Vetenskapliga artiklar vid Fasta Tillståndets Elektronik 2000-2004
Hitta här de vetenskapliga artiklarna från Avdelningen för Fasta Tillståndets Elektronik i perioden mellan 2000 och 2004 enligt DIVA katalog:
Publikationer
Artiklar i tidskrift (granskade)
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A Shallow and Deep Trench Isolation Process Module for RF BiCMOS
Ingår i J Electrochem Soc, s. G839-G846, 2004.
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Charge-discharge kinetics of electric-paint displays
Ingår i Journal of Electroanalytical Chemistry, s. 175-184, 2004.
DOI för Charge-discharge kinetics of electric-paint displays
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Comparison of dynamic simulations with RBS measurements of low energy ion implatation of Sb+ into SiO2/Si substrates
Ingår i Microchimica Acta, s. 67-74, 2004.
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Dependence of the electromechanical coupling on the degree of orientation of c-textured thin AlN films
Ingår i IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, s. 1347-1353, 2004.
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Deposition of Ti2AIC and Ti3AIC2 epitaxial films by magnetron sputtering
Ingår i Applied Physics Letters, s. 1066-1067, 2004.
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Electrothermal Simulations of High-Power SOI Vertical DMOS Transistors with Lateral Drain Contacts under Unclamped Inductive Switching Test
Ingår i Solid-State Electronics, s. 1119-1126, 2004.
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High-Power SOI Vertical DMOS Transistors with Lateral Drain Contacts: Process Development, Characterization and Modeling
Ingår i IEEE Transactions on Electron Devices, s. 790-796, 2004.
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null
Ingår i Surface and Coatings Technology, s. 703-707, 2004.
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High-rate hot hollow cathode arc deposition of chromium and chromium nitride films
Ingår i Surf Coat Technol, s. 703-707, 2004.
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null
Ingår i Proceedings to Society of Vacuum Coaters, 2004.
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null
Ingår i Proceedings to Society of Vacuum Coaters, 2004.
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New hybrid source of cold atmospheric plasma
Ingår i Surface and Coatings Technology, s. 688-692, 2004.
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null
Ingår i Surface and Coatings Technology, s. 651-656, 2004.
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New microwave and hollow cathode hybrid plasma sources
Ingår i Surface and Coatings Technology, s. 651-656, 2004.
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Precise magnetoresistance and Hall resistivity measurements in the diamond anvil cell
Ingår i Review of Scientific Instruments, s. 5010-5015, 2004.
DOI för Precise magnetoresistance and Hall resistivity measurements in the diamond anvil cell
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The influence of buffer layer on the transient behaviour of thin film chalcopyrite devices
Ingår i Solar Energy Materials and Solar Cells, s. 93-103, 2004.
DOI för The influence of buffer layer on the transient behaviour of thin film chalcopyrite devices
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null
Ingår i Proceedings of the 19th European Photovoltaic Solar Energy Conference, Paris, s. 1890-1893, 2004.
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Variable work function in MOS capacitors utilizing nitrogen-controlled TiNx gate electrodes
Ingår i Microelectronic Engineering, s. 389-396, 2004.
DOI för Variable work function in MOS capacitors utilizing nitrogen-controlled TiNx gate electrodes
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A miniature X-ray fluorescence set-up
Ingår i Review of Scientific Instruments, s. 3423-3428, 2003.
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A Novel Strained Si0.7Ge0.3 Surface-Channel pMOSFET with an ALD TiN/Al2O3/HfAlOx/Al2O3 Gate Stack
Ingår i IEEE Electron Device Letters, s. 171-173, 2003.
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A study of the influence of the Ga content on the long-term stability of Cu(In,Ga)Se2 thin film solar cells
Ingår i Thin Solid Films, s. 436-442, 2003.
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Analysis of the Specific On-Resistance of Vertical High-Voltage DMOSFETs on SOI
Ingår i IEEE Transactions on Electron Devices, s. 1416-1419, 2003.
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Cu(In,Ga)Se2 thin films grown with a Cu-poor/rich/poor sequence: Growth model and structural considerations
Ingår i Progress in Photovoltaics: Research and Applications, s. 319-331, 2003.
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Cu(In,Ga)Se2-based thin-film photovoltaic modules optimized for long-term performance
Ingår i Solar Energy Materials & Solar Cells, s. 47-55, 2003.
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Design of concentrating elements with CIS thinfilm solar cells for façade integration. Solar Energy Materials & Solar Cells
Ingår i Solar Energy Materials & Solar Cells, s. 567-575, 2003.
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Diffusion of indium and gallium in Cu(In,Ga)Se2 thin film solar cells
Ingår i Journal of physics and chemistry of solids, s. 1499-1504, 2003.
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Dye-sensitized sputtered titanium oxide films for photovoltaic applications: influence of the O2/Ar gas flow ratio during the deposition
Ingår i Solar Energy Materials and Solar Cells, s. 37-56, 2003.
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Electrical Characterization of AlN MIS and MIM Structures
Ingår i IEEE Trans Electron Devices, s. 1214-1219, 2003.
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Experimental and computer simulation studies of the
Ingår i J Vac Sci Technol, s. 1981-1987, 2003.
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Growth of Cu(In,Ga)Se2 films using a Cu-poor/rich/poor sequence: substrate temperature effects
Ingår i Thin Solid Films, s. 1-5, 2003.
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Highly efficient Cu(In,Ga)Se2 mini-modules
Ingår i Solar energy Materials & Solar Cells, s. 35-46, 2003.
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Hollow cathode atmospheric pressure plasma sources for surface treatment
Ingår i Surface and Coatings Technology, s. 63-67, 2003.
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Hollow cathode cold atmospheric plasma sources with monoatomic and molecular gases
Ingår i Surf Coat Technol, s. 649-653, 2003.
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Influence of the Cu(In,Ga)Se2 Thickness and Ga Grading on Solar Cell Performance
Ingår i Progress in Photovoltaics: Science and Applications, s. 77-88, 2003.
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Innovative Process Development for a New Micro-Tribosensor Using Surface Micromachining
Ingår i J Micromech Microeng, s. S17-22, 2003.
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InP and Si Metal-Oxide Semiconductor Structures Fabricated Using Oxygen Plasma Assisted Wafer Bonding
Ingår i Journal of Electronic Materials, s. 111-116, 2003.
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Interface study of CuInSe2/ZnO and Cu(In,Ga)Se2/ZnO devices using ALD ZnO buffer layers
Ingår i Thin Solid FIlms, s. 321-325, 2003.
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Investigation of the electrical behavior of an asymmetric MOSFET
Ingår i Microelectronic Engineering, s. 428-438, 2003.
DOI för Investigation of the electrical behavior of an asymmetric MOSFET
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Microfabrication of saw-tooth refractive x-ray lenses in low-Z materials
Ingår i J Micromech Microeng, s. 714-720, 2003.
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Microstructured diamond X-ray source and refractive lens
Ingår i Diamond and Related Materials, s. 1793-1799, 2003.
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Model relating process variables to film electrical properties for reactively sputtered tantalum oxide thin films
Ingår i J Appl Phys, s. 3596-3604, 2003.
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Non-thermodynamic approach to including bombardment-induced post-cascade redistribution of point defects in dynamic Monte Carlo code
Ingår i Nuclear Instruments and Methods in Physics Research, s. 24-30, 2003.
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On the thermal stability of atomic layer deposited TiN as gate electrode in MOS devices
Ingår i IEEE Electron Device Letters, s. 550-552, 2003.
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On-column polymer-imbedded graphite inlet electrode for capillary electrophoresis coupled on-line with flow injection analysis in a poly(dimethylsiloxane) interface
Ingår i Electrophoresis, s. 1723-1729, 2003.
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Performance of Radio Frequency Hollow Cathodes at Low Gas Pressures
Ingår i Surf Coat Technol, s. 654-658, 2003.
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Rapid growth of thin Cu(In,Ga)Se2 layers for solar cells
Ingår i Thin Solid Films, s. 26-30, 2003.
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Recombination centers in the Cu(In,Ga)Se2-based photovoltaic devices
Ingår i J Phys Chem Solids, s. 2041-2045, 2003.
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Re-crystallisation and interdiffusion in CGS/CIS bilayers
Ingår i Thin Solid Films, s. 46-52, 2003.
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Reversible changes of the fill factor in the ZnO/CdS/Cu(In,Ga)Se2 solar cells
Ingår i Solar Energy Materials and Solar Cells, s. 195-207, 2003.
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SAW COM-Parameter Extraction in AlN/Diamond Layered Structures
Ingår i IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, s. 1542-1547, 2003.
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Small Signal and Power Evaluation of Novel BiCMOS -Compatible Short-Channel LDMOS Technology
Ingår i IEEE transactions on microwave theory and techniques, s. 1052-1056, 2003.
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Surface acoustic wave propagation characteristics of aluminum nitride thin films grown on polycrystalline diamond
Ingår i J Appl Phys, s. 9604-9609, 2003.
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The ”defected layer” and the mechanism of the interface-related metastable behavior in the ZnO/CdS/Cu(In,Ga)Se2 devices
Ingår i Thin Solid Films, s. 153-157, 2003.
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The Influence of the Deposition Parameters on the Stress of Magnetron Sputter Deposited AlN Thin Films on Si (100) Substrates
Ingår i Journal of Materials Research, s. 423-, 2003.
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1 W/mm RF Power Denisty at 3.2 GHz for a Dual-Layer RESURF LDMOS Transistor
Ingår i IEEE Electron Device Letters, s. 206-208, 2002.
DOI för 1 W/mm RF Power Denisty at 3.2 GHz for a Dual-Layer RESURF LDMOS Transistor
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1 W/mm RF Power Density at 3.2 GHz for a Dual-layer RESURF LDMOS Transistor
Ingår i IEEE Electron Device Letters, s. 206-208, 2002.
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A Base-Collector Architecture for SiGe HBTs using Low-Temperature CVD Epitaxy Combined with Chemical-Mechanical Polishing
Ingår i Physica Scripta, s. 64-66, 2002.
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A General Small-Signal Series Impedance Extraction Technique
Ingår i IEEE Microwave and Wireless Components Letters, s. 249-251, 2002.
DOI för A General Small-Signal Series Impedance Extraction Technique
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A hybrid cold gas microthruster system for spacecraft
Ingår i Sensors and Actuators A-Physical, s. 587-598, 2002.
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Analysis and Design of a Low-Voltage High-Frequency LDMOS Transistor
Ingår i IEEE Transactions on Electron Devices, s. 976-980, 2002.
DOI för Analysis and Design of a Low-Voltage High-Frequency LDMOS Transistor
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Chemical mechanical polishing for surface smoothing
Ingår i Physica Scripta, s. 200-202, 2002.
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Containerless fabrication of tungsten single crystals using laser CVD for field emission applications
Ingår i Appl. Phys., s. 493-496, 2002.
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Deposition of HfO2 thin films in HfI4-based processes
Ingår i Journal of the Electrochemical Society, s. F139-F144, 2002.
DOI för Deposition of HfO2 thin films in HfI4-based processes
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Diamond Membrane Based Structures for Miniature X-ray Sources
Ingår i Diamond Rel Mater, s. 1-7, 2002.
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Drift Region Optimization of Lateral RESURF Devices
Ingår i Solid-State Electronics, s. 1177-1184, 2002.
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Effect of dopants on chemical mechanical polishing of silicon
Ingår i Microelectronic Engineering, s. 149-155, 2002.
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Fused hollow cathode cold atmospheric plasma cource for gas treatment
Ingår i Catalysis Today, s. 237-241, 2002.
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Highly oriented coatings at low substrate temperatures
Ingår i Vacuum & Coating Technology November, 2002.
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Hollow Cathode Plasma Cleaning and Surface Activation
Ingår i Vacuum & Coating Technology November, 2002.
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Iodide-Based Atomic Layer Deposition of ZrO2: Aspects of Phase Stability and Dielectric Properties
Ingår i Chemical Vapor Deposition, s. 105-109, 2002.
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Miniature X-ray Source - Development of a Prototype
Ingår i Biomedical Microdevices, s. 285-292, 2002.
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Multi-prism x-ray lens
Ingår i Appl Phys Lett, s. 1399-1401, 2002.
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Na0.5K0.5NbO3 Thin Films for Voltage Controlled Acoustoelectric Device Applications
Ingår i Appl Phys Lett, s. 3171-3173, 2002.
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Reactive Sputter Deposition of Highly Oriented AlN Films at Room Temperature
Ingår i J Mat Res, s. 1469-1475, 2002.
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Selective Etching of Al/AlN Structures for Metallization of SAW Devices
Ingår i J Vac Sci Technol, s. 843-, 2002.
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Self Heating Effects of High Power SOI Vertical DMOS Transistors with Lateral Drain Contacts
Ingår i Physica Scripta, s. 38-41, 2002.
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Simulation and dielectric characterization of reactive dc magnetron co-sputtered (Ta2O5)1-x(TiO2)x thin films
Ingår i Journal of vacuum science and technology B, s. 855-861, 2002.
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Sub-Circuit Based SPICE Model for High Voltage LDMOS Transistors
Ingår i Physica Scripta, s. 7-9, 2002.
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Unclamped Inductive Switching Behaviour of High-Power SOI Vertical DMOS Transistor with Lateral Drain Contacts
Ingår i Solid-State Electronics, s. 2105-2110, 2002.
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Weibull fracture probability for characterisation of the anodic bond process
Ingår i Sensors and Actuators, s. 304-311, 2002.
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XPS instrument coupled with ALCVD reactor for investigation of film growth
Ingår i J Vac Sci Technol, s. 278-284, 2002.
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Back surface bandgap gradings in Cu(In,Ga)Se2 solar cells
Ingår i Thin Solid Films, s. 11-13, 2001.
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Baseline Cu(In,Ga)Se2 Device Production: Control and Statistical Significance
Ingår i Solar Energy Materials & Solar Cells, s. 67-76, 2001.
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Channel length extraction for DMOS transistors using capacitance-voltage measurements
Ingår i IEEE Trans on Electron Devices, s. 1454-1459, 2001.
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Chip mounting and interconnection in multi-chip modules for space applications
Ingår i Journal of Micromechanics and Microengineering, s. 339-, 2001.
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Comparison of the radio frequency hollow cathode to the microwave antenna discharge for plasma processing
Ingår i J Appl Phys, s. 1703-1709, 2001.
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Design of grided Cu(In,Ga)Se2 thin-film PV modules
Ingår i Solar Energy Materials & Solar Cells, s. 59-65, 2001.
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null
Ingår i Proceedings of the 2001 IEEE International Frequency Control Symposium and PDA Exhibition Seattle, WA, USA, 2001.
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Dot patterns from second-harmonic and sum-frequency in polycrystalline ZnSe
Ingår i J Appl Phys, s. 2612-2614, 2001.
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Effect of Sulfurization on the Microstructure of Chalcopyrite Thin Film Absorbers
Ingår i Thin Solid Films, s. 80-82, 2001.
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Electrical characterization of ZnO/CdS/Cu(In,Ga)Se2 devices with controlled sodium content
Ingår i Thin Solid Films, s. 225-227, 2001.
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Hollow cathode plasma sources for large area surface treatment
Ingår i Surf Coat Technol, s. 486-490, 2001.
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Hollow cathode PVD of nitride and oxide films at low substrate temperature
Ingår i Surf Coat Technol, s. 463-468, 2001.
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Integration of high voltage devices on thick SOI substrates for automotive applications
Ingår i Solid-State Electronics, s. 629-632, 2001.
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Membrane Covered Electrically Isolated Through-Wafer Via Hole
Ingår i J Micromech Microeng, s. 344-347, 2001.
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Oxygen Plasma Wafer Bonding Evaluated by the Weibull Fracture Probability Method
Ingår i Journal of Micromechanics and Microengineering, s. 364-370, 2001.
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Processing in Afterglows and Decaying Plasmas
Ingår i Vacuum & Coating Technology, s. 46-56, 2001.
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Self-heating effects in SOI bipolar transistors
Ingår i Microelectronic Engineering, s. 339-352, 2001.
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null
Ingår i Journal of Micromechanics and Microengineering, s. 359-, 2001.
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Silicon fusion bond interfaces resilient to wet anisotropic etchants
Ingår i Journal of Micromechanics and Microengineering, s. 359-363, 2001.
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Structural and electroacoustic studies of AIN thin films during low temperature radio frequency sputter deposition
Ingår i J Vac Sci Technol, s. 2664-2669, 2001.
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Thin film PV modules for low-concentrating systems
Ingår i Solar Energy, s. 243-255, 2001.
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An Auto-Calibrating Adaptive Array for Mobile Telecommunications
Ingår i IEEE Transactions on Aerospace and Electronic Systems, s. 729-736, 2000.
DOI för An Auto-Calibrating Adaptive Array for Mobile Telecommunications
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Booster reflectors for PV modules in Sweden
Ingår i Prog Photovoltaic: Res Appl, s. 279-291, 2000.
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Dynamic simulations of pulsed reactive sputtering processes
Ingår i J Vac Sci Technol, s. 503-508, 2000.
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Effect of post nitride-passivation processing on the long-term stability of polysilicon IC resistors
Ingår i J. Vac. Sci. Technol. B, s. 690-694, 2000.
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Electrochemical detection based on redox cycling using interdigitated microarray electrodes at mu L/min flow rates
Ingår i ELECTROANALYSIS, s. 255-261, 2000.
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Field-emitting structures intended for a miniature X-ray source
Ingår i Sensors & Actuators, s. 24-29, 2000.
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Frequency response in pulsed DC reactive sputtering processes
Ingår i Thin Solid Films, s. 43-48, 2000.
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Fused hollow cathode cold atmospheric plasma
Ingår i Appl Phys Letters, s. 285-287, 2000.
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Growth of Cu(In,Ga)Se2 thin films by coevaporation using alkaline precursors
Ingår i Thin Solid Films, s. 9-16, 2000.
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null
Ingår i Journal of Micromechanics and Microengineering, s. 196-199, 2000.
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High-temperature piezoresistive gauge fabricated on commercially available silicon-on-insulator wafers
Ingår i J Micromech Microeng, s. 196-199, 2000.
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Influence on the Long-Term Stability of Polysilicon Resistors from Traces of Titanium and Tungsten
Ingår i J Electrochem Soc, s. 3487-3493, 2000.
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Long-term Stability and Electrical Properties of Compensation Doped Poly-Si IC-Resistors
Ingår i IEEE Transaction on Electron Devices, s. 417-426, 2000.
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Oxidation and induced damages in oxygen plasma in situ wafer bonding
Ingår i J Electrochem Soc, s. 2699-2703, 2000.
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Patterning of tantalum pentoxide, a high epsilon material, by inductively coupled plasma etching
Ingår i J Vac Sci Technol, s. 1906-1910, 2000.
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Radio frequency hollow cathode source for large area cold atmospheric plasma applications
Ingår i Surface and Coatings Technology, s. 522-527, 2000.
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Surface energy as a function of self-bias voltage in oxygen plasma wafer bonding
Ingår i Sensors & Actuators, s. 239-244, 2000.
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Synthesis of highly oriented piezoelectric AlN films by reactive sputter deposition
Ingår i J. Vac. Sci. Technol. A, s. 1609-1612, 2000.
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The effect of NaF on Cu(In, Ga)Se-2 thin film solar cells
Ingår i SOLAR ENERGY MATERIALS AND SOLAR CELLS, s. 279-293, 2000.
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Weibull fracture probability for silicon wafer bond evaluation
Ingår i JOURNAL OF THE ELECTROCHEMICAL SOCIETY, s. 4683-4687, 2000.
Publikationer
Konferensbidrag (granskade)
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A Simplified Treatment of Target Implantation Effects in Reactive Sputtering
Ingår i The International Conference on Metallurgical Coatings and Thin Films in San Diego, USA, 2004.
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Advances in Heuristic and Monte-Carlo Simulation of Reactive Sputtering and Technical Application
Ingår i Invited to the Symposium on Reactive Sputter Processes and Related Phenomena III, Ghent, Belgium, December 9-10, 2004.
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AlN Coating and Oxidation on Silicon Field Emitters to Enhance Reliability for Space Applications
Ingår i The 17th International Vacuum Nanotechnology Conference, 2004, Cambridge, California, USA, 2004.
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An accurate direct extraction technique for the MBVD resonator model
Ingår i Proceedings of 34th European Microwave Conference, s. 1241-1244, 2004.
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Characterization of the Cold Atmospheric Plasma Hybrid Source
Ingår i American Vacuum Society 51st Int Meeting, Anaheim, November, s. Paper PS-ThM4, 2004.
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Hot Hollow Cathode Arc Deposition of Highly Oriented Chromium and Chromium Nitride Films
Ingår i Proc of the 47th Annual Tech Conf of the Society of Vacuum Coaters (SVC), Dallas, USA, April 2004, s. Paper E-3, p. 91, 2004.
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Hot Hollow Cathode Diffuse Arc Deposition of Chromium Nitride Films
Ingår i American Vacuum Society 51st Int Meeting, Anaheim,USA, November, 2004.
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Modelling of Sputter Erosion Rate Enhancement from Ceramic Targets
Ingår i Proceedings of Society of Vacuum Coaters, s. 324.328-, 2004.
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Thermodynamic Simulation of the Endpoint Characteristics in a CIGS Deposition Process
Ingår i Nineteenth European Photovoltaic Solar Energy Conference, s. 1932-1935, 2004.
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TRIDYN simulation of target poisoning in reactive sputtering
Ingår i COSIRES, Finland, 2004.
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ALD metal-gate/high-k gate stack for Si and Si0.7Ge0.3 surface-channel pMOSFETs
Ingår i Proceedings of 33th ESSDERC2003, s. 263-266, 2003.
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Analysis and improvments of high frequency substrate losses for RF MOSFETs
Ingår i Proceedings of IEEE SISPAD, s. 319-322, 2003.
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Analysis of Zn(O,S) films for Cu(In,Ga)Se2 solar cells
Ingår i Proceedings of the Estonian Academy of Sciences Physics Matematics 52(3) pp 299-307 (2003), 2003.
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Atomic Layer Deposition of Zn(O,S) buffer layers for high efficiency Cu(In,Ga)Se2 solar cells
Ingår i Proceedings of the 3rd World Conference on Photovoltaic Solar Energy Conversion, WCPEC-3, 1, Osaka, Japan, s. 461-464, 2003.
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Basic Understanding of Reactive Sputtering Processes
Ingår i Invited to the AVS 50th National Symposium in Baltimore, Maryland, USA, November 2-7, 2003, 2003.
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Basic Understanding of the Pulsed DC Reactive Spitter Deposition Process
Ingår i The 4th Asian-European Int Conf on Plasma Surface Engineering, AEPSE 2003, Jeju City, South Korea, September 28-October 2, 2003, 2003.
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Cold Atmospheric Plasma Sources for Surface Treatment
Ingår i The 46th Annual Tech Conf of the Society of acuum Coaters (SVC), San Francisco, May 2003, Invited talk P-1, s. 427-430, 2003.
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Control of reactive sputtering process using two reactive gases
Ingår i Proc. of the AVS 4th International Conference on Microelectronics & Interfaces, Santa Clara, USA, s. 98-103, 2003.
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Dependence of the Electromechanical Coupling on the Degree of Orientation of c-Textured Thin AlN Films
Ingår i IEEE Ultrasonics Symposium, Honolulu, Hawaii, USA, 2003, 2003.
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Development of a micronized Electrical Field-Flow Fractionation instrument with an improved electrode system
Ingår i The 225th ACS National Meeting, Elopto 2003, March 24-27, New Orleans, USA, 2003.
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Effects of low-temperature water vapor annealing of strained SiGe surface-channel pMOSFETs with high-κ dielectric
Ingår i Proceedings of ESSDERC, s. 525-528, 2003.
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Flatband Voltage Adjustment USing Reactively Sputtered TiN Metal Gates
Ingår i Proc. of the AVS 4th International Conference on Microelectronics & Interfaces, Santa Clara, USA, s. 215-217, 2003.
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New hybrid source of cold atmospheric plasma
Ingår i ICMCTF´03, San Diego, April, 2003.
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New hybrid source with microwave and hollow cathode plasma
Ingår i 46th Annual Tech Conf of the Society of Vacuum Coaters (SVC), San Francisco, May, Paper E-8, Proc., s. 104-107, 2003.
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New microwave and hollow cathode hybrid plasma sources
Ingår i Int Conf Metal Coat Thin Films, ICMCTF´03, San Diego, April, s. Paper G1/TS1-1, 2003.
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New Plasma Sources for PE CVD
Ingår i Invited paper, 1st Int Symposium on Design and Technology of Coatings, Bonassola, Italy September 24-26, Proc ed by E Olzi and R Molena, ISBN 88-8080-046-9, 2003.
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Optimized growth conditions for Cu(In,Ga)Se2 layers by co-evaporation at high deposition rates
Ingår i Material Research Conference, Spring 2003, San Francisco, USA, 2003.
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Potential for light trapping in Cu(In,Ga)Se2 solar cells
Ingår i Proceedings 3rd World Conference on Photovoltaic Energy Conversion (WCPEC-3 Organizing Committee, Osaka, 2003) Vol I, s. 344-347, 2003.
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PVD of hard films inside narrow holes and pipes
Ingår i The 46th Annual Tech Conf of the Society of Vacuum Coaters (SVC), San Francisco, May, Paper H-5, Proc., s. 154-154, 2003.
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Pyrotechnical microthrusters for space application
Ingår i PowerMEMS 2003, Makuhari, Japan 2003, s. 57-60, 2003.
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Quality assurance in complex microsystem development
Ingår i 4th Round Table on Micro/Nano Technology for Space, ESTEC, Noordwijk, The Netherlands 2003, s. 276-286, 2003.
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Scaling of high-k dielectrics towards sub-Inm EOT
Ingår i Proceedings of International Symposium on VLSI Technology, Systems, and Applications, s. 247-250, 2003.
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Simulation and modeling of the substrate influence on the high frequency performance for RF LDMOS
Ingår i GHz2003 Symposium, Nov. 4-5, 2003.
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Stable Reactive Sputtering Processes
Ingår i ISSP 2003, The 7th International Symposium on Sputtering & Plasma Processes, June 11-13, Kanazawa, Japan, s. 235-239, 2003.
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Stable reactive sputtering using 2 reactive gases
Ingår i ICMCTF 2003, The International Conference on Metallurgical Coatings and Thin Films April 28 - May 2, San Diego, USA, 2003.
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Substrate Resistance Modeling for Noise Coupling Analysis
Ingår i Proceedings of the IEEE International Conference on Microelectronic Teststructures, s. 124-129, 2003.
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Suppression of Spurious Lateral Modes in Thickness Excited FBAR Resonators
Ingår i IEEE Ultrasonics Symposium, Honolulu, Hawaii, USA, 2003, 2003.
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Synthesis of C-AxisOriented AlN Thin Films on Metal Layers: Al, Mo, Ti, TiN and Ni
Ingår i International Conference on Ultrasonics, Ferroelectrics and Frequency Control, Proceedings 1, s. 311-315, 2003.
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A Study of the Influence of the Ga Content on the Long-Term Stability of Cu(In,Ga)Se2 Thin Film Solar Cells
Ingår i Proc. E-MRS, June, Strasbourg, France, 2002.
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Cold atmospheric plasma sources
Ingår i INVITED PAPER, ANZIO 2002, 5th Symp.Europ.Vac.Coaters, September 30, Rome-Anzio, Italy, abstract only, 2002.
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Cold atmospheric plasma sources based on hollow cathodes
Ingår i INVITED presentation at 1st Topical Meeting on Pulsed and Atmospheric Pressure Plasma Processing, FMT - Forschungszentrum für Mikrostrukturtechnik, Univestity of Wuppertal, Wuppertal, March 2002, 2002.
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Comparison Between Si-LDMOS and GaN-Based Microwave Power Transistors
Ingår i Proc of IEEE Lester Eastman Conference on High Performance Devices, s. 149-154, 2002.
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Construction of a Miniature X-ray Source with Diamond Electrodes
Ingår i Invited talk at the 3rd UK Workshop on Diamond and Diamond-like Carbon, The Physics Congress 2002 (IoP), Abstract Book, Brighton, April 8-10, s. 12-13, 2002.
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Development of a micr-machined thin film sun sensor for space application
Ingår i Book of Abstracts - Eurosensors XVI, 2002.
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Diffusion of indium and gallium in Cu(In,Ga)Se2 thin film solar cells
Ingår i Proceedings of the International Conference on Ternary and Multinary Compounds, Paris, France, October, 2002.
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Fused hollow cathode cold atmospheric plasma in monoatomic and molecular gases
Ingår i Symposium on Cold atmospheric Plasma Technologies, 202nd Meeting of The Electrochemical Society, Salt Lake City, October, abstract No. 458, 2002.
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Growth of Cu(In,Ga)Se2 Films Using a Cu-poor/rich/poor Sequence: Substrate Temperature Effects
Ingår i Proc. E-MRS, June 2002, Strasbourg, France, 2002.
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Hollow cathode atmospheric pressure plasma sources for surface treatment
Ingår i , 8th International Conference on Plasma Surfaced Engineering - PSE 2002, Garmisch-Partenkirchen, September, Keynote lecture K8, 2002.
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Hollow cathode cold atmospheric plasma sources with monoatomic and molecular gases
Ingår i Int.Conf.Metall.Coat.&Thin Films - ICMCTF-02, April, San Diego, 2002.
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Hollow Cathode Plasma Cleaning and Surface Activation
Ingår i Proceedings of the 45th Annual Tech.Conf. of the Society of Vacuum Coaters (SVC), Orlando, April 2002, www.svc.org., Proc, s. 109-112, 2002.
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Interface Study of CuInSe2/ZnO and Cu(In,Ga)Se2/ZnO Devices Using ALD ZnO Buffer Layers
Ingår i Proceedings of the Fifth Baltic Symposium on Atomic Layer Deposition, Tarttu, Estonia, October, 2002.
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Investigation of ALCVD TM TiN/Al2O3/HfAlOx/Al2O3 stack on epitaxial Si and Si0.7Ge0.3
Ingår i IEEE SISC, December, 2002.
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Low-temperature wafer direct bonding by surface modification in vacuum
Ingår i The 16th Symposium of the Japanese Institute of Electronics, Tokyo, Japan, March 18-20, 2002.
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Micropropulsion systems for future space missions
Ingår i Power MEMS, Tsukuba, Japan, s. 144-147, 2002.
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Microsystems in space
Ingår i The 7th Internationel Conference on Commercialization of Micro and Nano systems, Ypsilanti, Michigan, s. 129-132, 2002.
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Miniature X-Ray Sources with Diamond Electrodes
Ingår i The 8th Int Conf on New Diamond Science and Technology, Melbourne, July 21-26, Abstract book, s. 115-, 2002.
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NanoSpace-1:the Impacts of the First Swedish Nanosatellite On Spacecraft Architecture and Design
Ingår i 53rd International Astronautical Congr, Houston, Texas, s. 1-11, 2002.
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On the Thermal Stability of Atomic Layer Deposited (ALD) TiN as Gate Electrode in MOS Devices
Ingår i IEEE SISC, December, 2002.
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Performance of Radio Frequency Hollow Cathodes at Low Gas Pressures
Ingår i Int.Conf.Metall.Coat.&Thin Films - ICMCTF-02, April 2002, San Diego, 2002.
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Rapid Growth of Thin Cu(In,Ga)Se2 Layers for Solar Cells
Ingår i Proc. E-MRS, June 2002, Strasbourg, France, 2002.
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Re-crystallisation and Interdiffusion in CGS/CIS Bilayers
Ingår i Proc E-MRS, June, Strasbourg, France, 2002.
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Saw-tooth Reflective X-ray Optics with Sub-micron Resolution
Ingår i Int Symp on Optical Science and Technology, SPIE´s 47th Annual Meeting, 7-11 July, Seattle, WA, USA, 2002.
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Study of Zn(O,S) films for Cu(In,Ga)Se2 solar cells using a coupled XPS/UPS-ALD
Ingår i Proc. E-MRS, June 2002, Strasbourg, France, 2002.
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Vertical High Voltage Devices on Thick SOI with Back-End Trench Formation
Ingår i Proc of the 32nd ESSDERC’2002, pp. 295-298, 2002.
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A base-collector architecture for SiGe HBTs using low-temperature CVD epitaxy combined with chemical-mechanical polishing
Ingår i The 19th Nordic Semiconductor Meeting, Copenhagen, Denmark, May, 2001.
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A hybrid cold gas microthruster system for spacecraft
Ingår i Digest of Papers for the 11th Int Conf on Solid-State Sensors and Actuators - Transducers '01 and Eurosensors XV, Munich, Germany, June 10-14, s. 886-889, 2001.
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Analysis of CIGS Films and Devices Resulting from Different Cu-rich to Cu-poor Transitions
Ingår i Proc. 17th European Photovoltaic Solar Energy Conference, Munich, Oct, 2001.
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Chemical Mechanical Polishing for Surface Smoothing
Ingår i The 19th Nordic Semiconductor Meeting, Copenhagen, Denmark, May 20-23, 2001.
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Current transport in CuInS2 solar cells depending on absorber preparation
Ingår i Materials Research Society Symposium Proceedings (Mater Res Soc, Warrendale (PA), 668, s. H9.41-6, 2001.
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Diamond Membrane Based Structures for Miniature X-ray Sources
Ingår i Diamond´01, 12th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides & Silicon Carbide,Budapest, Hungary, September 2-7, 2001.
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Direct bonded quartz resonators
Ingår i Proc. of the IEEE International Frequency Control Symposium, Seattle, USA, June 6-8, 2001.
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Effect of Dopants on Mechanical Polishing of Silicon
Ingår i Proceedings of MAM2001, p. O4.4, March 5-7, Sigtuna Sweden, 2001.
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Electrical Characterization of Thin Ta2O5 Films
Ingår i The 19th Nordic Semiconductor Meeting, Copenhagen, Denmark, May, 2001.
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Fused hollow cathode cold atmospheric plasma source
Ingår i 1st Symposium on Cold atmospheric Plasma Technologies, The Electrochemical Society Spring Meeting, Washington, 2001.
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Growth of Coevaporated Cu(In,Ga)Se2 - The Influence of Rate Profiles on Film Morphology
Ingår i Mat. Res. Soc. Symp. Proc. 668, H2.2.1-H2.2.12, 2001.
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High gain micromachined slot-coupled patch-antenna for 60 GHz WLAN application
Ingår i 8th COST 260 Meeting on Smart Antenna Computer Aided Design & Technology, Université de Rennes, France, 2001.
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High Voltage Devices on SOI
Ingår i Presented at the Franco-Swedish Workshop on SOI, March 8-9, Grenoble, France, 2001.
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High Voltage LDMOS Transistors for Increasing RF Power Density and Gain
Ingår i GHz2001 Symposium, Nov. 26-27, 2001.
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Highly Oriented Coatings at Low Substrate Temperatures
Ingår i Proceedings of the 44th Annual Tech.Conf. of the Society of Vacuum Coaters (SVC), Philadelphia, April, Proc., s. 125-129, 2001.
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Hollow cathode plasma sources for large area surface treatment
Ingår i Invited paper at Int.Conf.Metall.Coat.&Thin Films - ICMCTF-01, San Diego, 2001.
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Hydronamic addressing: A flowcell for improved signal quality in bioanalytical systems
Ingår i Transducers 01, Münich, 2001.
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Influence of Ga on the Current Transport in Cu(In,Ga)Se2 Thin Film Solar Cells
Ingår i Proceedings 17th European Photovoltaic Solar Energy Conference (WIP-Renewable Energies, Munich, 2001) Vol II, s. 1265-1268, 2001.
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Integrated capacitors using reactive DC magnetron Co-sputtered (Ta2O5)1-x(TiO2)x thin films
Ingår i The AVS 2nd International Conference on Microelectronics & Interfaces, Santa Clara, USA, 2001.
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Mechanical reliability of silicon microsystem fusion bonds in spaceflight environment
Ingår i Paper no: IAF-01-1.5.05, 52nd International Astronautical Congress, 1-5 Oct, Toulouse France, 2001.
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Microstructured diamond membranes for miniature X-ray sources
Ingår i Proc Diamond 2001,, Budapest, Hungary, September 3-7, 2001.
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Modelling of Self Heating Effects of High Power Novel Vertical DMOS Transistors
Ingår i The 19th Nordic Semiconductor Meeting, Copenhagen, Denmark, May, 2001.
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Room temperature synthesis of c-axis oriented AlN thin piezoelectric films
Ingår i Presented at the AVS 2001, 2001.
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Selective Etching of Al/AlN Structures for Metallization of SAW Devices
Ingår i Presented at AVS 2001, 2001.
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Self Heating Effects of High Power DMOS Transistors
Ingår i Presented at the Franco-Swedish Workshop on SOI, March 8-9, Grenoble, France, 2001.
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SPICE Modeling of High Voltage LDMOS Transistors
Ingår i The 19th Nordic Semiconductor Meeting, Copenhagen, Denmark, May, 2001.
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Substitutional Effects of the Dielectric Constant in Ta2O5
Ingår i Presented at AVS, Oct, 2001.
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The Influence of Na on the Microstructure of Cu(InxGa1-x)Se2 Based Solar Cell Thin Films
Ingår i 52nd annual meeting of the Scandinavian Society for Electron Microscopy, Stockholm 12-15 June 2001,Book of Abstracts : Abstract No P87, s. 184-185, 2001.
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XPS/UPS monitoring of ALCVD ZnO growth on Cu(In,Ga)Se2 absorbers
s. 1118-1121 2001.
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Anodic bonding of materials with large difference in thermal expansion
Ingår i MME'00 (Micro Mechanics Europe), October 1-3, Uppsala, Sweden, 2000.
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Back surface band gap gradings in Cu(In,Ga)Se2 solar cells
Ingår i E-MRS, Strasbourgh, May 30 - June 2, 2000.
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Chip mounting and interconnection in multi chip modules for space applications
Ingår i Proc MME`00 Oct, Uppsala, Sweden, 2000.
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CIGS thin film PV modules for low-concentrating systems
Ingår i The EuroSun 2000, Copenhagen, June, 2000.
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Cu(In,Ga)Se2 devices: From cells to minimodules
Ingår i E-MRS, Strasbourgh, May 30 – June 2, 2000.
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Cu(In,Ga)Se2 fabricated by coevaporation
Ingår i European Research Conference on Photovoltaic Devices, Berlin – Teltow, Germany, March 31 – April 5, Invited, 2000.
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Degradation mechanisms of Cu(In,Ga)Se2-based thin film PV modules
Ingår i The 16th European Photovoltaic Solar Energy Conference in Glasgow, 1-5 May, s. 309-312, 2000.
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Diamond membrane based miniature X-ray source
Ingår i Diamond 2000, Porto, Portugal, s. 16.1-, 2000.
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Feasibility demonstration of the micropropulsion cold gas thruster system
Ingår i Proc 3rd Round Table on Micro/Nano-Technologies for Space May 2000, s. 219-225, 2000.
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High efficiency thin film solar cells with low In content due to thin Cu(In,Ga)Se2 and Ga grading
Ingår i Sixteenth European Photovoltaic Solar Energy Conference and Exhibition, Glasgow, May 1-5, 2000.
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High voltage Cu(In,Ga)Se2 devices with Ga-profiling fabricated using co-evaporation
Ingår i Proceedings of the 28th IEEE Photovoltaic Specialists Conference, s. 430-433, 2000.
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Improved output conductance for low-voltage microwave LDMOS transistors
Ingår i Proc of the 30th ESSDERC´2000, s. 468-471, 2000.
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Integration of high voltage devices on thick SOI substrates for automotive application
Ingår i Proceedings of the EUROSOI’2000, Oct. 25-27, Granada, Spain, 2000.
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Membrane covered electrically isolated through-wafer via hole
Ingår i Workshop Digest MME'00, Uppsala, Sweden, s. B4-, 2000.
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Micromachining in Silicon for Passive Alignment of Optical Fibres
Ingår i Micro-Opto-Electro-Mechanical Systems, 22-23 May, Glasgow, Scotland, United Kingdom, Proc. of SPIE Vol. 4075, s. 118-, 2000.
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Miniature X-ray source-development of a prototype
Ingår i MME'00, Uppsala, Sweden, 2000.
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New world record Cu(In,Ga)Se2 based minimodule: 16.6%
Ingår i Sixteenth European Photovoltaic Solar Energy Conference and Exhibition, Glasgow, May 1-5, 2000.
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Optimization of RF-sputtered ZnO/ZnO:Al for Cu(In,Ga)Se2 based devices
Ingår i Proc 16th EPVSEC, Glasgow, May, s. 775-778, 2000.
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Output power characteristics of high voltage LDMOS transistors
Ingår i Proc of the GHz2000 Symposium, March 13-14, Gothenburg, Sweden, s. 75-78, 2000.
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Oxygen plasma wafer bonding evaluated by the weibull fracture probability method
Ingår i Proc of the Eleventh Micromechanics Europe Workshop, Oct, Uppsala, Sweden, 2000.
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Power Characteristics of High Voltage LDMOS Transistors
Ingår i Proceedings of the IEEE European Microwave Conference, 2000.
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Shallow and deep trench isolation for use in RF-bipolar IC:s
Ingår i Proceedings of the 30th European Solid-State Device Research Conference, Cork, Ireland, 11-13 September, ESSDERC’2000, Sept, s. 212-215, 2000.
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Silicon fusion bond interfaces resilient to wet anisotropic etchants
Ingår i Micromechanics Europe 2000, Uppsala, s. 142-145, 2000.
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Simulation and dielectric characterization of reactive DC magnetron Co-sputtering of (Ta2O5)1-x(TiO2)x
Ingår i American Vacuum Society 47th National Symposium 2000 Boston, USA, 2000.
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Simulation of SOI MOSFETs at GHz-frequencies
Ingår i Proceedings of the GHz2000 Symposium, pp. 399-402, Gothenburg March 13-14, Sweden, 2000.
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Sulfurization of thin film solar cell absorbers
Ingår i Sixteent h European Photovoltaic Solar Energy Conference and Exhibition, Glasgow, May 1-5, s. 771-774, 2000.
Publikationer
Konferensbidrag (ickegranskade)
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A Study of Biological Particles in Bio-MEMS Devices using Dielectrophoresis
Ingår i Micro Structure Workshop, 29-31 March, Ystad, Sweden, 2004.
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CIGS Submodules with High Performance and High Manufacturability
Ingår i 19th European Photovoltaic Solar Energy Conference and Exhibition, Paris, 7-11 June, 2004.
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Complex Target Poisoning Effects in Reactive Sputtering
Ingår i American Vacuum Society Symposium & Exhibition, Anaheim USA, 2004.
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Escherica Coli Behavior in an Open Dielectrophoretic Microsystem
Ingår i 4th Workshop on Nanochemistry and Nanotechnology, 25-27 Aug, 2004.
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Heuristic model of the plasma impedance in reactive magnetron sputtering
Ingår i 5th International Conference on Coatings on Glass, Saarbrücken, Germany, July, 2004.
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High Density Plasma PVD of CrN Films
Ingår i 6th Symp European Vacuum Coaters, September 2004, Rome-Anzio, Italy, s. Invited paper-, 2004.
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High-Voltage SOI Devices for Automotive Applications
Ingår i Proc of NATO Advanced Research Workshop on SOI, Kiev, Russia, 25-29 April. Invited, 2004.
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Improved contrast in confocal microscopy by using a blue frequency doubled diode-pumped solid-state laser
Ingår i Conference on Lasers and Electro-optics (CLEO 04) May 16-21, s. Paper CThII5-, 2004.
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Influence of rotating magnets on hysteresis in reactive sputtering
Ingår i Society of Vacuum Coaters, 7th Annual Technical Conference Proceedings, April, 2004.
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Interface passivation mechanisms in metal gated oxide capacitors
Ingår i Proc of the 34th ESSDERC, 2004.
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Low Resistivity SOI Substrates for Improved Efficiency of RF Power-MOSFETs
Ingår i Proc of NATO Advanced Research Workshop on SOI, Kiev 25-29 April, 2004.
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New Materials for chemical and biosensors
Ingår i International Symposium on Advanced Materials and Processing, ISAMAP2K4, 6-8 December, I.I. T., Kharagpur, India, 2004.
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Relation between composition and optical properties of CdS films grown by chemical bath deposition
Ingår i Proceedings 19th European Photovoltaic Solar Energy Conference (WIP-Münich, Münich, Vol II, s. 1909-1912, 2004.
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The Stability in Damp Heat Conditions of Thin-film CIGS Solar Cells with Different Absorber Thickness
Ingår i 19th European Photovoltaic Energy Conference, 7-11 June, Paris, France, s. 1890-1893, 2004.
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Vital parts for RF microsystems under development for nanospacecraft at the Ångström Space Technology Centre (ÅSTC)
Ingår i Proceedings of MEMSWAVE, 2004., 2004.
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A Transceiver with Integrated Thermal Control for Spacecraft
Ingår i MEMSWAVE Heraklion 26th-28th June 2002, 2002.
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Micromachined microwave components for high data rate communication
Ingår i 3rd Round Table on Micro/Nano-Technologies for Space, ESTEC, Noordwijk, The Netherlands, 15-17 May, 2000, 2000.