in Cu(In,Ga)Se2 solar cells
Ingår i Proc 2nd World Conf on Photovoltaic Energy Conversion, Wien July, s. 1145-1148, 1998.
-
Damp Heat Testing of High Performance CIGS Thin Film Solar Cells
Ingår i Proc 2nd World Conf on Photovoltaic Solar Energy Conversion, s. 1164-1164, 1998.
-
Decreasing the optical path length in optoelectronic module using silicon micromachining
Ingår i Conf. proc. Micro Mechanics Europe MME'98, 3-5 June, Ulvik, Norway, s. 92-96, 1998.
-
Effect of magnetic field configuration on the performance of hollow cathode linear arc discharge (LAD) source
Ingår i Int.Conf.Metall.Coat.&Thin Films - ICMCTF-98, San Diego, Paper G.3-7, 1998.
-
Effect of the gas and cathode material on the rf hollow cathode performance
Ingår i Paper at The 193rd Meet.of the Elecctrochem. Soc., San Diego, May, Ext.abstract 203. Proc. Vol. 98-1.The Electrochem. Soc., Inc, s. 203-, 1998.
-
Integration of diamond and silicon for electronic materials
Ingår i the MRS fall meeting, Symposium D-Integration of Dissimilar Materials in Micro- and Optoelectronics, Boston, MA, USA, Dec, 1998.
-
Investigation of the Effect of Impurities in Slurries Used for Chemical Mechanical Polishing
Ingår i The 18th Nordic Semiconductor Meeting, Linköping, Sweden, June 7-10, p. E-70, 1998.
-
Investigation of the etch behaviour around the <111> etch minima
Ingår i Workshop of Physical Chemistry of Wet Chemical Etching of Silicon, May 17-19, Holten, The Netherlands, 1998.
-
Ion assisted deposition of Zn-Mg coatings by unbalanced magnetron sputtering
Ingår i Proc of the 6th Int Conf on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany, 1998.
-
Laser beam induced current characterization of high efficiency CIS and CIGS solar cells
Ingår i Intern. Conf. "POLYSE'98", Schwabish Gmund, Germany 13-18 September, Polycrystalline Semiconductors V - Bulk Materials, Thin Films and Devices in Series "Solid State Phenomena" vol.67-68, Scitech Publ., s. 69-74, 1998.
-
Low cost micromachined mirrors for display systems
Ingår i MME'98 (Micro Mechanics Europe), June 3-5 1998, Ulvang, Norway, 1998.
-
Micro propulsion thrusters for space applications
Ingår i MSW´98, Micro Structure Workshop, March 25-26, Uppsala, Sweden, 1998.
-
Miniaturized x-ray source
Ingår i Proc of the 3rd Micro Structure Workshop, Uppsala March 24-25 (1998) 27.1, 1998.
-
Modeling of Fringe Capacitances in the Oxide and the Depletion Region of a MOS Structure
Ingår i Proc of the 3rd Micro Structure Workshop, Uppsala March 24-25, 27.1, 1998.
-
Optoelectronic image of polycrystalline thin film solar cells based on CuInSe2 and CuInGaSe2 by the laser beam scan
Ingår i Intern. Conf. "Physics at the Turn of the 21st Century",St Petersburg, Russia, Sept. 28- Oct. 2, Summaries C20p, s. 98-, 1998.
-
Patterning of Reactively Sputteres Tantalum Pentoxide, a High Epsilon Material, by Plasma Etching
Ingår i The American Vacuum Society 45th National Symposium in Baltimore, 1998.
-
PECVD by hollow cathodes
Ingår i Proceedings of the 41st Annual Tech.Conf. of the Society of Vacuum Coaters (SVC), Boston 1998, ISSN 0737-5921, Paper P-1, Proc., s. 315-320, 1998.
-
Properties of the Drift Region in a LDMOS Transistor
Ingår i The 18th Nordic Semiconductor Meeting, Linköping, Sweden, June, s. G-96-, 1998.
-
Selective SiOs to Si3N4 etching in inductively coupled fluorocarbon plasmas
Ingår i The 25th national symposium UNY-VAC, Albany NY, 1998.
-
Silicon semi-circular tapered structures made by diffusion limited HF:HNO3 wet etching
Ingår i Micromechanics Europe 1988, MME'98, Ulvik Norge, 1998.
-
Target Compound Layer Formation during Reactive Sputtering
Ingår i Presented at AVS 45th National Symposium in Baltimore, Maryland, USA, November 2-6, 1998.
-
Wet etching of single crystal quartz
Ingår i Workshop of Physical Chemistry of Wet Chemical Etching of Silicon, May 17-19, Holten, The Netherlands, 1998.
-
A Novel High-Frequency High-Voltage LDMOS Transistor using an Extended Gate RESURF Technology
Ingår i ISPSD´97, s. 45-48, 1997.
-
Analytical modelling of fibre holding elements in silicon
Ingår i MOEMS´97 Nov 18-21, Nara, Japan, 1997.
-
Angular dependence of the polysilicon etch rate during dry etching in SF6 and Cl2
Ingår i The 43rd International Symposium of the American Vacuum Society, Philadelphia PA, USA, 1997.
-
BESOI materials with diamond or aluminium as buried insulator
Ingår i DERA workshop on Novel Silicon-On-Insulator Materials and Applications, April 17-18, Malvern, UK, 1997.
-
Characterization and optimization of a dry etching process for silicon nitride spacer formation
Ingår i The 44th international symposium of the American Vacuum Society, San José, USA, 1997.
-
Chemical bath deposited CdS films with different impurity concentrations - Film characterization and Cu(In,Ga)Se2 solar cell results
Ingår i 14th European Photovoltaic Solar Energy Conf. 1326, 1997.
-
Cold Gas thrusters Micromachined in silicon - Design plan
Ingår i 2nd Round Table on Micro-Nano Technologies for space, ESTEC, Noordwijk NL, 1997.
-
Cold gas thrusters micromachined in silicon and design plan
Ingår i ESTEC, Noordwijk, The Netherlands, Oct 15-17, 1997.
-
Collection functions in chalcopyrite heterojunction solar cells: A comparison of Cu(In,Ga)(Se,S)2 absorbers
Ingår i The 14th European Photovoltaic Conf. 1299, 1997.
-
Colloidal Silica as a Final Polishing Slurry
Ingår i CMP´97. 4-5, s. 244-245, 1997.
-
DLTS spectra of thin film photovoltaic devices based on Cu(In,Ga)2
Ingår i The 14th European Photovoltaic Conf. 2153, 1997.
-
Etching through Si-Si direct bonded interfaces
Ingår i MME´97, 1997.
-
Etching through Si-Si direct bonded interfaces
Ingår i MME' 97, 1997.
-
Improvement of the Long-Term Stability of Polysilicon IC-Resistors by Fluorine Doping
Ingår i Materials Research Symposium. 472, s. 457-462, 1997.
-
Lattice Disorder Effects on the Vacancy-Oxygen Centre in Ion-Radiated Silicon
Ingår i Mat. Res. Soc. Symp. 469, s. 233-238, 1997.
-
Low-cost Single-mode Optical Passive Coupler Devices with an MT-interface Based on Polymeric Waveguides in BCB
Ingår i Proc ECIO´97, The 8th European Conference on Integrated Optics and Technical Exhibition, Opt. Soc. America, Washington DC, USA, s. 291-294, 1997.
-
Micro machined propulsion components
Ingår i 2nd Round Table on Micro-Nano Technologies for space, ESTEC, Noordwijk NL, 1997.
-
Modelling of the Gate Capacitance Behaviour of a High-Frequency Small-Signal LDMOS Transistor
Ingår i GigaHertz´97 in Kista, Sweden, s. 96-97, 1997.
-
Nitride titanium alloys for mechanical implants
Ingår i 13th European Conf on Biomaterials, 1997.
-
Quartz-Quartz Bonding
Ingår i ECS Annual meeting, 1997.
-
Rapid migration of defects in ion-implanted silicon
Ingår i Mat Res Soc Symp Proc Vol 469, s. 239-244, 1997.
-
Silicon surfaces for hydrophobic wafer bonding
Ingår i Proc of the Fourth International Symosium on Semiconductor Wafer Bonding: Science, Technology and Applications, Electrochemical Society Proceedings Vol 97-36,, s. 87-94, 1997.
-
Silicon-On-Diamond MOS Transistors with Thermally Gate Oxide
Ingår i SOI Conference. 30-31, s. 30-31, 1997.
-
Sodium in Sputtered Mo Back Contacts for Cu(In,Ga)Se2 Devices: Incorporation, Diffusion and Relationship to Oxygen
Ingår i The 14th European Photovoltaic Solar Energy Conf. 1278, Barcelona Spain, 1997.
-
A lateral symmetrically bistable buckled beam
Ingår i MME´96, Oct 21-22. Barcelona, Spain, 1996.
-
A New High Voltage DMOS Transistor for Microwave Applications
Ingår i The 17th Nordic Semicondustor Meeting, Norway, June, 1996.
-
A new self aligned asymmetric lateral bipolar transistor
Ingår i The 17th Nordic Semiconductor Meeting, Norway, June, 1996.
-
Acoustic sensors for respiratory air flow - from basic principles to clinical evaluation and industrialization
Ingår i Proc IEEE - EMBS, Amsterdam Oct 31 - Nov 3, 1996, Abstract M5-1, 1996.
-
An experimental study and simulation of anisotropic wet etching of quartz
Ingår i MME´96, Oct 21-22, Barcelona, Spain, 1996.
-
CIGS Thin Film Solar Cells by the Coevaporation Method
Ingår i The 9th International Photovoltaic Science and Engineering Conference, Miyazaki, Japan, Nov 11-15, 1996.
-
Electrical Properties of the Silicon/Diamond Interface
Ingår i Presented at the 17th Nordic Semiconductor Meeting, Norway, June, 1996.
-
Micromechanics in optical microsystems - with focus on telecom systems
Ingår i MME´96, Barcelona, Spain, Oct 21-22, 1996.
-
Na in CIGS thin films
Ingår i The 10 Sunshine Workshop on Thin Film Solar Cells, Shinjuku, Tokyo, Japan, Nov 8-9, 1996.
-
Na incorporation and diffusion in CuIn1-xGaxSe2
Ingår i Proceedings of the 25th IEEE Photovoltaic Specialists Conference, Washington DC, USA, (IEEE, Piscataway), s. 985-, 1996.
-
Passive alignment and holding of devices using flexible tongues formed by selective etching
Ingår i MME´96, Oct 21-22, Barcelona, Spain, 1996.
-
Small- and large-area CIGS modules by coevaporation
Ingår i Proceedings of the 25th IEEE Photovoltaic Specialists Conference, Washington DC, USA, s. 801-, 1996.
-
A High-Voltage Giga-Hertz DMOS Transistor Integrated into a Standard CMOS Process
Ingår i GigaHertz´95, National symposium on -wave technology and high speed electronics, 1995.
-
A method for the determination of the angular dependence during dry etching
Ingår i The American Vacuum Society, 42nd National Symposium, Minneapolis, USA, Oct, 1995.
-
Compositional changes during ion-assisted deposition of TixW1-x barrier layers on structured surfaces
Ingår i The 42nd international symposium of the American Vacuum Society, San José, USA, 1995.
-
Fabrication of bulk silicon holding structures for mounting of optical fibres in V-grooves
Ingår i The SPIE conf on Micromachining and Microfabrication ´95, Oct 23-24, Austin, USA, 1995.
-
Integration of a Novel High-Voltage Giga-Hertz DMOS Transistor into a Standard CMOS Process
Ingår i IEEE IEDM Technical Digest, s. 975-978, 1995.
-
Mechanical issues of Mo back contacts for Cu(In,Ga)Se2 devices
Ingår i Proc of the 13th European Photovoltaic Solar Energy Conf, Nice, H.S. Stephens & Associates, Bedford, s. 1983-, 1995.
-
Microwave surfatron system for diamond film depositions
Ingår i International Symposium on Plasma Chemistry – ISPC 12, Minneapolis, USA, August 21-25, Paper no PK 1, 1995.
-
Na precursors for coevaporated Cu(In,Ga)Se2 photovoltaic films
Ingår i Proceedings of the 25th European Photovoltaic Solar Energy Conference, Nice, France, (H.S. Stephens & Associates, Bedford), s. 2080-, 1995.
-
Terracing of (100)-Si with one mask and one etching step using misaligned V-grooves
Ingår i Proc of the 6th Micromechanics Europé Workshop MME´95, Copenhagen, Denmark, 3-5 Sept, 1995.
-
The wheatstone GADGET, a simple circuit for measuring differential resistance variations
Ingår i Proc fo the 6th Micromachined Europé Workshop MME´95, Copenhagen, Denmark, Sept 3-5, 1995.
-
Thin film solar cell modules based on Cu(In,Ga)Se2 prepared by the coevaporation method
Ingår i Proceedings of the 13th European Photovoltaic Solar Energy Conference, Nice, France, s. 1451-, 1995.
-
High current gain lateral bipolar action in DMOS transistors
s. 221-224 1994.
-
High Current Gain Lateral Bipolar Action in DMOS Transistors
Ingår i Proceedings of ESSDERC, s. 221-224, 1994.
-
Steady State and Transient Thermal Characterization of Silicon on Diamond Materials
Ingår i Presented at the 16th Nordic Semiconductor Meeting, 1994.
-
Etching mechanism of silicon
Ingår i MEMS, 1993.
-
Formation of heat sinks using bonding and etch back technique in combination with diamond deposition
Ingår i Proceedings of 2nd Int. Symp. on Semiconductor Wafer Bonding, s. 382-, 1993.
-
High Current Properties of Combined Schottky/pn Diodes; interaction between Closely Located Schottky and pn Diodes
Ingår i Proceedings of ESSDERC, s. 227-230, 1993.
-
On the reliability of apnea alarm devices
s. 42- 1993.
-
Modeling of reactive sputtering
s. 9-18 1991.
-
Silicon etch stop formed by nitrogen implantation
s. 190-199 1991.
Publikationer
Konferensbidrag (ickegranskade)
-
An On-Wafer De-Embedding Technique for Silicon Transistors at Microwave Frequencies
Ingår i IEEE ICMTS, Gothenburg, Sweden, 1999.
-
Design of a Chip Based Microanalytical Fluidic System Based on Electrochemical Detection using Redox Cycling
Ingår i Proc Int Eng Congress and Exposition, Nashville, Tenessee, Nov 14-19, 1999, 1999.
-
Micro sculpturing - Somewhat new materials and micromachining methods to meet new applications
Ingår i Eurosensors -99, 1999.
-
Microfluid Components in Diamond
Ingår i Proc of the 10th Int Conf on Solid-state Sensors and Actuators. Transducers´99, June 7-10, Sendai, Japan, s. 190-193, 1999.
-
Silicon on Diamond Heat Sinks by Bonding and Etch Back
Ingår i Proceedings of IEEE International SOI Conference, s. 58-59, 1993.
DOI för Silicon on Diamond Heat Sinks by Bonding and Etch Back
-
A Lateral Bipolar Transistor Concept Tested on SIMOX- and BSOI-Materials
Ingår i Proceednings IEEE International SOI Conference, s. 76-77, 1992.
DOI för A Lateral Bipolar Transistor Concept Tested on SIMOX- and BSOI-Materials