Vetenskapliga artiklar vid Fasta Tillståndets Elektronik 1990-1999

Compositional variations of sputter deposited Ti/W barrier layers on substrates with pronounced surface topography

Jonsson, Lars; Hedlund, Christer; Katardjiev, Ilia; Berg, Sören

Ingår i THIN SOLID FILMS, s. 227-232, 1999.

Decreasing the optical path length in an optoelectronic module using silicon micromachining

Richard, Åse; Rangsten, Pelle; Strandman, Carola; Backlund, Ylva

Ingår i JOURNAL OF MICROMECHANICS AND MICROENGINEERING, s. 127-129, 1999.

Designed abrasive diamond surfaces

Gåhlin, Rickard; Bjorkman, Henrik; Rangsten, Pelle; Jacobson, Staffan

Ingår i WEAR, s. 387-394, 1999.

Diamond microstructures for optical micro electromechanical systems

Bjorkman, H; Rangsten, Pelle; Hjort, Klas

Ingår i SENSORS AND ACTUATORS A-PHYSICAL, s. 41-47, 1999.

Diamond replicas from microstructured silicon masters

Bjorkman, H; Rangsten, Pelle; Hollman, Patrik; Hjort, Klas

Ingår i SENSORS AND ACTUATORS A-PHYSICAL, s. 24-29, 1999.

Effect of gas and cathode material on the r.f. hollow cathode reactive PVD

Barankova, Hana; Bardos, Ladislav

Ingår i SURFACE & COATINGS TECHNOLOGY, s. 704-708, 1999.

Effect of impurities in the CdS buffer layer on the performance of the Cu(In,Ga)Se-2 thin film solar cell

Kylner, Angela

Ingår i JOURNAL OF APPLIED PHYSICS, s. 6858-6865, 1999.

High precision crystallographic alignment of InP(100)

Vangbo, Mattias; Richard, Åse; Karlsson, Mikael; Hjort, Klas

Ingår i Electrochemical and solid-state letters, s. 407-408, 1999.

DOI för High precision crystallographic alignment of InP(100)

Ion assisted deposition of Zn-Mg coatings by unbalanced magnetron sputtering

Shedden, B A; Katardjiev, Ilia; Berg, Sören; Samandi, M et al.

Ingår i Surface and Coatings Technology, s. 751-754, 1999.

Laser beam induced current characterization of high efficiency chalcopyrite solar cells

Medvedkin, G A; Wennerberg, Johan

Ingår i SOLID STATE PHENOMENA, s. 69-74, 1999.

Low cost micromachined mirrors for display systems

Vangbo, Mattias; Karlsson, S; Backlund, Ylva

Ingår i Journal of Micromechanics and Microengineering, s. 85-88, 1999.

DOI för Low cost micromachined mirrors for display systems

Measurement of low-frequency base and collector current noise and coherence in SiGe heterojunction bipolar transistors using transimpedance amplifiers

Bruce, Staffan; Vandamme, L. K. J.; Rydberg, Anders

Ingår i IEEE Transactions on Electron Devices, s. 993-1000, 1999.

DOI för Measurement of low-frequency base and collector current noise and coherence in SiGe heterojunction bipolar transistors using transimpedance amplifiers

Modelling of fibre holding elements in silicon

Strandman, Carola; Gupta, Ram

Ingår i JOURNAL OF MICROMECHANICS AND MICROENGINEERING, s. 277-282, 1999.

Na incorporation in Mo and CuInSe2 from production processes

Rockett, Angus; Granath, Karin; Asher, S; Al, Jassim MM et al.

Ingår i SOLAR ENERGY MATERIALS AND SOLAR CELLS, s. 255-264, 1999.

Optoelectronic images of polycrystalline thin-film solar cells based on CuInSe2 and CuInGaSe2 obtained by laser scanning

Medvedkin, G A; Stolt, Lars; Wennerberg, Johan

Ingår i SEMICONDUCTORS, s. 1037-1039, 1999.

Preferential sputtering effects in thin film processing

Berg, Sören; Katardjiev, Ilia

Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 1916-1925, 1999.

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Rangsten, Pelle; Vallin, Örjan; Hermansson, Karin; Bäcklund Ylva, []

Ingår i Journal of the Electrochemical society, s. 1104-1105, 1999.

Quartz-to-quartz direct bonding

Rangsten, Pelle; Vallin, Örjan; Hermansson, Karin; Bäcklund, Ylva

Ingår i Journal of the Electrochemical Society, s. 1104-1105, 1999.

DOI för Quartz-to-quartz direct bonding

Residual stress in sputtered gold films on quartz measured by the cantilever beam deflection technique

Thornell, Greger; Ericson, Fredrik; Hedlund, Christer; Ohrmalm, J et al.

Ingår i IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, s. 981-992, 1999.

Target compound layer formation during reactive sputtering

Jonsson, Lars; Nyberg, Tomas; Berg, Sören

Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 1827-1831, 1999.

The behaviour of Na implanted into Mo thin films during annealing

Bodegard, Marika; Granath, Karin; Stolt, Lars; Rockett, Angus

Ingår i SOLAR ENERGY MATERIALS AND SOLAR CELLS, s. 199-208, 1999.

The chemical bath deposited CdS/Cu(In,Ga)Se-2 interface as revealed by X-ray photoelectron spectroscopy

Kylner, Angela

Ingår i JOURNAL OF THE ELECTROCHEMICAL SOCIETY, s. 1816-1823, 1999.

A lateral symmetrically bistable buckled beam

Vangbo, Mattias; Backlund, Ylva

Ingår i Journal of Micromechanics and Microengineering, s. 29-32, 1998.

DOI för A lateral symmetrically bistable buckled beam

An analytical analysis of a compressed bistable buckled beam

Vangbo, Mattias

Ingår i SENSORS AND ACTUATORS A-PHYSICAL, s. 212-216, 1998.

Composition control by current modulation in dc-reactive sputtering

Nyberg, Tomas; Nender, Claes; Berg, Sören

Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 1868-1872, 1998.

Computer modeling as a tool to predict deposition rate and film composition in the reactive sputtering process

Berg, Sören; Nyberg, Tomas; Blom, Hans-Olof; Nender, Claes

Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 1277-1285, 1998.

Etch rates of crystallographic planes in Z-cut quartz - experiments and simulation

Rangsten, Pelle; Hedlund, Christer; Katardjiev, Ilia; Backlund, Ylva

Ingår i JOURNAL OF MICROMECHANICS AND MICROENGINEERING, s. 1-6, 1998.

Features of a nonequilibrium microwave electrode discharge

Bardos, Ladislav; Lebedev, Y

Ingår i PLASMA PHYSICS REPORTS, s. 891-895, 1998.

Modeling of the deposition of stoichiometric Al2O3 using nonarcing direct current magnetron sputtering

Macak, K; Nyberg, Tomas; Macak, P; Olsson, M K et al.

Ingår i J Vac Sci Technol A, s. 1286-1292, 1998.

Passive and fixed alignment of devices using flexible silicon elements formed by selective etching

Strandman, Carola; Backlund, Ylva

Ingår i Journal of Micromechanics and Microengineering, s. 39-44, 1998.

DOI för Passive and fixed alignment of devices using flexible silicon elements formed by selective etching

Selective SiO2-to-Si3N4 etching in inductively coupled fluorocarbon plasmas: Angular dependence of SiO2 and Si3N4 etching rates

Schaepkens, M; Oehrlein, G S; Hedlund, Christer; Jonsson, Lars et al.

Ingår i J Vac Sci Technol, s. 3281-, 1998.

Spherical Microwave Electrode Discharge. Phenomenology and results of probe measurements

Bardos, Ladislav; Lebedev, Y

Ingår i Technical Physics, s. 1428-, 1998.

Temperature and injection dependence of the Shockley-Read-Hall lifetime in electron-irradiated p-type silicon

Keskitalo, Niklas; Jonsson, Per; Nordgren, Kenneth; Bleichner, Henry et al.

Ingår i JOURNAL OF APPLIED PHYSICS, s. 4206-4212, 1998.

A high-resolution X-ray photoelectron spectroscopy study of

Kylner, Angela; Wirde, M

Ingår i Jap J Appl Phys, s. 2167-2175, 1997.

A production process of silicon sensor elements for a fibre optic pressure sensor

Strandman, C; Tenerz, LSL; Hök, Bertil

Ingår i Sensors and Actuators A-Physical, 1997.

A production process of silicon sensor elements for a fibre-optic pressure sensor

Strandman, Carola; Smith, Leif; Tenerz, Lars; Hök, Bertil

Ingår i Sensors and Actuators, A, s. 69-74, 1997.

Angular dependence of the polysilicon etch rate during dry etching in SF6 and Cl-2

Hedlund, Christer; Jonsson, Lars; Katardjiev, Ilia; Berg, Sören et al.

Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 686-691, 1997.

Bulk silicon holding structures for mounting of optical fibres in v-grooves

Strandman, Carola; Bäcklund, Ylva

Ingår i J Microelectromech Syst, s. 35-40, 1997.

Characterization of the linear arc discharge (LAD) source for film deposition

Barankova, Hana; Bardos, Ladislav; Berg, Sören

Ingår i SURFACE & COATINGS TECHNOLOGY, s. 578-582, 1997.

Determination of charge carrier collecting regions in chalcopyrite heterojunction solar cells by electron-beam-induced current measurements

Scheer, R; Wilhelm, M; Lewerenz, HJ; Schock, HW et al.

Ingår i SOLAR ENERGY MATERIALS AND SOLAR CELLS, s. 299-309, 1997.

Diamond deposition from halogenated methane precursors on Si and SiC substrates

Nyberg, Tomas; Heszler, Peter; Carlsson, Jan-Otto

Ingår i Diamond and Related Materials, s. 85-88, 1997.

Diamond deposition in a microwave electrode discharge at reduced pressures

Bardos, Ladislav; Barankova, Hana; Lebedev, Y A; Nyberg, Tomas et al.

Ingår i DIAMOND AND RELATED MATERIALS, s. 224-229, 1997.

Discharge disruptions in a helicon plasma source

Shamrai, K P; Virko, V F; Blom, Hans-Olof; Pavlenko, V P et al.

Ingår i J Vac Sci Technol A, s. 2864-2874, 1997.

Electrical investigation of the silicon/diamond interface

Edholm, Bengt; Olsson, Jörgen; Keskitalo, Niklas; Vestling, Lars

Ingår i Microelectronic Engineering, s. 245-248, 1997.

DOI för Electrical investigation of the silicon/diamond interface

Improved lifetime characteristics in heavy ion irradiated silicon

Keskitalo, Niklas; Hallen, A; Josyula, L; Svensson, BG

Ingår i NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, s. 410-413, 1997.

In situ diagnostic studies of reactive co-sputtering from two targets by means of soft x-ray and optical emission spectroscopy

Nyberg, Tomas; Skytt, P; Gålnander, Björn; Nender, Claes et al.

Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 145-148, 1997.

Linear arc discharge (LAD): A new type of hollow cathode plasma cource

Barankova, Hana; Bardos, L

Ingår i Surface & Coatings Technology, s. 377-380, 1997.

Linear arc discharge source for large area plasma processing

Bardos, Ladislav; Barankova, Hana; Berg, Sören

Ingår i Appl Phys Lett, s. 577-579, 1997.

Micromechanics in optical microsystems - with focus on telecom systems

Bäcklund, Ylva

Ingår i JOURNAL OF MICROMECHANICS AND MICROENGINEERING, s. 93-98, 1997.

Physical models in device simulation of SI power pindiodes for optimal fitting of simulation results to measured data

Isberg, Mats; Jonsson, Per

Ingår i Compel, s. 144-156, 1997.

Preferential Sputtering Effects in the Deposition of TiAl Films by Filtered Cathodic Arc Deposition

Martin, P J; Bendavid, A; Wielunski, L S; Katardjiev, Ilia et al.

Ingår i Nucl Instr Phys Res B, s. 207-209, 1997.

Studies of reactive sputtering of multi-phase chromium nitride

Nyberg, Tomas; Skytt, P; Gålnander, Björn; Nender, Claes et al.

Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 248-252, 1997.

Temperature dependent electron beam induced current experiments on chalcopyrite thin film solar cells

Scheer, R; Wilhelm, M; Stolt, Lars

Ingår i APPLIED PHYSICS LETTERS, s. 1011-1013, 1997.

The ambipolar Auger coefficient: Measured temperature dependeble in electron irradiated and highly injected n-type silicon

Jonsson, Per; Bleichner, Henry; Isberg, Mats; Nordlander, Edvard

Ingår i J Appl Phys, s. 2256-2262, 1997.

Thin film processing by the radio frequency hollow cathodes

Bardos, Ladislav; Barankova, Hana; Berg, Sören

Ingår i SURFACE & COATINGS TECHNOLOGY, s. 723-728, 1997.

A Method for the Determination of the Angular Dependence during Dry Etching

Hedlund, Christer; Strandman, Carola; Katardjiev, Ilia; Bäcklund, Ylva et al.

Ingår i Journal of Vacuum Science & Technology B, s. 3239-, 1996.

DOI för A Method for the Determination of the Angular Dependence during Dry Etching

A non-contacting sensor system for respiratory air flow detection

Hök, Bertil; Blückert, A; Sandberg, G

Ingår i Sensors & Actuators, s. 81-85, 1996.

Compensation Doping of Polysilicon Films for Stable Integrated Circuit Resistors

Rydberg, Matts; Söderbärg, Anders; Hansson, H

Ingår i Solid State Phenomena, s. 561-566, 1996.

Electrical characterisation of silicon pn-junctions terminated with diamond

Olsson, Jörgen; Edholm, Bengt; Söderbärg, Anders; McGinnis, S et al.

Ingår i Diamond and Related Materials, s. 1457-1461, 1996.

DOI för Electrical characterisation of silicon pn-junctions terminated with diamond

Electrostatically excited diaphragm driven as a loudspeaker

Rangsten, Pelle; Rosengren, Lars; Hök, Bertil

Ingår i Sensors & Actuators, s. 211-215, 1996.

Enhanced enzyme activity in silicon integrated enzyme reactors utilizing porous silicon as the copuling matrix

Laurell, Tomas; Drott, J; Rosengren, Lars; Lindström, K

Ingår i Sensors & Actuators, s. 161-166, 1996.

Impurities in chemical bath deposited CdS films for Cu(In,Ga)Se-2 solar cells and their stability

Kylner, Angela; Lindgren, J; Stolt, Lars

Ingår i JOURNAL OF THE ELECTROCHEMICAL SOCIETY, s. 2662-2669, 1996.

Lifetime in proton irradiated silicon

Hallen, Anders; Keskitalo, Niklas; Masszi, Ference; Nagl, V

Ingår i JOURNAL OF APPLIED PHYSICS, s. 3906-3914, 1996.

Limitations to the piezoelectric effect for materials with finite resistivity

Söderkvist, Jan

Ingår i Sensors & Actuators, s. 690-694, 1996.

Linear arc discharge (LAD): A new type of hollow cathode plasma source

Barankova, Hana; Bardos, Ladislav; Nender, Claes; Berg, Sören

Ingår i SURFACE & COATINGS TECHNOLOGY, s. 377-380, 1996.

Microwave surfatron system for plasma processing

Bardos, Ladislav; Barankova, Hana; Berg, Sören

Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 474-477, 1996.

Modification of silicon surfaces with H2SO4:H2O2:HF and HNO3:HF for wafer bonding applications

Ljungberg, Karin; Jansson, U; Bengtsson, S; Söderbärg, Anders

Ingår i JOURNAL OF THE ELECTROCHEMICAL SOCIETY, s. 1709-1714, 1996.

Oxygen in Solution Grown Cds Films for Thin Film Solar Cells

Kylner, Angela; Rockett, Angus; Stolt, Lars

Ingår i Solid State Phenomena, s. 533-540, 1996.

Precise mask alignment to the crystallographic orientation of silicon wafers using wet anisotropic etching

Vangbo, Mattias; Bäsklund, Ylva

Ingår i J Micromech Microeng, s. 279-284, 1996.

Radio frequency hollow cathodes for the plasma processing technology

Bardos, Ladislav

Ingår i SURFACE & COATINGS TECHNOLOGY, s. 648-656, 1996.

Reliability Evaluation of Manufacturing Processes for Bipolar and MOS Devices on Silicon-On-Diamond Materials

Edholm, Bengt; Söderbärg, Anders; Bengtsson, S

Ingår i J Electrochem Soc, s. 1326-1334, 1996.

Resputtering effects during ion beam assisted deposition and the sputter yield amplification effect

Berg, Sören; Katardjiev, Ilia

Ingår i Surface & Coatings Technology, s. 353-362, 1996.

Simulation of forward bias injection in proton irradiated silicon pn-junctions

Keskitalo, Niklas; Hallen, A; Masszi, Ference; Olsson, Jörgen

Ingår i Solid-State Electronics, s. 1087-1092, 1996.

DOI för Simulation of forward bias injection in proton irradiated silicon pn-junctions

Temperature and injection dependence of the Shockley-Read-Hall lifetime in electron irradiated n-type silicon

Bleichner, Henry; Jonsson, Per; Keskitalo, Niklas; Nordlander, Edvard

Ingår i J Appl Phys, s. 9142-9148, 1996.

Terracing of (100) Si with one mask and one etching step using misaligned V-grooves

Vangbo, Mattias; Bäcklund, Ylva

Ingår i Journal of Micromechanics and Microengineering, s. 39-42, 1996.

DOI för Terracing of (100) Si with one mask and one etching step using misaligned V-grooves

The radio frequency hollow cathode plasma jet arc for the film deposition

Barankova, Hana; Bardos, Ladislav; Berg, Sören

Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 3033-3038, 1996.

A bioacoustic method for timing of respiration at cardiac investigation

Xiong, C; Hök, Bertil; Strömberg, T; Loyd, D et al.

Ingår i Clinical Physiology, s. 151-157, 1995.

A new method for film deposition in the discharge of target metal vapour

Bardos, Ladislav; Barankova, Hana; Berg, Sören

Ingår i Surface and Coatings Technology, s. 174-180, 1995.

Abnormal High Rate Deposition of TiN Films by the Radio Frequency Plasma Jet System

Barankova, Hana; Bardos, Ladislav; Berg, Sören

Ingår i J Electrochem Soc, s. 883-887, 1995.

Controlled topography production - True 3D simulation and experiment

Jonsson, Lars; Hedlund, Christer; Katardjiev, Ilia; Barklund, Anna et al.

Ingår i Vacuum, s. 971-975, 1995.

Fabrication of 45 Mirrors Together with Well-Defined V-Grooves Using Wet Anisotropic Etching of Silicon

Strandman, Carola; Rosengren, Lars; Elderstig, H G A; Bäcklund, Ylva

Ingår i Journal of microelectromechanical systems, s. 213-219, 1995.

DOI för Fabrication of 45 Mirrors Together with Well-Defined V-Grooves Using Wet Anisotropic Etching of Silicon

High Current Gain Hybrid Lateral Bipolar Operation of DMOS Transistors

Olsson, Jörgen; Edholm, Bengt; Söderbärg, Anders; Bohlin, Kjell

Ingår i IEEE Transactions on Electron Devices, s. 1628-1635, 1995.

DOI för High Current Gain Hybrid Lateral Bipolar Operation of DMOS Transistors

Hysteresis effects in the sputtering process using two reactive gases

Barankova, Hana; Berg, Sören; Carlsson, Patrik; Nender, Claes

Ingår i Thin Solid Films, s. 181-186, 1995.

Improved Direct Bonding of Si- and SiO2 surfaces by Cleaning in H2SO4:H2O2:HF

Ljungberg, Karin; Söderbärg, Anders; Jansson, Ulf

Ingår i Appl. Phys. Lett, s. 650-652, 1995.

Ionized dopant concentrations in silicon - an analytical approach

Norde, Herman

Ingår i Solid-State Electronics, s. 2059-2061, 1995.

Metastable assisted deposition of TiN films

Barankova, Hana; Bardos, Ladislav; Berg, Sören

Ingår i Appl Phys Lett, s. 1521-1523, 1995.

Modeling of Mass Transport and Gas Kinetics of the Reactive Sputtering Process

Berg, Sören; Nender, Claes

Ingår i Journal de Physique IV, Colloque C5, suppl au de Jorurnal de Physique II, 5, s. C5/45-C5/54, 1995.

Optically trapped non-linear particles as probes for scanning near-field optical microscope

Hertz, H M; Malmqvist, L; Rosengren, Lars; Ljungberg, Karin

Ingår i Ultramicroscopy, s. 309-312, 1995.

Respiratory monitoring during postoperative analgesia

Gordh, T; Rawal, N; Ström, S; Hök, Bertil

Ingår i J Clin Monit, s. 365-372, 1995.

Silicon wafer integrated enzyme reactors

Laurell, T; Drott, J; Rosengren, Lars

Ingår i Biosensors & Bioelectronics, s. 289-299, 1995.

Synergistic sputtering effects during ion bombardment with two ion species

Berg, Sören; Katardjiev, Ilia

Ingår i J Vac Sci Technol, s. 831-833, 1995.

The effect of emitter shortings on turn-off limitations and device failure in GTO thyristors under snubberless operation

Bleichner, Henry; Nordgren, Kenneth; Rosling, Mats; Bakowski, M et al.

Ingår i IEEE Trans on Electron Devices, s. 178-187, 1995.

The effects of HF-cleaning prior to silicon wafer bonding

Ljungberg, Karin; Bäcklund, Ylva; Söderbärg, Anders; Bergh, M et al.

Ingår i Journal of the Electrochemical Society, s. 1297-1303, 1995.

DOI för The effects of HF-cleaning prior to silicon wafer bonding

Titanium nitride deposited by high rate rf hollow cathode plasma jet reactive process

Barankova, Hana; Bardos, Ladislav; Berg, Sören

Ingår i VACUUM, s. 1433-1438, 1995.

Transient Measurements of Heat Distribution in Devices Fabricated on Silicon-On Diamond Material

Edholm, Bengt; Söderbärg, Anders; Olsson, Jörgen; Johansson, E

Ingår i Japanese Journal of Applied Physics, s. 4706-4714, 1995.

DOI för Transient Measurements of Heat Distribution in Devices Fabricated on Silicon-On Diamond Material

Vacancy related defect profiles in MeV cluster-ion irradiated silicon

Hallen, A; Hakansson, P; Keskitalo, N; Olsson, Jörgen et al.

Ingår i Nuclear Instruments and Methods in Physics Research Section B, s. 233-236, 1995.

DOI för Vacancy related defect profiles in MeV cluster-ion irradiated silicon

2-D characterization of dynamic charge distribution in MOS controlled thyristors: Experiment and simulation

Lendenmann, H; Fichtner, W; Bleichner, MRH; Nordlander, E

Ingår i IEEE Electron Device Letters, s. 221-223, 1994.

A micro machined enzyme reactor in <100>-oriented silicon

Laurell, T; Rosengren, L

Ingår i Sensors and Actuators A-Physical, s. 55-58, 1994.

A study of design influence on anode-shorted GTO thyristor turn-on and turn-off

Rosling, M; Bleichner, H; Nordgren, K; Vojdani, Foad et al.

Ingår i IEEE transactions on power electronics, s. 514-521, 1994.

A system for passive implantable pressure sensors

Rosengren, L; Rangsten, P; Bäcklund, Ylva; Hök, Bertil et al.

Ingår i Sensors and Actuators A-Physical, s. 55-58, 1994.

Assembling three-dimensional microstructures using gold-silicon eutectic bonding

Tiensuu, A-L; Bexell, M; Schweitz, J-Å; Smith, L et al.

Ingår i Sensors and Actuators A-Physical, s. 227-236, 1994.

Buried cobalt silicide slyers in silicon created by wafer bonding

Ljungberg, K; Söderbärg, Anders; Tiensuu, A-L; Johansson, S et al.

Ingår i Journal of the Electrochemical Society, s. 2829-2833, 1994.

Characterization of an inchworm prototype motor

Bexell, ?; Tiensuu, M; Schweitz, J-Å; Söderkvist, J et al.

Ingår i Sensors and Actuators A-Physical, s. 322-329, 1994.

Characterization of spontaneously bonded hydrophobic silicon surfaces

Ljungberg, K; Söderbärg, Anders; Bengtsson, S; Jauhiainen, A

Ingår i Journal of the Electrochemical Society, s. 562-566, 1994.

Continuous ink-jet print head utilizing silicon micromachined nozzles

Smith, L; Söderbärg, A; Björkengren, U

Ingår i Sensors and Actuators A-Physical, s. 311-316, 1994.

Deposition of carbonaceous films onto internal walls of tubes

Bardos, L; Barankova, Hana; Nyberg, T; Berg, Sören

Ingår i Journal of the Electrochemical Society, s. 374-377, 1994.

Effect of the space charge sheath on properties of carbon and diamond films grown in the radio frequency plasma jet

Bardos, L; Nyberg, T; Berg, Sören; Barankova, Hana

Ingår i Diamond and related materials, s. 528-530, 1994.

Effect of the space charge sheath on properties of carbon and diamond films grown in the radio sheath on properties of carbon and diamond films grown in the radio frequency plasma jet

Bardos, L; Nyberg, T; Berg, Sören; Barankova, Hana

Ingår i Diamond and related materials, s. 528-530, 1994.

Enhancement of the reactive deposition rate of TiN films at low nitrogen content

Barankova, Hana; Bardos, L; Berg, Sören

Ingår i Journal of the Electrochemical Society, 1994.

Evaluation of local lifetime in proton irradiated silicon

Nagl, V; Hallén, Anders; Masszi, Ferenc

Ingår i Journal of Applied Physics, 1994.

Gallium arsenide as a mechanical material

Hjort, Klas; Söderkvist, J; Schweitz, J-Å

Ingår i Journal of Micromechanics and Microengineering, s. 1-13, 1994.

Large area selective thin film deposition by bias sputtering

Berg, Sören; Katardjiev, Ilia V; Nender, C; Carlsson, P

Ingår i Thin Solid Films, s. 1-8, 1994.

Measurements of failure phenomena ininductively loaded multi-cathode GTO thyristors

Bleichner, H; Rosling, M; Vobecky, J; Bakowski, M et al.

Ingår i IEEE Transactions on Electron Devices, s. 251-257, 1994.

Microloading effect in reactive etching

Hedlund, C; Blom, Hans-Olof; Berg, Sören

Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, s. 1962-1965, 1994.

Micromachined gyroscopes

Söderkvist, J

Ingår i Sensors and Actuators A-Physical, s. 65-71, 1994.

Micromachined optical planes and reflectors in silicon

Rosengren, L; Smith, L; Bäcklund, Ylva

Ingår i Sensors and Actuators A-Physical, s. 330-333, 1994.

Micro-MOS - a first principle based 3D Monte Carlo simulation program for sub-half micron SI MOSFET:s

Tarnay, K; Poppe, A; Verhas, P; Kocsis, T et al.

Ingår i Solid-State Electronics, 1994.

Modelling of bias sputter deposition processes

Berg, Sören; Katardjiev, Ilia V

Ingår i Surface and Coatings technology, s. 325-331, 1994.

Numerical and experimental studies of the sputter yield amplification effect

Nender, C; Katardjiev, Ilia V; Biersack, JP; Berg, Sören et al.

Ingår i Radiation effects and defects in solids (Print), s. 281-291, 1994.

Preferential sputtering of silicon from metal silicides at elevated temperatures

Hedlund, C; Carlsson, P; Blom, Hans-Olof; Berg, Sören et al.

Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, s. 1542-1546, 1994.

Pressure microsensor system using a closed-loop configuration

Hök, B; Tenerz, L; Berg, Sören; Blückert, A

Ingår i Sensors and Actuators A-Physical, s. 7881-, 1994.

The ambipolar diffusion coefficient in silicon: Dependence on excess-carrier concentration and temperature

Rosling, M; Bleichner, H; Jonsson, P; Nordlander, E

Ingår i Journal of Applied Physics, s. 2855-2859, 1994.

The Piezoelectric effect of GaAs used for resonant sensors and actuators

Hjort, Klas; Söderkvist, J

Ingår i Journal of Micromechanics and Microengineering, s. 28-34, 1994.

The piezoelectric effect of GaAs used for resonators and resonant sensors

Söderkvist, J; Hjort, Klas

Ingår i Journal of Micromechanics and Microengineering, s. 28-34, 1994.

The stady state in net erosion and net growth regimes during simultaneous ion bombardment and atomicdeposition processes

Katardjiev, Ilia V; Carter, G; Nobes, MJ; Berg, Sören et al.

Ingår i Radiation effects and defects in solids (Print), s. 315-333, 1994.

Theoretical Models for the Action Spectrum and the Current-Voltage Characteristics of Microporous Semiconductor Films in Photoelectrochemical Cells

Södergren, Sven; Hagfeldt, Anders; Olsson, Jörgen; Lindquist, Sten-Erik

Ingår i The Journal of Physical Chemistry C, s. 5552-5556, 1994.

DOI för Theoretical Models for the Action Spectrum and the Current-Voltage Characteristics of Microporous Semiconductor Films in Photoelectrochemical Cells

Three-dimensional simulation of surface evolution during growth and erosion

Katardjiev, Ilia V; Carter, G; Nobes, MJ; Berg, Sören et al.

Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, s. 61-68, 1994.

X-ray reflection, a technique for measuring sputtering yields of thin film

Verhoeven, J; Keppel, A; Schlatmann, R; Xue, Y et al.

Ingår i Nuclear Instruments and Methods in Physics Research Section B:: Beam Interactions with Materials and Atoms, s. 395-403, 1994.

A new respiratory rate monitor: development and initial clinical experience

Hök, Bertil; Wiklund, Lars; Henneberg, Steen

Ingår i International Journal of Clinical Monitoring and Computing, s. 101-107, 1993.

A Self-Aligned Lateral Bipolar Transistor Concept Realized on SIMOX-material

Edholm, Bengt; Olsson, Jörgen; Söderbärg, Anders

Ingår i IEEE Transactions on Electron Devices, s. 2359-2360, 1993.

DOI för A Self-Aligned Lateral Bipolar Transistor Concept Realized on SIMOX-material

A time-dependent two-dimensional analysis of the turn-off process in a gate turn-off thyristor (GTO)

Vobecky, J; Bleichner, H; Rosling, M; Nordlander, E

Ingår i IEEE Transactions on Electron Devices, s. 2352-2358, 1993.

An r.f. plasma jet applied to diamond, glassy carbon and silicon carbide film synthesis

Bardos, L; Berg, Sören; Barankova, Hana

Ingår i Diamond and related materials, s. 517-522, 1993.

Anisotropic etching of Z-cut quartz

Hedlund, C; Lindberg, U; Söderkvist, UBoJ

Ingår i Journal of Micromechanics and Microengineering, s. 65-73, 1993.

Characteristics of quasi-buckling

Söderkvist, Jan; Lindberg, U

Ingår i Sensors and materials, 1993.

Characterization of a prototype active joint for micro-robotics driven by piezoelectric bimorphs

Bexell, M; Tiensuu, AL; Schweitz, J-Å; Söderkvist, Jan et al.

Ingår i Sensors and Actuators A-Physical, 1993.

Characterization of spontaneously bonded hydrophobic silicon surfaces

Ljungberg, Karin; Söderbärg, Anders; Bengtsson, S; Jauhiainen, A

Ingår i Journal of the Electrochemical Society, 1993.

Continuous ink jet print head utilizing silicon micromachined nozzles

Smith, Leif; Söderbärg, Anders; Björkengren, U

Ingår i Sensors and Actuators A-Physical, 1993.

Electro-chemical etch stop obtained by accumulation of free carriers without pn junction

Smith, Leif; Söderbärg, Anders

Ingår i Journal of the Electrochemical Society, s. 271-275, 1993.

Evaluation and interpretation 3D Monte Carlo simulation results of submcron MOS transistors

Tarnay, K; Poppe, A; Kocsis, T; Masszi, Ferenc

Ingår i Journal of Communications, s. 22-31, 1993.

Evaluation of carrier lifetime in power semiconductors using both optical and electrical measurements supported by two-dimensional computer simulation

Jonsson, P; Isberg, M; Masszi, Ferenc; Vojdani, F et al.

Ingår i Journal of Communications, s. 14-22, 1993.

Experimental evaluation of two new sensors for respiratory rate monitoring

Vegfors, M; Ugnell, H; Hök, Bertil; Öberg, PÅ et al.

Ingår i Physiological Measurement, s. 171-181, 1993.

Flexural vibrations in piezoelectric semi-insulating GaAs

Söderkvist, J; Hjort, Klas

Ingår i Sensors and Actuators A-Physical, s. 133-139, 1993.

Flexural vibrations in piezoelectric semi-insulating GaAs

Hjort, Klas; Söderkvist, Jan

Ingår i Sensors and Actuators A-Physical, 1993.

High bias sputtering for large area selective deposition

Nender, C; Katardjiev, Ilia V; Barklund, AM; Berg, Sören et al.

Ingår i Thin Solid Films, s. 87-90, 1993.

Influence of different etching mechanisms on the angular dependence of silicon nitride etching

Barklund, AM; Blom, Hans-Olof

Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, s. 1226-1229, 1993.

Ion-assisted selective deposition of aluminium for via-hole interconnections

Barklund, AM; Berg, Sören; Katardjiev, IV; Nender, C et al.

Ingår i Vacuum, s. 197-201, 1993.

Micromachined gyroscopes

Söderkvist, Jan

Ingår i Sensors and Actuators A-Physical, 1993.

Post-anesthesia monitoring revisited: Incidence of true and alse alarms from different monitoring devices.

Wiklund, L; Hök, Bertil; Ståhl, K; Jordeby-Jönsson, A

Ingår i Journal of clinical anesthesia, 1993.

Pressure microsensor system using a closed-loop configuration

Hök, Bertil; Tenerz, L; Berg, Sören; Blückert, A

Ingår i Sensors and Actuators A-Physical, 1993.

Quasi-buckling of micromachined beams

Lindberg, Ulf; Söderkvist, Jan; Lammerink, T; Elwenspoek, M

Ingår i Journal of Micromechanics and Microengineering, 1993.

Radio frequency plasma jet applied to boating of internal walls of narrow tubes

Bardos, L; Berg, Sören; Barankova, Hana

Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, s. 1486-1490, 1993.

Radio frequency plasma jet applied to coating of internal walls of narrow tubes

Bardos, L; Berg, Sören; Barankova, Hana

Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, s. 1486-1490, 1993.

Reactive deposition of diamond and Si carbide films by hydrogen plasma etching of graphite and Si in rf plasma jet

Bardos, L; Berg, Sören; Barankova, Hana; Carlsson, JO

Ingår i Thin Solid Films, s. 218-222, 1993.

Self aligned micromachined ink jet nozzles

Smith, Leif; Söderbärg, Anders; Björkengren, U; Nybom, G

Ingår i Transducers, s. 246-249, 1993.

Serial cosputtering of metals: Modelling of sputtering from a periodically codeposited surface

Carlsson, P; Berg, Sören; Belkind, A; Katardjiev, Ilia V

Ingår i Surface and Coatings Technology, s. 287-292, 1993.

Serial cosputtering of some metal alloys: Enhancement of partial sputtering yields of light metals

Belkind, A; Orban, Z; Berg, Sören; Carlsson, P

Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, s. 314-318, 1993.

Similarities betwen piezoelectric, thermal and other internal means of exciting vibrations

Söderkvist, Jan

Ingår i Journal of Micromechanics and Microengineering, s. 24-31, 1993.

Spontaneous bonding of hyydrophobic silicon surfaces

Ljungberg, Karin; Söderbärg, Anders; Bäcklund, Ylva

Ingår i Applied Physics Letters, s. 1362-1364, 1993.

Studies of the optical emission from a hydrogen-hydrocarbon rf plasma jet stream during diamond film deposition

Barankova, Hana; Bardos, L; Berg, Sören

Ingår i Diamond and related materials, s. 347-352, 1993.

The evolution of atomic scale topography by sputtering erosion

Carter, G; Nobes, M; Stoere, H; Katardjiev, Ilia V

Ingår i Surface and Interface Analysis, s. 90-94, 1993.

The theory of ion beam polishing and machining

Carter, G; Nobes, MJ; Katardjiev, Ilia V

Ingår i Vacuum, s. 303-309, 1993.

Very High Current Gain Enhancement by Substrate Biasing of Lateral Bipolar Transistors on Thin SOI

Edholm, Bengt; Olsson, Jörgen; Söderbärg, Anders

Ingår i Microelectronic Engineering, s. 379-382, 1993.

DOI för Very High Current Gain Enhancement by Substrate Biasing of Lateral Bipolar Transistors on Thin SOI

A novel technique for the simulataneous measurement of ambipolar carrier lifetime and diffusion coefficient in silicon

Rosling, M; Bleichner, H; Lundqvist, M; Nordlander, E

Ingår i Solid-State Electronics, s. 1223-1227, 1992.

A study of turn-off limitations and failur mechanisms in GTO thyristors by means of 2-D time-resolved optical measurements

Bleichner, H; Bakowski, M; Rosling, M; Nordlander, E et al.

Ingår i Solid-State Electronics, s. 1683-1695, 1992.

A suggested mechanism for silicon direct bonding from studying hydrophilic and hydrophobic surfaces

Bäcklund, Ylva; Hermansson, K; Söderbärg, Anders

Ingår i Journal of Micromechanics and Microengineering, s. 158-160, 1992.

A system for wireless intraocular pressure measurements using a silicon micromachined sensor

Rosengren, L; Bäcklund, Ylva; Sjöström, T; Hök, Bertil et al.

Ingår i Journal of Micromechanics and Microengineering, s. 202-204, 1992.

Activation and detection of mechanical vibrations in piezoelectric beams

Söderkvist, J

Ingår i Sensors and Actuators A-Physical, s. 567-571, 1992.

Active joints for microrobot limbs

Elwenspoek, M; Smith, Leif; Hök, Bertil

Ingår i Journal of Micromechanics and Microengineering, s. 221-223, 1992.

Atom assisted sputtering yield amplification

Berg, Sören; Barklund, AM; Gelin, B; Nender, C et al.

Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, s. 1592-1596, 1992.

Bond-strenght measurements related to silicon surface hydrophilicity

Bäcklund, Ylva; Hermansson, K; Smith, Leif

Ingår i Journal of the Electrochemical Society, s. 2299-, 1992.

Deposition and properties of diamond films - a review

Bardos, l

Ingår i VakuumNytt, s. 91-95, 1992.

Deposition of thin diamond films - a short review

Bardos, L

Ingår i Czechoslovak Journal of Physics, s. 141-150, 1992.

Enhanced sputtering of one species in the processing of multielement thin films

Harper, JME; Berg, Sören; Nender, C; Katardjiev, Ilia V et al.

Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, s. 1765-, 1992.

Investigation of buried etch stop layer in silicon by nitrogen implantation

Söderbärg, Anders

Ingår i Journal of the Electrochemical Society, s. 561-566, 1992.

Investigation of the Current-Voltage Behavior of a Combined Schottky-p-n diode

Olsson, Jörgen; Norde, Herman; Magnusson, Ulf

Ingår i Solid-State Electronics, s. 1229-1231, 1992.

DOI för Investigation of the Current-Voltage Behavior of a Combined Schottky-p-n diode

Low pressure rf plasma jet - a new tool for surface processing

Bardos, L; Berg, Sören

Ingår i Surface and coatings Technology, s. 91-95, 1992.

Micro vials on a silicon wafer for sample introduction in capillary electrophoreses

Jansson, M; Emmer, Å; Roeraade, J; Lindberg, U et al.

Ingår i Journal of chromatography. B, 1992.

Micro vials on a silicon wafer for sample introduction in capillary electrophoresis

Emmer, Mårten; Emmer, Åsa; Roeraade, Johan; Lindberg, Ulf et al.

Ingår i Journal of chromatography. B, 1992.

Micromachined sensor structures with linear capacitive response

Rosengren, L; Söderkvist, J; Smith, L

Ingår i Sensors and Actuators A-Physical, s. 200-205, 1992.

New shapes in (100) Si using KOH and EDP etches

Bäcklund, Ylva; Rosengren, Lars

Ingår i Journal of Micromechanics and Microengineering, s. 75-79, 1992.

On the impact parameter probability distribution in atomic collisions for Monte Carlo simulations

Katardjiev, Ilia V; Berg, Sören; Nender, C; Miteva, V

Ingår i Nuclear Instruments and Methods in Physics Research Section B, s. 28-32, 1992.

Post-anesthesia monitoring: More than 75% of pulse oximeter alarms are trivial

Wiklund, L; Hök, Bertil; Jordeby-Jönsson, A; Ståhl, K

Ingår i Anesthesiology, s. 582-, 1992.

Sputte erosion amplification

Berg, Sören; Barklund, AM; Nender, C; Katardjiev, Ilia V et al.

Ingår i Surface and Coatings Technology, s. 131-135, 1992.

The IPOP-IOL: A probe into the eye

Svedbergh, Björn; Bäcklund, Ylva; Hök, Bertil; Rosengren, L

Ingår i Acta Ophthalmologica, s. 266-268, 1992.

Two-dimensional etching diagrams for z-cut quartz

Hedlund, C; Bucht, U; Söderkvist, J

Ingår i Journal of Micromechanics and Microengineering, s. 215-217, 1992.

A lateral bipolar transistor concept on SOI using a self-aligned base definition technique

Magnusson, U; Edholm, B; Masszi, Ferenc

Ingår i Microelectronic Engineering, s. 341-344, 1991.

A phenomenological method of predicting the performance of piezoelectric beams

Söderkvist, J

Ingår i Journal of the Acoustical Society of America, s. 693-699, 1991.

A phenomenological method of predicting the performance of piezoelectric beams

Söderkvist, J

Ingår i Journal of Micromechanics and Microengineering, s. 16-24, 1991.

An optical systm for bilateral recombination-radiation diagnostics of the carrier redistribution in switching power devices

Lundqvist, M; Bleichner, H; Nordlander, E

Ingår i IEEE Transactions on Instrumentation and Measurement, s. 956-961, 1991.

Bond-strength measurements related to silicon surface hydrophilicity

Bäcklund, Ylva; Hermansson, K; Smith, Leif

Ingår i Electrochemical Society, s. 682-, 1991.

Dynamic behavior of a piezoelectric beam

Söderkvist, J

Ingår i Journal of the Acoustical Society of America, s. 686-692, 1991.

Evaluation of boron distributions in amorphous 49BF2+-implanted silicon

Tirén, J; Svensson, BG

Ingår i Journal of the Electrochemical Society, s. 571-576, 1991.

Highly excited states of nitric oxide studied by high-resolution resonance-enhanced multiphoton ionization spectroscopy

Luo, Y; Cheng, YD; Maripuu, R; Seibt, Wolfgang et al.

Ingår i Chemical Physics, s. 473-481, 1991.

Microphone design for bio-acoustic signals with suppression of noise and artefacts

Hök, Bertil

Ingår i Sensors and Actuators A-Physical, s. 527-533, 1991.

Modeling of multicomponent reactive sputtering

Moradi, M; Nender, C; Berg, Sören; Blom, Hans-Olof et al.

Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 1991.

Piezoelectric beams and vibrating angular rate sensors

Söderkvist, J

Ingår i IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 1991.

Silicon surface damage caused by reactive ion etching in fluorocarbon gas mixtures containing hydrogen

Norström, H; Östling, H-O BM; Nylandstedt-Larsen, A; Keinonen, J et al.

Ingår i Journal of Vacuum Science & Technology B, s. 34-40, 1991.

T-DYN Monte Carlo simulations applied to ion assited thin film processes

Biersack, JP; Berg, Sören; Nender, C

Ingår i Nuclear Instruments and Methods in Physics Research Section A, s. 21-27, 1991.

A time-resolved optical system for spatial characterization of the carrier distribution in a gate turn-off thyristor (GTO)

Bleichner, H; Nordlander, E; Rosling, M; Berg, Sören

Ingår i IEEE Transactions on Instrumentation and Measurement, s. 473-478, 1990.

A time-resolved optical system for spatial characterization of the distribution in a gate turn-off thyristor (GTO)

Bleichner, H; Nordlander, E; Rosling, M; Berg, Sören

Ingår i IEEE Transactions on Instruments and Measurements, s. 473-478, 1990.

An analysis of space-dependent electric fields used in exciting flexural vibrations of piezoelectric beams

Söderkvist, J

Ingår i Measurements Science and Technology, s. 731-737, 1990.

An equivalent circuit description of two coupled vibrations

Söderkvist, Jan

Ingår i Journal of the Acoustical Society of America, 1990.

an utlrashallow diffused n0p-junction using antimony for device applications

Söderbärg, A; Grelsson, Ö; Magnusson, U

Ingår i Journal of Applied Physics, s. 7413-7416, 1990.

Angular dependence on reactive ion beam etching

Barklund, AM; Blom, Hans-Olof; Berg, Sören; Norström, H et al.

Ingår i Vuoto, s. 467-, 1990.

Batch processing of laterally mobile structures in single-crystalline silicon

Lindberg, U; Hök, Bertil; Tenerz, L; Tirén, J et al.

Ingår i Sensors and Actuators A-Physical, s. 987-981, 1990.

Deep level transient spectroscopy analysis of fast ion tracks in silicon

Hallén, A; Paska, Z; Rosling, M; Sundqvist, BUR et al.

Ingår i Journal of Applied Physics, s. 1266-1271, 1990.

Design of a solid-state gyroscopic sensor made of quartz

Söderkvist, J

Ingår i Sensors and Actuators A-Physical, s. 293-296, 1990.

Dynamic modeling of the process control of reactive sputtering

Moradi, M; Nender, C; Blom, Hans-Olof; Berg, Sören

Ingår i Vacuum, s. 1974-1976, 1990.

Electric equivalent circuit for flexural vibrations in piezoelectric materials

Söderkvist, Jan

Ingår i IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 1990.

Investigations of evaporated silicon p-n junctions and their application to junction field-effect transistors

Tirén, J; Grelsson, Ö; Söderbärg, A; Magnusson, U et al.

Ingår i Journal of Applied Physics, s. 2148-2152, 1990.

Monte Carlo simulations of ion assisted selective deposition

Nender, C; Berg, Sören; Biersack, JP

Ingår i Thin Solid Films, s. 13-17, 1990.

Passive silicon transensor intended for biomedical, remote pressure monitoring

Bäcklund, Ylva; Rosengren, L; Hök, Bertil; Svedbergh, Björn

Ingår i Sensors and Actuators A-Physical, s. 58-61, 1990.

Patterning of silicon wafers using the plasma jet dry etching technique

Barklund, AM; Blom, Hans-Olof; Berg, Sören; Bardos, L

Ingår i Vacuum, 1990.

Patterning with the use of ion assisted selective deposition

Gelin, B; Barklund, AM; Nender, C; Berg, Sören

Ingår i Vacuum, s. 1074-1076-, 1990.

Precision accelerometers with ug resolution

Rudolf, F; Jornod, A; Bergqvist, J; Leuthold, H

Ingår i Sensors and Actuators A-Physical, s. 297-302, 1990.

Pressure measurement techniques inurodynamic investigations

Ask, Per; Hök, Bertil

Ingår i Neurourology and Urodynamics, 1990.

the very high rate plasma jet dry etching technique

Bardos, Ladislav; Berg, Sören; Blom, Hans-Olof; Barklund, AM

Ingår i Journal of the Electrochemical Society, s. 1588-1591, 1990.

Core level spectroscopy study of N-2 adsorbed on (2x2)K/graphite

Puglia, Carla; Bennich, P; Hasselstrom, J; Ribbing, Carolina et al.

Ingår i SURFACE SCIENCE, s. 118-130, 1998.

Probe depth variation in grazing exit soft-X-ray emission spectroscopy

Skytt, P; Gålander, Björn; Nyberg, Tomas; Nordgren, Joseph et al.

Ingår i NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, s. 558-562, 1997.

The influence of the deposition angle on the composition of reactively sputtered thin films

Nyberg, Tomas; Nender, Claes; Hogberg, H; Berg, Sören

Ingår i SURFACE & COATINGS TECHNOLOGY, s. 242-246, 1997.

A Capacitance-Voltage Measurement Method for DMOS Transistor Channel Length Extraction

Olsson, Jörgen; Valtonen, Roger; Heinle, Ulrich; Vestling, Lars et al.

Ingår i Proc. of IEEE ICMTS, s. 135-140, 1999.

A CMOS Compatible Power MOSFET for Low Voltage GHz Operation

Vestling, Lars; Bengtsson, L; Olsson, Jörgen

Ingår i IEEE European Microwave Conf vol 2, s. 21-24, 1999.

Analysis and Simulation of Mask Erosion During Etching

Westlinder, Jörgen; Engelmark, Fredrik; Jonsson, Lars; Hedlund, Christer et al.

Ingår i American Vacuum Society 46th National Symposium, Seattle, USA, 1999.

Baseline Cu(In,Ga)Se2 Device Production: Control and Statistical Significance

Kessler, John; Bodegård, Marika; Hedström, J; Stolt, Lars

Ingår i 11th International Photovoltaic Science and Engineering Conference, Sapporo, Japan, September 20-24, 1999.

Basic Understanding of the Pulsed DC Reactive Sputter Deposition Process

Berg, Sören; Jonsson, Lars; Nyberg, Tomas; Katardjiev, Ilia

Ingår i Invited to Second Asian-European Int Conf on Plasma Surface Engineering (AEPSE´99), Beijing, September 15-19, 1999.

Damages in oxygen plasma bonding

Pasquariello, Donato; Hedlund, Christer; Hjort, Klas

Ingår i The 5th Int Symp Semicind Wafer Bond, 196th Electrochem Soc Meeting, Honolulu, Hawaii Abstract no 1001, 1999.

Design of Grided Cu(In,Ga)Se2 Thin Film PV Modules

Wennerberg, Johan; Kessler, John; Stolt, Lars

Ingår i 11th International Photovoltaic Science and Engineering Conference, Sapporo, Japan, September 20-24, 1999.

Diamond Membrane Based Miniature X-ray Source

Rangsten, Pelle; Ribbing, Carolina; Hollman, Patrik; Smith, Leif et al.

Ingår i 10th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides & Silicon Carbide, Prague, September 12-17, s. 5.509-, 1999.

Direct bonding for true all quartz package and new resonator design

Vallin, Örjan; Rangsten, Pelle

Ingår i Proc of the 1999 joint meeting of the European frequency and time forum and the 1999 IEEE International Frequency Control Meeting, Becanson, France, 1999.

Feasibility study of a miniature X-ray source employing field emitting carbon fibres

Ribbing, C; Rangsten, P; Norde, Bertil; Hök, Bertil et al.

s. 140- 1999.

Feasibility Study of a Miniature X-Ray Source Employing Field Emitting Carbon Fibres

Ribbing, Carolina; Rangsten, Pelle; Norde, Herman; Hök, Bertil et al.

Ingår i Proceedings MME99, Gif sur Yvette, France, s. 140-, 1999.

Field emitting structures intended for a miniature x-ray source

Rangsten, Pelle; Ribbing, Carolina; Strandman, Carola; Hollman, Patrik et al.

Ingår i Transducers´99, Digest of Technical Papers Vol 1, Sendai, Japan, June 7-10, s. 208-211, 1999.

Growth of Cu(In,Ga)Se2 thin films by coevaporation using alkaline precursos

Bodegård, Marika; Granath, Karin; Stolt, Lars

Ingår i E-MRS Spring Meeting, Strasbourg, France, June 1-4, 1999, 1999.

Integration of silicon and diamond, aluminum nitride or aluminum oxide for electronic materials

Bengtsson, Stefan; Bergh, Mats; Söderbärg, Anders; Edholm, Bengt et al.

Ingår i MRS conference proceedings:III-V and IV-IV Materials and Processing Challenges for Highly Integrated Microelectronics and Optoelectronics. Symposium., 1999.

Low Temperature Anodic Bonding of a Sub-Micrometer Fabry-Perot Cavity

Richard, Åse; Sundin, Kjell; Bäcklund, Ylva

Ingår i Proc Fifth Int Symp on Semiconductor Wafer Bonding: Science, Technology and Applications, Honolulu, 17-22 Oct 1999, pp 1015, s. 1015-, 1999.

Space qualification of direct bonded silicon microsystems

Köhler, Johan; Jonsson, Kerstin; Jönsson, Mats; Stenmark, Lars et al.

Ingår i Micro Nano Technology for Space Applications, Pasadena, Calif., USA, 1999.

Weibull fracture probability for silicon wafer bond evaluation

Köhler, Johan; Jonsson, Kerstin; Greek, Staffan; Stenmark, Lars et al.

Ingår i 5th International Symposium Semicond. Wafer Bonding, Honolulu, 1999.

A large micromachined resonant scanning mirror

Vangbo, Mattias; Karlsson, Staffan; Bäcklund, Ylva

Ingår i MSW´98 (Micro Structure Workshop), 25-26 March, Uppsala Sweden, 1998.

An empirical high frequency large signal model for high voltage LDMOS transistors

Bengtsson, L; Angelov, I; Zirath, H; Olsson, Jörgen

Ingår i Proceedings of the IEEE European Microwave Conference, Vol.1, s. 733-738, 1998.

Atomic layer epitaxy growth of ZnO buffer layers in Cu(In,Ga)Se2 solar cells

Sterner, Jan; Kessler, John; Bodegård, Marika; Stolt, Lars

Ingår i Proc 2nd World Conf on Photovoltaic Energy Conversion, Wien July, s. 1145-1148, 1998.

Damp Heat Testing of High Performance CIGS Thin Film Solar Cells

Wennerberg, Johan; Kessler, John; Bodegård, Marika; Stolt, Lars

Ingår i Proc 2nd World Conf on Photovoltaic Solar Energy Conversion, s. 1164-1164, 1998.

Decreasing the optical path length in optoelectronic module using silicon micromachining

Rangsten, Pelle; Richard, Åse; Strandman, Carola; Bäcklund, Ylva

Ingår i Conf. proc. Micro Mechanics Europe MME'98, 3-5 June, Ulvik, Norway, s. 92-96, 1998.

Effect of magnetic field configuration on the performance of hollow cathode linear arc discharge (LAD) source

Barankova, Hana; Bardos, Ladislav

Ingår i Int.Conf.Metall.Coat.&Thin Films - ICMCTF-98, San Diego, Paper G.3-7, 1998.

Effect of the gas and cathode material on the rf hollow cathode performance

Barankova, Hana; Bardos, Ladislav

Ingår i Paper at The 193rd Meet.of the Elecctrochem. Soc., San Diego, May, Ext.abstract 203. Proc. Vol. 98-1.The Electrochem. Soc., Inc, s. 203-, 1998.

InP based Micro Opto Electro Mechanics

Pasquariello, Donato; Karlsson, Mikael; Greek, Staffan; Hedlund, Christer et al.

1998.

Integration of diamond and silicon for electronic materials

Bengtsson, S; Bergh, M; Söderbärg, Anders; Edholm, Bengt et al.

Ingår i the MRS fall meeting, Symposium D-Integration of Dissimilar Materials in Micro- and Optoelectronics, Boston, MA, USA, Dec, 1998.

Investigation of the Effect of Impurities in Slurries Used for Chemical Mechanical Polishing

Forsberg, Markus; Olsson, Jörgen; Edholm, Bengt; Ericsson, P et al.

Ingår i The 18th Nordic Semiconductor Meeting, Linköping, Sweden, June 7-10, p. E-70, 1998.

Investigation of the etch behaviour around the <111> etch minima

Vangbo, Mattias; Bäcklund, Ylva

Ingår i Workshop of Physical Chemistry of Wet Chemical Etching of Silicon, May 17-19, Holten, The Netherlands, 1998.

Ion assisted deposition of Zn-Mg coatings by unbalanced magnetron sputtering

Shedden, B; Katardjiev, Ilia; Berg, Sören; Samandi, M et al.

Ingår i Proc of the 6th Int Conf on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany, 1998.

Laser beam induced current characterization of high efficiency CIS and CIGS solar cells

Medvedkin, G A; Wennerberg, Johan

Ingår i Intern. Conf. "POLYSE'98", Schwabish Gmund, Germany 13-18 September, Polycrystalline Semiconductors V - Bulk Materials, Thin Films and Devices in Series "Solid State Phenomena" vol.67-68, Scitech Publ., s. 69-74, 1998.

Low cost micromachined mirrors for display systems

Vangbo, Mattias; Karlsson, Staffan; Bäcklund, Ylva

Ingår i MME'98 (Micro Mechanics Europe), June 3-5 1998, Ulvang, Norway, 1998.

Micro propulsion thrusters for space applications

Stenmark, Lars; Bäcklund, Ylva; Köhler, Johan; Larsson, K et al.

Ingår i MSW´98, Micro Structure Workshop, March 25-26, Uppsala, Sweden, 1998.

Miniaturized x-ray source

Smith, Leif; Rangsten, Pelle; Ribbing, Carolina; Strandman, Carola

Ingår i Proc of the 3rd Micro Structure Workshop, Uppsala March 24-25 (1998) 27.1, 1998.

Modeling of Fringe Capacitances in the Oxide and the Depletion Region of a MOS Structure

Valtonen, Roger; Olsson, Jörgen; Söderbärg, Anders

Ingår i Proc of the 3rd Micro Structure Workshop, Uppsala March 24-25, 27.1, 1998.

Optoelectronic image of polycrystalline thin film solar cells based on CuInSe2 and CuInGaSe2 by the laser beam scan

Medvedkin, G A; Stolt, Lars; Wennerberg, Johan

Ingår i Intern. Conf. "Physics at the Turn of the 21st Century",St Petersburg, Russia, Sept. 28- Oct. 2, Summaries C20p, s. 98-, 1998.

Patterning of Reactively Sputteres Tantalum Pentoxide, a High Epsilon Material, by Plasma Etching

Jonsson, Lars; Engelmark, Fredrik; Du, Jing; Hedlund, Christer et al.

Ingår i The American Vacuum Society 45th National Symposium in Baltimore, 1998.

PECVD by hollow cathodes

Bardos, Ladislav; Barankova, Hana; Berg, Sören

Ingår i Proceedings of the 41st Annual Tech.Conf. of the Society of Vacuum Coaters (SVC), Boston 1998, ISSN 0737-5921, Paper P-1, Proc., s. 315-320, 1998.

Properties of the Drift Region in a LDMOS Transistor

Vestling, Lars; Olsson, Jörgen

Ingår i The 18th Nordic Semiconductor Meeting, Linköping, Sweden, June, s. G-96-, 1998.

Selective SiOs to Si3N4 etching in inductively coupled fluorocarbon plasmas

Schaepkens, M; Standaert, T E F M; Reuger, N R; Oehrlein, G S et al.

Ingår i The 25th national symposium UNY-VAC, Albany NY, 1998.

Silicon semi-circular tapered structures made by diffusion limited HF:HNO3 wet etching

Bakke, T; Köhler, Johan; Bäcklund, Ylva; Mukherjee, S

Ingår i Micromechanics Europe 1988, MME'98, Ulvik Norge, 1998.

Target Compound Layer Formation during Reactive Sputtering

Jonsson, Lars; Nyberg, Tomas; Berg, Sören

Ingår i Presented at AVS 45th National Symposium in Baltimore, Maryland, USA, November 2-6, 1998.

Wet etching of single crystal quartz

Bäcklund, Ylva; Vangbo, Mattias; Rangsten, Pelle; Hedlund, Christer

Ingår i Workshop of Physical Chemistry of Wet Chemical Etching of Silicon, May 17-19, Holten, The Netherlands, 1998.

A Novel High-Frequency High-Voltage LDMOS Transistor using an Extended Gate RESURF Technology

Vestling, Lars; Edholm, Bengt; Olsson, Jörgen; Tiensuu, Stefan et al.

Ingår i ISPSD´97, s. 45-48, 1997.

Analytical modelling of fibre holding elements in silicon

Strandman, Carola; Gupta, Ram; Bäcklund, Ylva

Ingår i MOEMS´97 Nov 18-21, Nara, Japan, 1997.

Angular dependence of the polysilicon etch rate during dry etching in SF6 and Cl2

Hedlund, Christer; Jonsson, Lars; Katardjiev, Ilia; Berg, Sören et al.

Ingår i The 43rd International Symposium of the American Vacuum Society, Philadelphia PA, USA, 1997.

BESOI materials with diamond or aluminium as buried insulator

Bengtsson, S; Bergh, M; Edholm, Bengt; Olsson, Jörgen

Ingår i DERA workshop on Novel Silicon-On-Insulator Materials and Applications, April 17-18, Malvern, UK, 1997.

Characterization and optimization of a dry etching process for silicon nitride spacer formation

Jonsson, Lars; Hedlund, Christer; Larsson, T; Katardjiev, Ilia et al.

Ingår i The 44th international symposium of the American Vacuum Society, San José, USA, 1997.

Chemical bath deposited CdS films with different impurity concentrations - Film characterization and Cu(In,Ga)Se2 solar cell results

Kylner, Angela; Niemi, Esko

Ingår i 14th European Photovoltaic Solar Energy Conf. 1326, 1997.

Cold Gas thrusters Micromachined in silicon - Design plan

Köhler, Johan; Bäcklund, Ylva; Stenmark, Lars; Backe, T et al.

Ingår i 2nd Round Table on Micro-Nano Technologies for space, ESTEC, Noordwijk NL, 1997.

Cold gas thrusters micromachined in silicon and design plan

Köhler, Johan; Bäcklund, Ylva; Stenmark, Lars; Bakke, T et al.

Ingår i ESTEC, Noordwijk, The Netherlands, Oct 15-17, 1997.

Collection functions in chalcopyrite heterojunction solar cells: A comparison of Cu(In,Ga)(Se,S)2 absorbers

Scheer, R; Wilhelm, M; Nadenau, V; Schock, H W et al.

Ingår i The 14th European Photovoltaic Conf. 1299, 1997.

Colloidal Silica as a Final Polishing Slurry

Forsberg, Markus; Edholm, Bengt; Olsson, Jörgen; Ericsson, P

Ingår i CMP´97. 4-5, s. 244-245, 1997.

DLTS spectra of thin film photovoltaic devices based on Cu(In,Ga)2

Igalson, M; Stolt, Lars

Ingår i The 14th European Photovoltaic Conf. 2153, 1997.

Electrical investigation of the silicon/diamond interface

Edholm, Bengt; Olsson, Jörgen; Keskitalo, Niklas; Vestling, Lars

1997.

Etching through Si-Si direct bonded interfaces

Köhler, Johan; Vallin, Örjan; Strandman, Carola; Hedlund, Christer et al.

Ingår i MME´97, 1997.

Etching through Si-Si direct bonded interfaces

Köhler, Johan; Wallin, Örjan; Strandman, Carola; Hedlund, Christer et al.

Ingår i MME' 97, 1997.

Improvement of the Long-Term Stability of Polysilicon IC-Resistors by Fluorine Doping

Rydberg, Matts; Smith, Ulf

Ingår i Materials Research Symposium. 472, s. 457-462, 1997.

Lattice Disorder Effects on the Vacancy-Oxygen Centre in Ion-Radiated Silicon

Keskitalo, Niklas; Anders, Hallén; Lalita, J; Svensson, B G

Ingår i Mat. Res. Soc. Symp. 469, s. 233-238, 1997.

Low-cost Single-mode Optical Passive Coupler Devices with an MT-interface Based on Polymeric Waveguides in BCB

Palmskog, G; Arvidsson, G; Eriksen, P; Gustafsson, G et al.

Ingår i Proc ECIO´97, The 8th European Conference on Integrated Optics and Technical Exhibition, Opt. Soc. America, Washington DC, USA, s. 291-294, 1997.

Micro machined propulsion components

Stenmark, Lars; Lang, M; Köhler, Johan; Simu, Urban

Ingår i 2nd Round Table on Micro-Nano Technologies for space, ESTEC, Noordwijk NL, 1997.

Modelling of the Gate Capacitance Behaviour of a High-Frequency Small-Signal LDMOS Transistor

Vestling, Lars; Olsson, Jörgen; Norde, Herman; Eklund, Klas-Håkan

Ingår i GigaHertz´97 in Kista, Sweden, s. 96-97, 1997.

Nitride titanium alloys for mechanical implants

Klintberg, Lena; Ribbing, Carolina; Ekwall, P; Johansson, E et al.

Ingår i 13th European Conf on Biomaterials, 1997.

Quartz-Quartz Bonding

Rangsten, Pelle; Vallin, Örjan; Hermansson, Karin; Bäcklund, Ylva

Ingår i ECS Annual meeting, 1997.

Rapid migration of defects in ion-implanted silicon

Lalita, J; Pellegrino, L; Hallén, A; Svensson, B G et al.

Ingår i Mat Res Soc Symp Proc Vol 469, s. 239-244, 1997.

Reactive deposition by the linear arc discharge (LAD) plasma source

Barankova, Hana; Bardos, L; Berg, Sören

s. 119- 1997.

Silicon surfaces for hydrophobic wafer bonding

Bergh, M; Tiensuu, Stefan; Keskitalo, Niklas; Forsberg, Markus

Ingår i Proc of the Fourth International Symosium on Semiconductor Wafer Bonding: Science, Technology and Applications, Electrochemical Society Proceedings Vol 97-36,, s. 87-94, 1997.

Silicon-On-Diamond MOS Transistors with Thermally Gate Oxide

Edholm, Bengt; Vestling, Lars; Bergh, M; Tiensuu, Stefan et al.

Ingår i SOI Conference. 30-31, s. 30-31, 1997.

Sodium in Sputtered Mo Back Contacts for Cu(In,Ga)Se2 Devices: Incorporation, Diffusion and Relationship to Oxygen

Granath, Karin; Stolt, Lars; Bodegård, Marika; Rockett, Angus et al.

Ingår i The 14th European Photovoltaic Solar Energy Conf. 1278, Barcelona Spain, 1997.

A lateral symmetrically bistable buckled beam

Vangbo, Mattias; Bäcklund, Ylva

Ingår i MME´96, Oct 21-22. Barcelona, Spain, 1996.

A New High Voltage DMOS Transistor for Microwave Applications

Olsson, Jörgen; Edholm, Bengt; Masszi, Ference; Keskitalo, Niklas et al.

Ingår i The 17th Nordic Semicondustor Meeting, Norway, June, 1996.

A new self aligned asymmetric lateral bipolar transistor

Jonsson, Lars; Olsson, Jörgen; Edholm, Bengt; Söderbärg, Anders et al.

Ingår i The 17th Nordic Semiconductor Meeting, Norway, June, 1996.

Acoustic sensors for respiratory air flow - from basic principles to clinical evaluation and industrialization

Hök, Bertil

Ingår i Proc IEEE - EMBS, Amsterdam Oct 31 - Nov 3, 1996, Abstract M5-1, 1996.

An experimental study and simulation of anisotropic wet etching of quartz

Rangsten, Pelle; Hedlund, Christer; Katardjiev, Ilia; Bäcklund, Ylva

Ingår i MME´96, Oct 21-22, Barcelona, Spain, 1996.

CIGS Thin Film Solar Cells by the Coevaporation Method

Stolt, Lars

Ingår i The 9th International Photovoltaic Science and Engineering Conference, Miyazaki, Japan, Nov 11-15, 1996.

Electrical Properties of the Silicon/Diamond Interface

Olsson, Jörgen; Edholm, Bengt; Tiensuu, Stefan; Söderbärg, Anders et al.

Ingår i Presented at the 17th Nordic Semiconductor Meeting, Norway, June, 1996.

Micromechanics in optical microsystems - with focus on telecom systems

Bäcklund, Ylva

Ingår i MME´96, Barcelona, Spain, Oct 21-22, 1996.

Na in CIGS thin films

Stolt, Lars; Bodegård, Marika

Ingår i The 10 Sunshine Workshop on Thin Film Solar Cells, Shinjuku, Tokyo, Japan, Nov 8-9, 1996.

Na incorporation and diffusion in CuIn1-xGaxSe2

Rockett, Angus; Bodegård, Marika; Granath, Karin; Stolt, Lars

Ingår i Proceedings of the 25th IEEE Photovoltaic Specialists Conference, Washington DC, USA, (IEEE, Piscataway), s. 985-, 1996.

Passive alignment and holding of devices using flexible tongues formed by selective etching

Strandman, Carola; Bäcklund, Ylva

Ingår i MME´96, Oct 21-22, Barcelona, Spain, 1996.

Small- and large-area CIGS modules by coevaporation

Niemi, Esko; Hedström, Jonas; Martinsson, Torbjörn; Granath, Karin et al.

Ingår i Proceedings of the 25th IEEE Photovoltaic Specialists Conference, Washington DC, USA, s. 801-, 1996.

A High-Voltage Giga-Hertz DMOS Transistor Integrated into a Standard CMOS Process

Söderbärg, Anders; Edholm, Bengt; Olsson, Jörgen; Masszi, Ference et al.

Ingår i GigaHertz´95, National symposium on -wave technology and high speed electronics, 1995.

A method for the determination of the angular dependence during dry etching

Hedlund, Christer; Strandman, Carola; Katardjiev, Ilia; Bäcklund, Ylva et al.

Ingår i The American Vacuum Society, 42nd National Symposium, Minneapolis, USA, Oct, 1995.

Compositional changes during ion-assisted deposition of TixW1-x barrier layers on structured surfaces

Berg, Sören; Jonsson, Lars; Katardjiev, Ilia

Ingår i The 42nd international symposium of the American Vacuum Society, San José, USA, 1995.

Fabrication of bulk silicon holding structures for mounting of optical fibres in V-grooves

Strandman, Carola; Bäcklund, Ylva

Ingår i The SPIE conf on Micromachining and Microfabrication ´95, Oct 23-24, Austin, USA, 1995.

Integration of a Novel High-Voltage Giga-Hertz DMOS Transistor into a Standard CMOS Process

Söderbärg, Anders; Edholm, Bengt; Olsson, Jörgen; Masszi, Ference et al.

Ingår i IEEE IEDM Technical Digest, s. 975-978, 1995.

Mechanical issues of Mo back contacts for Cu(In,Ga)Se2 devices

Granath, Karin; Rockett, Angus; Bodegård, Marika; Nender, Claes et al.

Ingår i Proc of the 13th European Photovoltaic Solar Energy Conf, Nice, H.S. Stephens & Associates, Bedford, s. 1983-, 1995.

Microwave surfatron system for diamond film depositions

Bardos, Ladislav; Barankova, Hana; Berg, Sören

Ingår i International Symposium on Plasma Chemistry – ISPC 12, Minneapolis, USA, August 21-25, Paper no PK 1, 1995.

Na precursors for coevaporated Cu(In,Ga)Se2 photovoltaic films

Bodegård, Marika; Hedström, Jonas; Granath, Karin; Rockett, Angus et al.

Ingår i Proceedings of the 25th European Photovoltaic Solar Energy Conference, Nice, France, (H.S. Stephens & Associates, Bedford), s. 2080-, 1995.

Terracing of (100)-Si with one mask and one etching step using misaligned V-grooves

Vangbo, Mattias; Strandman, Carola; Bäcklund, Ylva

Ingår i Proc of the 6th Micromechanics Europé Workshop MME´95, Copenhagen, Denmark, 3-5 Sept, 1995.

The wheatstone GADGET, a simple circuit for measuring differential resistance variations

de Bree, H-E; Leussink, P; Korthurst, T; Bäcklund, Ylva et al.

Ingår i Proc fo the 6th Micromachined Europé Workshop MME´95, Copenhagen, Denmark, Sept 3-5, 1995.

Thin film solar cell modules based on Cu(In,Ga)Se2 prepared by the coevaporation method

Stolt, Lars; Granath, Karin; Niemi, Esko; Bodegård, Marika et al.

Ingår i Proceedings of the 13th European Photovoltaic Solar Energy Conference, Nice, France, s. 1451-, 1995.

Anisotropically wet-etched structures in silicon used in various sensor designs at Uppsala University

Bäcklund, Ylva

1994.

Controlled topography production - true 3D simulation and experiment

Jonsson, LB; Hedlund, C; Katardjiev, Ilia V; Barklund, A et al.

1994.

Electroplated copper coils for wireless monitoring of sensors

Rangsten, P; Rosengren, L; Kok, H; Bäcklund, Ylva

1994.

High current gain lateral bipolar action in DMOS transistors

Edholm, B; Olsson, J; Söderbärg, Anders; Bohlin, K et al.

s. 221-224 1994.

High Current Gain Lateral Bipolar Action in DMOS Transistors

Edholm, Bengt; Olsson, Jörgen; Söderbärg, Anders; Bohlin, Kjell et al.

Ingår i Proceedings of ESSDERC, s. 221-224, 1994.

Modification of silicon surfaces with H2SO4:H2O2:HF and HNO3:HF for wafer bonding applications

Ljungberg, K; Jansson, U; Bengtsson, S; Söderbärg, Anders

1994.

MUCH - A MOS-like switch for smart power

Tiensuu, S; Söderbärg, Anders; Svedbärg, P

1994.

Permanent fixing of opticalfibres on silicon substrates using bonding techniques

Ljungberg, K; Bäcklund, Ylva

1994.

Process simulation of substrate dependent resputtering effects during the initial phases of ion assisted thin film deposition

Berg, Sören; Katardjiev, Ilia V; Bäcklund, Ylva

1994.

Simulation of the electrical and thermal behaviour of SOI/SOD devices

Olsson, Jörgen; Edholm, Bengt; Söderbärg, Anders

1994.

Steady state and transient thermal characterization of silicon on diamond materials

Edholm, B; Olsson, J; Söderbärg, Anders

1994.

Steady State and Transient Thermal Characterization of Silicon on Diamond Materials

Edholm, Bengt; Olsson, Jörgen; Söderbärg, Anders

Ingår i Presented at the 16th Nordic Semiconductor Meeting, 1994.

A micro machined enzyme reactor in <100>-oriented silicon

Laurell, Thomas; Rosengren, Lars

1993.

A system for passive implantable pressure sensors

Rosengren, L; Rangsten, P; Bäcklund, Ylva; Hök, Bertil et al.

1993.

Buried silicide layers in silicon, using wafer bonding with cobalt and interfacial layer

Ljungberg, K; Söderbärg, Anders; Thunström, G; Pettersson, S

1993.

Characterization of the rf plasma jet sputtering system by optical emission spectroscopy

Barankova, Hana; Bardos, L; Berg, Sören

s. 1272-1277 1993.

Dynamic breakdown phenomena in semiconductor power devices and experimental methods for their investigation

Nordlander, E; Bleichner, H; Rosling, M

s. 595- 1993.

Etching mechanism of silicon

Edholm, Bengt; Olsson, Jörgen; Söderbärg, Anders

Ingår i MEMS, 1993.

Formation of heat sinks using bonding and etch back technique in combination with diamond deposition

Söderbärg, Anders; Edholm, Bengt; Olsson, Jörgen; Tiensuu, Stefan et al.

Ingår i Proceedings of 2nd Int. Symp. on Semiconductor Wafer Bonding, s. 382-, 1993.

High Current Properties of Combined Schottky/pn Diodes; interaction between Closely Located Schottky and pn Diodes

Olsson, Jörgen; Norde, Herman; Edholm, Bengt

Ingår i Proceedings of ESSDERC, s. 227-230, 1993.

Inside coating of narrow tubes by radio frequency plasma jet sputtering

Bardos, L; Barankova, Hana; Berg, Sören

s. 987-992 1993.

Micromachined optical plane and reflectors in silicon

Rosengren, L; Bäcklund, Ylva

1993.

Micromachined optical planes and reflectors in silicon

Bäcklund, Ylva; Rosengren, L; Smith, Leif

1993.

On P-I-N diode parameters and static properties at elevated temperatures and high current densities - experiment vs simulation

Bleichner, H; Rosling, N; Jonsson, P; Masszi, Ferenc et al.

s. 895-898 1993.

On the reliability of apnea alarm devices

Hök, Bertil; Wiklund, L

s. 42- 1993.

Optical planes and reflectors, anistotropically etched in silicon

Bäcklund, Ylva; Rosengren, L; Smith, Leif

1993.

Preferential sputtering of silicon from metal silicides at elevated temperatures

Hedlund, C; Carlsson, P; Blom, Hans-Olof; Katardjiev, Ilia V et al.

1993.

Spontaneity of hydrophobic Si-Si bonding, and properties of the bonded interfaces

Ljungberg, K; Söderbärg, Anders; Bengtsson, S; Jauhiainen, A

1993.

The effects of HF-cleaning prior to silicon wafer bonding

Ljungberg, Karin; Bäcklund, Ylva; Söderbärg, Anders; Bergh, Mats et al.

1993.

The microloading effect in reactive ion etching

Hedlund, C; Blom, Hans-Olof; Berg, Sören

1993.

The physical model of the radio-frequency plasma-chemical reactor with the supersonic plasma jet

Sicha, M; Tichy, M; Bardos, L; Barankova, Hana et al.

1993.

The piezoelectric effect of GaAs used for resonant sensors and actuators

Hjort, Klas; Söderkvist, Jan

1993.

Very High Current Gain Enhancement by Substrate Biasing of Lateral Bipolar Transistors on Thin SOI

Edholm, Bengt; Olsson, Jörgen; Söderbärg, Anders

Ingår i Infos, 1993.

A new high rate sputter erosion principle applied to multipurpose thin film processing

Carlsson, P; Barklund, AM; Nender, C; Katardjiev, Ilia V et al.

1992.

Application of optically probed lifetime and diffusion-coefficient measurements on particle irradiated silicon under high-level injection conditions

Rosling, M; Bleichner, H; Nordlander, E

1992.

Dry etching of buried layers without removing the overlayers

Hedlund, C; Blom, Hans-Olof; Harper, JME; Berg, Sören

1992.

Optical methods for the investigation of power semiconductor devices

Nordlander, E

1992.

Quantum mechanical approach for the examination of the properties of MOS inversion layers in p-type silicon

Tarnay, K; Masszi, Ferenc; Kocsis, T; Poppe, A et al.

s. 187-190 1992.

RBS of germanium nitride films deposited by  supersonic rf plasma jet

Soukup, L; Perina, V; Vu, NQ; Jastrabik, L et al.

1992.

The hollow cathode rf-plasma jet applied to high rate deposition of diamond thin films

Nyberg, T; Bardos, L; Barankova, Hana; Berg, Sören

1992.

A fiberoptic silicon pressure microsensor for measurements in coronary arteries

Tenerz, L; Smith, Leif

1991.

A novel etch stop method aimed for fabrication of BESOI material and thin silicon membranes

Söderbärg, Anders; Smith, L

s. 211-220 1991.

A position-sensitive method for the determination of high-level carrier lifetimes in power devices

Rosling, M; Bleichner, H; Nordlander, E

s. 59-64 1991.

A silicon self-aligned non-reverse valve

Smith, Leif; Hök, Bertil

1991.

Activation and detection of mechanical vibrations in piezoelectric beams

Söderkvist, Jan

1991.

Activation of Sb in ultra-shallow poly-silicon emitters using rapid thermal processing

Grelsson, L; Söderbärg, Anders; Magnusson, U; Olsson, J et al.

s. 317-322 1991.

Analysis of new capacitive sensor structures with linear response

Rosengren, Lars; Söderkvist, Jan; Smith, Leif

1991.

Fabrication and characterization of a silicon microvalve

Emmer, Å; Jansson, M; Roeraade, J; Lindberg, U et al.

1991.

Investigation of wafer bonding with BPSG surfaces

Tirén, J; Bohlin, KE; Alestig, G

1991.

Modeling of reactive sputtering

Berg, Sören; Nender, C; Blom, Hans-Olof; Larsson, T

s. 9-18 1991.

Probe diagnostics of the plasma channel in the jet plasma-chemical reactor under assumption of the Druyvestenyian electron energy distribution

Sicha, M; Tichy, M; Rohmann, J; Bardos, L et al.

s. 839-840 1991.

Silicon etch stop formed by nitrogen implantation

Söderbärg, Anders

s. 190-199 1991.

Systems for the study of local electrical behaviour in semiconductor power devices

Nordlander, E; Bleichner, H; Rosling, M; Lundqvist, M

1991.

The effect of DC potentials in the plasma jet etching

Bardos, L; Blom, Hans-Olof

1991.

Wetting properties of silicon surfaces

Hermansson, Karin; Lindberg, Ulf; Hök, Bertil; Palmskog, Göran

1991.

A comparative study of the carrier distributions in dynamically operating GTO:s by means of two optically probed measurements methods

Bleichner, H; Rosling, M; Vobecky, J; Lundquist, M et al.

1990.

A novel method of achieving linear response in capacitive pressure sensors

Rosengren, L; Söderkvist, J

s. 235-240 1990.

A passive telemetric sensor for continuous intraocular pressure recording

Rosengren, Lars; Bäcklund, Ylva; Hök, Bertil; Svedbergh, Björn

1990.

An analysis of a capacitive pressure sensor with improved linearity

Rosengren, Lars; Söderkvist, Jan

1990.

Basic studies of the RIBE process applied to the MOS gate spacer technology

Barklund, AM; Blom, Hans-Olof; Berg, Sören; Norström, H et al.

1990.

Bilateral recombination-radiation diagnostics of the excess-carrier redistribution in a transiently operating GTO

Lundqvist, M; Bleichner, H; Vobecky, J; Nordlander, E

1990.

Complementary JFET-concept using ultra-shallow diffused gate junctions

Grelsson, Ö; Söderbärg, A; Magnusson, U; Norde, Herman

1990.

Complementary silicon JFETs using novel ultra-shallow gate junctions

Grelsson, Ö; Söderbärg, Anders; Magnusson, U

s. 101- 1990.

Complementary silicon JFETs using novel ultra-shallow gate junctions

Grelsson, Ö; Söderbärg, A; Magnusson, U

1990.

Complex contact models in multidimensional semiconductor device simulation

Masszi, Ferenc; Tarnay, K

1990.

Device simulation to support IR-measurement methods for power device characterization

Schweigert, M; Masszi, Ferenc

1990.

Electrical characterization of an ultra-shallow diffused n+p-junction in silicon

Söderbärg, A; Grelsson, Ö; Magnusson, U

1990.

Investigation of an antimony doped poly-silicon gate structure for p-type JFET applications

Söderbärg, A; Grelsson, Ö; Magnusson, U

1990.

Investigation of silicon etchrate in cesium-hydroxide with respect to the boron concentration

Lindberg, U; Söderbärg, A

1990.

Investigation of the current-voltage behaviour in a combined Schottky-pn diode

Magnusson, U; Norde, Herman

1990.

Multi-cathode influences on the internal excess-carrier distribution during the GTO turn-off process

Rosling, M; Vobecky, J; Bleichner, H; Nordlander, E

1990.

Piezoelectric beams and vibrating angular rate sensors

Söderkvist, Jan

1990.

Plasma jet dry etching of silicon based compounds

Barklund, AM; Blom, Hans-Olof; Berg, Sören

1990.

Silicon-silicon direct bonding, a comparative study on bond strengths

Bäcklund, Ylva; Söderbärg, Anders; Tirén, Jonas; Tenerz, Lasse

1990.

Simulations of multicomponent sputtering

Nender, C; Gelin, B; Tvarozek, V; Berg, Sören et al.

1990.

Trends in semiconductor micromechanics

Hök, Bertil

1990.

An On-Wafer De-Embedding Technique for Silicon Transistors at Microwave Frequencies

Bengtsson, Lars; Garcia, Mikael; Vestling, Lars; Olsson, Jörgen

Ingår i IEEE ICMTS, Gothenburg, Sweden, 1999.

Design of a Chip Based Microanalytical Fluidic System Based on Electrochemical Detection using Redox Cycling

Richard, Åse; Klett, Oliver; Strandman, Carola; Bäcklund, Ylva et al.

Ingår i Proc Int Eng Congress and Exposition, Nashville, Tenessee, Nov 14-19, 1999, 1999.

Micro sculpturing - Somewhat new materials and micromachining methods to meet new applications

Bäcklund, Ylva; Hjort, Klas; Johansson, Stefan; Stenmark, Lars

Ingår i Eurosensors -99, 1999.

Microfluid Components in Diamond

Rangsten, Pelle; Björkman, Henrik; Hjort, Klas

Ingår i Proc of the 10th Int Conf on Solid-state Sensors and Actuators. Transducers´99, June 7-10, Sendai, Japan, s. 190-193, 1999.

Silicon on Diamond Heat Sinks by Bonding and Etch Back

Söderbärg, Anders; Edholm, Bengt; Olsson, Jörgen; Tiensuu, Stefan et al.

Ingår i Proceedings of IEEE International SOI Conference, s. 58-59, 1993.

DOI för Silicon on Diamond Heat Sinks by Bonding and Etch Back

A Lateral Bipolar Transistor Concept Tested on SIMOX- and BSOI-Materials

Edholm, Bengt; Olsson, Jörgen; Söferbärg, Anders

Ingår i Proceednings IEEE International SOI Conference, s. 76-77, 1992.

DOI för A Lateral Bipolar Transistor Concept Tested on SIMOX- and BSOI-Materials

Study of semiconductor devices

Nordlander, E; Bleichner, H; Rosling, M

1990.