Scientific articles at Solid-State Electronics 2000-2004

A Shallow and Deep Trench Isolation Process Module for RF BiCMOS

Forsberg, Markus; Johansson, T; Liu, W; Vellaikal, M

Part of J Electrochem Soc, p. G839-G846, 2004.

Charge-discharge kinetics of electric-paint displays

Edwards, M O M; Andersson, M; Gruszecki, T; Pettersson, H et al.

Part of Journal of Electroanalytical Chemistry, p. 175-184, 2004.

DOI for Charge-discharge kinetics of electric-paint displays

Comparison of dynamic simulations with RBS measurements of low energy ion implatation of Sb+ into SiO2/Si substrates

Ignatova, V A; Watjen, V; Katardjiev, Ilia; Chakarov, I R

Part of Microchimica Acta, p. 67-74, 2004.

Dependence of the electromechanical coupling on the degree of orientation of c-textured thin AlN films

Bjurström, Johan; Rosén, Daniel; Katardjiev, Ilia; Yantchev, Ventsislav et al.

Part of IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, p. 1347-1353, 2004.

DOI for Dependence of the electromechanical coupling on the degree of orientation of c-textured thin AlN films

Deposition of Ti2AIC and Ti3AIC2 epitaxial films by magnetron sputtering

Wilhelmsson, Ola; Palmquist, Jens-Petter; Nyberg, Tomas; Jansson, Ulf

Part of Applied Physics Letters, p. 1066-1067, 2004.

Electrothermal Simulations of High-Power SOI Vertical DMOS Transistors with Lateral Drain Contacts under Unclamped Inductive Switching Test

Pinardi, K; Heinle, Ulrich; Bengstsson, S; Olsson, Jörgen et al.

Part of Solid-State Electronics, p. 1119-1126, 2004.

Enhanced back reflectance and quantum efficiency in Cu(In,Ga)Se2 thin film solar cells with a ZrN back reflector

Malmström, Jonas; Schleussner, Sebastian; Stolt, Lars

Part of Applied Physics Letters, p. 2634-2636, 2004.

DOI for Enhanced back reflectance and quantum efficiency in Cu(In,Ga)Se2 thin film solar cells with a ZrN back reflector

High-Power SOI Vertical DMOS Transistors with Lateral Drain Contacts: Process Development, Characterization and Modeling

Pinardi, K; Heinle, Ulrich; Bengtsson, S; Olsson, Jörgen et al.

Part of IEEE Transactions on Electron Devices, p. 790-796, 2004.

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Baránková, H.; Bárdoš, L.; Gustavsson, L-E.

Part of Surface and Coatings Technology, p. 703-707, 2004.

High-rate hot hollow cathode arc deposition of chromium and chromium nitride films

Barankova, H; Bardos, L

Part of Surf Coat Technol, p. 703-707, 2004.

null

Kappertz, O.; Nyberg, T.; Rosén, D.; Berg, S.

Part of Proceedings to Society of Vacuum Coaters, 2004.

Modeling and characterization of capacitive coupling in trench-isolated structures on SOI substrates

Heinle, Ulrich; Vestling, Lars; Olsson, Jörgen

Part of Solid-State Electronics, p. 43-49, 2004.

DOI for Modeling and characterization of capacitive coupling in trench-isolated structures on SOI substrates

null

Nyberg, T.; Kappertz, O.; Rosén, D.; Kubart, T.

Part of Proceedings to Society of Vacuum Coaters, 2004.

New hybrid source of cold atmospheric plasma

Barankova, Hana; Bardos, Ladislav

Part of Surface and Coatings Technology, p. 688-692, 2004.

null

Bárdoš, L.; Baránková, H.; Gustavsson, L-E.; Teer, D.G.

Part of Surface and Coatings Technology, p. 651-656, 2004.

New microwave and hollow cathode hybrid plasma sources

Bardos, Ladislav; Barankova, Hana; Gustavsson, Lars-Erik; Teer, D G

Part of Surface and Coatings Technology, p. 651-656, 2004.

Precise magnetoresistance and Hall resistivity measurements in the diamond anvil cell

Boye, Shawn A.; Rosén, Daniel; Lazor, Peter; Katardjiev, Ilia

Part of Review of Scientific Instruments, p. 5010-5015, 2004.

DOI for Precise magnetoresistance and Hall resistivity measurements in the diamond anvil cell

Simulation and modeling of the substrate contribution to the output resistance for RF-LDMOS power transistors

Ankarcrona, Johan; Eklund, Klas-Håkan; Vestling, Lars; Olsson, Jörgen

Part of Solid-State Electronics, p. 789-797, 2004.

DOI for Simulation and modeling of the substrate contribution to the output resistance for RF-LDMOS power transistors

The influence of buffer layer on the transient behaviour of thin film chalcopyrite devices

Igalson, M; Platzer Björkman, Charlotte

Part of Solar Energy Materials and Solar Cells, p. 93-103, 2004.

DOI for The influence of buffer layer on the transient behaviour of thin film chalcopyrite devices

null

Malm, Ulf; Edoff, Marika; Stolt, Lars

Part of Proceedings of the 19th European Photovoltaic Solar Energy Conference, Paris, p. 1890-1893, 2004.

Variable work function in MOS capacitors utilizing nitrogen-controlled TiNx gate electrodes

Westlinder, Jörgen; Sjöblom, Gustaf; Olsson, Jörgen

Part of Microelectronic Engineering, p. 389-396, 2004.

DOI for Variable work function in MOS capacitors utilizing nitrogen-controlled TiNx gate electrodes

A miniature X-ray fluorescence set-up

Ribbing, Carolina; Andersson, Marit; Hjort, Klas; Lundqvist, Hans

Part of Review of Scientific Instruments, p. 3423-3428, 2003.

A Novel Strained Si_0.7Ge_0.3 Surface-Channel pMOSFET with an ALD TiN/Al₂O₃/HfAlO_x/Al₂O₃ Gate Stack

Wu, Dongping; Lindgren, Ann-Chatrin; Persson, Stefan; Sjöblom, Gustaf et al.

Part of IEEE Electron Device Letters, p. 171-173, 2003.

A study of the influence of the Ga content on the long-term stability of Cu(In,Ga)Se2 thin film solar cells

Malmström, Jonas; Wennerberg, Johan; Stolt, Lars

Part of Thin Solid Films, p. 436-442, 2003.

Analysis of the Specific On-Resistance of Vertical High-Voltage DMOSFETs on SOI

Heinle, Ulrich; Olsson, Jörgen

Part of IEEE Transactions on Electron Devices, p. 1416-1419, 2003.

Cu(In,Ga)Se2 thin films grown with a Cu-poor/rich/poor sequence: Growth model and structural considerations

Kessler, John; Chityuttakan, Chanwit; Lu, Jun; Schöldström, Jens et al.

Part of Progress in Photovoltaics: Research and Applications, p. 319-331, 2003.

Cu(In,Ga)Se2-based thin-film photovoltaic modules optimized for long-term performance

Wennerberg, Johan; Kessler, John; Stolt, Lars

Part of Solar Energy Materials & Solar Cells, p. 47-55, 2003.

Design of concentrating elements with CIS thinfilm solar cells for façade integration. Solar Energy Materials & Solar Cells

Brogren, Maria; Wennerberg, Johan; Kapper, R; Karlsson, B

Part of Solar Energy Materials & Solar Cells, p. 567-575, 2003.

Diffusion of indium and gallium in Cu(In,Ga)Se2 thin film solar cells

Lundberg, Olle; Lu, Jun; Rockett, Angus; Edoff, Marika et al.

Part of Journal of physics and chemistry of solids, p. 1499-1504, 2003.

Dye-sensitized sputtered titanium oxide films for photovoltaic applications: influence of the O2/Ar gas flow ratio during the deposition

Gómez, M.M.; Beermann, N.; Lu, J.; Olsson, E. et al.

Part of Solar Energy Materials and Solar Cells, p. 37-56, 2003.

DOI for Dye-sensitized sputtered titanium oxide films for photovoltaic applications: influence of the O2/Ar gas flow ratio during the deposition

Electrical Characterization of AlN MIS and MIM Structures

Engelmark, Fredrik; Westlinder, Jörgen; Iriarte Fuentes, Gonzalo; Katardjiev, Ilia et al.

Part of IEEE Trans Electron Devices, p. 1214-1219, 2003.

Experimental and computer simulation studies of the

Engelmark, Fredrik; Westlinder, Jörgen; Nyberg, Tomas; Berg, Sören

Part of J Vac Sci Technol, p. 1981-1987, 2003.

Growth of Cu(In,Ga)Se2 films using a Cu-poor/rich/poor sequence: substrate temperature effects

Kessler, John; Chityuttakan, C; Schöldström, Jens; Stolt, Lars

Part of Thin Solid Films, p. 1-5, 2003.

Highly efficient Cu(In,Ga)Se2 mini-modules

Kessler, John; Wennerberg, Johan; Bodegård, Marika; Stolt, Lars

Part of Solar energy Materials & Solar Cells, p. 35-46, 2003.

Hollow cathode atmospheric pressure plasma sources for surface treatment

Barankova, Hana; Bardos, Ladislav

Part of Surface and Coatings Technology, p. 63-67, 2003.

Hollow cathode cold atmospheric plasma sources with monoatomic and molecular gases

Barankova, Hana; Bardos, Ladislav

Part of Surf Coat Technol, p. 649-653, 2003.

Influence of the Cu(In,Ga)Se2 Thickness and Ga Grading on Solar Cell Performance

Lundberg, Olle; Bodegård, Marika; Malmström, Jonas; Stolt, Lars

Part of Progress in Photovoltaics: Science and Applications, p. 77-88, 2003.

Innovative Process Development for a New Micro-Tribosensor Using Surface Micromachining

Deladi, S; de Boer, M J; Krijinen, G; Rosén, Daniel

Part of J Micromech Microeng, p. S17-22, 2003.

InP and Si Metal-Oxide Semiconductor Structures Fabricated Using Oxygen Plasma Assisted Wafer Bonding

Forsberg, Markus; Pasquariello, Donato; Camacho, M; Bergman, D

Part of Journal of Electronic Materials, p. 111-116, 2003.

Interface study of CuInSe2/ZnO and Cu(In,Ga)Se2/ZnO devices using ALD ZnO buffer layers

Platzer Björkman, Charlotte; Lu, Jun; Kessler, John; Stolt, Lars

Part of Thin Solid FIlms, p. 321-325, 2003.

Investigation of the electrical behavior of an asymmetric MOSFET

Ewert, Tony; Vestling, Lars; Olsson, Jörgen

Part of Microelectronic Engineering, p. 428-438, 2003.

DOI for Investigation of the electrical behavior of an asymmetric MOSFET

Microfabrication of saw-tooth refractive x-ray lenses in low-Z materials

Ribbing, Carolina; Cederström, B; Lundqvist, M

Part of J Micromech Microeng, p. 714-720, 2003.

Microstructured diamond X-ray source and refractive lens

Ribbing, Carolina; Cederström, B; Lundqvist, M

Part of Diamond and Related Materials, p. 1793-1799, 2003.

Model relating process variables to film electrical properties for reactively sputtered tantalum oxide thin films

Jain, P; Bhagwat, V; Rymaszewski, E J; Lu, T M et al.

Part of J Appl Phys, p. 3596-3604, 2003.

Non-thermodynamic approach to including bombardment-induced post-cascade redistribution of point defects in dynamic Monte Carlo code

Ignatova, V A; Chakarov, L R; Katardjiev, Ilia

Part of Nuclear Instruments and Methods in Physics Research, p. 24-30, 2003.

On the thermal stability of atomic layer deposited TiN as gate electrode in MOS devices

Westlinder, Jörgen; Schram, Tom; Pantisano, Luigi; Cartier, Eduard et al.

Part of IEEE Electron Device Letters, p. 550-552, 2003.

On-column polymer-imbedded graphite inlet electrode for capillary electrophoresis coupled on-line with flow injection analysis in a poly(dimethylsiloxane) interface

Samskog, Jenny; Bergström, Sara K.; Jönsson, Mats; Klett, Oliver et al.

Part of Electrophoresis, p. 1723-1729, 2003.

DOI for On-column polymer-imbedded graphite inlet electrode for capillary electrophoresis coupled on-line with flow injection analysis in a poly(dimethylsiloxane) interface

Performance of Radio Frequency Hollow Cathodes at Low Gas Pressures

Bardos, Ladislav; Barankova, Hana; Lebedev, Y A

Part of Surf Coat Technol, p. 654-658, 2003.

Rapid growth of thin Cu(In,Ga)Se2 layers for solar cells

Lundberg, Olle; Bodegård, Marika; Stolt, Lars

Part of Thin Solid Films, p. 26-30, 2003.

Recombination centers in the Cu(In,Ga)Se2-based photovoltaic devices

Igalson, M; Bodegård, Marika; Stolt, Lars

Part of J Phys Chem Solids, p. 2041-2045, 2003.

Re-crystallisation and interdiffusion in CGS/CIS bilayers

Bodegård, Marika; Lundberg, Olle; Lu, Jun; Stolt, Lars

Part of Thin Solid Films, p. 46-52, 2003.

Reversible changes of the fill factor in the ZnO/CdS/Cu(In,Ga)Se2 solar cells

Igalson, M; Bodegård, Marika; Stolt, Lars

Part of Solar Energy Materials and Solar Cells, p. 195-207, 2003.

SAW COM-Parameter Extraction in AlN/Diamond Layered Structures

Iriarte, Gonzalo Fuentes; Engelmark, Fredrik; Katardjiev, Ilia; Plessky, V et al.

Part of IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, p. 1542-1547, 2003.

Small Signal and Power Evaluation of Novel BiCMOS -Compatible Short-Channel LDMOS Technology

Bengtsson, Olof; Litwin, Andrej; Olsson, Jörgen

Part of IEEE transactions on microwave theory and techniques, p. 1052-1056, 2003.

Surface acoustic wave propagation characteristics of aluminum nitride thin films grown on polycrystalline diamond

Iriarte, Gonzalo Fuentes

Part of J Appl Phys, p. 9604-9609, 2003.

The ”defected layer” and the mechanism of the interface-related metastable behavior in the ZnO/CdS/Cu(In,Ga)Se2 devices

Igalson, M; Bodegård, Marika; Stolt, Lars; Jasenek, A

Part of Thin Solid Films, p. 153-157, 2003.

The Influence of the Deposition Parameters on the Stress of Magnetron Sputter Deposited AlN Thin Films on Si (100) Substrates

Iriarte, Gonzalo Fuentes; Engelmark, Fredrik; Ottosson, Mikael; Katardjiev, Ilia

Part of Journal of Materials Research, p. 423-, 2003.

1 W/mm RF Power Denisty at 3.2 GHz for a Dual-Layer RESURF LDMOS Transistor

Olsson, Jörgen; Rorsman, Niklas; Vestling, Lars; Fager, C et al.

Part of IEEE Electron Device Letters, p. 206-208, 2002.

DOI for 1 W/mm RF Power Denisty at 3.2 GHz for a Dual-Layer RESURF LDMOS Transistor

1 W/mm RF Power Density at 3.2 GHz for a Dual-layer RESURF LDMOS Transistor

Olsson, Jörgen; Rorsman, Niklas; Vestling, Lars; Fager, Christian et al.

Part of IEEE Electron Device Letters, p. 206-208, 2002.

A Base-Collector Architecture for SiGe HBTs using Low-Temperature CVD Epitaxy Combined with Chemical-Mechanical Polishing

Suvar, E; Haralson, E; Forsberg, Markus; Radamson, H et al.

Part of Physica Scripta, p. 64-66, 2002.

A General Small-Signal Series Impedance Extraction Technique

Vestling, Lars; Ankarcrona, Johan

Part of IEEE Microwave and Wireless Components Letters, p. 249-251, 2002.

DOI for A General Small-Signal Series Impedance Extraction Technique

A hybrid cold gas microthruster system for spacecraft

Köhler, J; Bejhed, J; Kratz, Henrik; Bruhn, F et al.

Part of Sensors and Actuators A-Physical, p. 587-598, 2002.

Analysis and Design of a Low-Voltage High-Frequency LDMOS Transistor

Vestling, Lars; Ankarcrona, Johan; Olsson, Jörgen

Part of IEEE Transactions on Electron Devices, p. 976-980, 2002.

DOI for Analysis and Design of a Low-Voltage High-Frequency LDMOS Transistor

Chemical mechanical polishing for surface smoothing

Forsberg, Markus; Olsson, Jörgen

Part of Physica Scripta, p. 200-202, 2002.

Containerless fabrication of tungsten single crystals using laser CVD for field emission applications

Björklund, K.L; Ribbing, Carolina; Norde, Herman; Boman, Mats

Part of Appl. Phys., p. 493-496, 2002.

Deposition of HfO2 thin films in HfI4-based processes

Forsgren, Katarina; Hårsta, Anders; Aarik, Jaan; Aidla, Aleks et al.

Part of Journal of the Electrochemical Society, p. F139-F144, 2002.

DOI for Deposition of HfO2 thin films in HfI4-based processes

Diamond Membrane Based Structures for Miniature X-ray Sources

Ribbing, Carolina; Rangsten, Pelle; Hjort, Klas

Part of Diamond Rel Mater, p. 1-7, 2002.

Drift Region Optimization of Lateral RESURF Devices

Vestling, Lars; Olsson, Jörgen; Eklund, Klas-Håkan

Part of Solid-State Electronics, p. 1177-1184, 2002.

DOI for Drift Region Optimization of Lateral RESURF Devices

Effect of dopants on chemical mechanical polishing of silicon

Forsberg, Markus; Keskitalo, Niclas; Olsson, Jörgen

Part of Microelectronic Engineering, p. 149-155, 2002.

Fused hollow cathode cold atmospheric plasma cource for gas treatment

Barankova, Hana; Bardos, Ladislav

Part of Catalysis Today, p. 237-241, 2002.

Highly oriented coatings at low substrate temperatures

Bardos, Ladislav; Barankova, Hana

Part of Vacuum & Coating Technology November, 2002.

Hollow Cathode Plasma Cleaning and Surface Activation

Barankova, Hana; Bardos, Ladislav

Part of Vacuum & Coating Technology November, 2002.

Iodide-Based Atomic Layer Deposition of ZrO2: Aspects of Phase Stability and Dielectric Properties

Forsgren, Katarina; Westlinder, Jörgen; Lu, Jun; Olsson, Jörgen et al.

Part of Chemical Vapor Deposition, p. 105-109, 2002.

DOI for Iodide-Based Atomic Layer Deposition of ZrO2: Aspects of Phase Stability and Dielectric Properties

Miniature X-ray Source - Development of a Prototype

Ribbing, Carolina; Strid, Niklas; Rangsten, Pelle; Tirén, Jonas

Part of Biomedical Microdevices, p. 285-292, 2002.

Multi-prism x-ray lens

Cederström, B; Lundqvist, M; Ribbing, Carolina

Part of Appl Phys Lett, p. 1399-1401, 2002.

Na0.5K0.5NbO3 Thin Films for Voltage Controlled Acoustoelectric Device Applications

Cho, Chong-Rae; Katardjiev, Ilia; Grishin, M; Grishin, A

Part of Appl Phys Lett, p. 3171-3173, 2002.

Reactive Sputter Deposition of Highly Oriented AlN Films at Room Temperature

Iriarte, Gonzalo Fuentes; Engelmark, Fredrik; Katardjiev, Ilia V

Part of J Mat Res, p. 1469-1475, 2002.

Selective Etching of Al/AlN Structures for Metallization of SAW Devices

Engelmark, Fredrik; Iriarte, Gonzalo Fuentes; Katardjiev, Ilia

Part of J Vac Sci Technol, p. 843-, 2002.

Self Heating Effects of High Power SOI Vertical DMOS Transistors with Lateral Drain Contacts

Pinardi, K; Heinle, Ulrich; Bengtsson, S; Olsson, Jörgen

Part of Physica Scripta, p. 38-41, 2002.

Simulation and dielectric characterization of reactive dc magnetron co-sputtered (Ta2O5)1-x(TiO2)x thin films

Westlinder, Jörgen; Zhang, Yanwen; Engelmark, Fredrik; Possnert, Göran et al.

Part of Journal of vacuum science and technology B, p. 855-861, 2002.

Sub-Circuit Based SPICE Model for High Voltage LDMOS Transistors

Ankarcrona, Johan; Olsson, Jörgen

Part of Physica Scripta, p. 7-9, 2002.

Unclamped Inductive Switching Behaviour of High-Power SOI Vertical DMOS Transistor with Lateral Drain Contacts

Pinardi, K; Heinle, Ulrich; Bengtsson, S; Olsson, Jörgen et al.

Part of Solid-State Electronics, p. 2105-2110, 2002.

Weibull fracture probability for characterisation of the anodic bond process

Richard, Åse; Köhler, Johan; Jonsson, Kerstin

Part of Sensors and Actuators, p. 304-311, 2002.

XPS instrument coupled with ALCVD reactor for investigation of film growth

Sterner, Jan; Kessler, John; Stolt, Lars

Part of J Vac Sci Technol, p. 278-284, 2002.

Back surface bandgap gradings in Cu(In,Ga)Se2 solar cells

Dullweber, T; Lundberg, Olle; Malmström, Jonas; Bodegård, Marika et al.

Part of Thin Solid Films, p. 11-13, 2001.

Baseline Cu(In,Ga)Se2 Device Production: Control and Statistical Significance

Kessler, John; Bodegård, Marika; Hedström, J; Stolt, Lars

Part of Solar Energy Materials & Solar Cells, p. 67-76, 2001.

Channel length extraction for DMOS transistors using capacitance-voltage measurements

Valtonen, Roger; Olsson, Jörgen; De, Wolf P

Part of IEEE Trans on Electron Devices, p. 1454-1459, 2001.

Chip mounting and interconnection in multi-chip modules for space applications

Nilsson, Peter; Jönsson, Mats; Stenmark, Lars

Part of Journal of Micromechanics and Microengineering, p. 339-, 2001.

Comparison of the radio frequency hollow cathode to the microwave antenna discharge for plasma processing

Bardos, Ladislav; Barankova, Hana

Part of J Appl Phys, p. 1703-1709, 2001.

Design of grided Cu(In,Ga)Se2 thin-film PV modules

Wennerberg, Johan; Kessler, John; Stolt, Lars

Part of Solar Energy Materials & Solar Cells, p. 59-65, 2001.

null

Vallin, Örjan; Einefors, Boo; Hedlund, Christer; Thornell, Greger

Part of Proceedings of the 2001 IEEE International Frequency Control Symposium and PDA Exhibition Seattle, WA, USA, 2001.

Dot patterns from second-harmonic and sum-frequency in polycrystalline ZnSe

Chinh, T D; Seibt, Wolfgang; Siegbahn, Kai

Part of J Appl Phys, p. 2612-2614, 2001.

Effect of Sulfurization on the Microstructure of Chalcopyrite Thin Film Absorbers

Keränen, J; Lu, Jun; Barnard, J; Sterner, Jan et al.

Part of Thin Solid Films, p. 80-82, 2001.

Electrical characterization of ZnO/CdS/Cu(In,Ga)Se2 devices with controlled sodium content

Igalson, M; Kubiaczyk, A; Zabierowski, P; Bodegård, Marika et al.

Part of Thin Solid Films, p. 225-227, 2001.

Hollow cathode plasma sources for large area surface treatment

Barankova, Hana; Bardos, Ladislav

Part of Surf Coat Technol, p. 486-490, 2001.

Hollow cathode PVD of nitride and oxide films at low substrate temperature

Bardos, Ladislav; Barankova, Hana

Part of Surf Coat Technol, p. 463-468, 2001.

Integration of high voltage devices on thick SOI substrates for automotive applications

Heinle, Ulrich; Olsson, Jörgen

Part of Solid-State Electronics, p. 629-632, 2001.

Membrane Covered Electrically Isolated Through-Wafer Via Hole

Rosén, Daniel; Olsson, Jörgen; Hedlund, Christer

Part of J Micromech Microeng, p. 344-347, 2001.

Oxygen Plasma Wafer Bonding Evaluated by the Weibull Fracture Probability Method

Jonsson, Kerstin; Köhler, Johan; Hedlund, Christer; Stenmark, Lars

Part of Journal of Micromechanics and Microengineering, p. 364-370, 2001.

Processing in Afterglows and Decaying Plasmas

Bardos, Ladislav; Barankova, Hana

Part of Vacuum & Coating Technology, p. 46-56, 2001.

Self-heating effects in SOI bipolar transistors

Olsson, Jörgen

Part of Microelectronic Engineering, p. 339-352, 2001.

null

Köhler, Johan; Strandman, Carola; Vallin, Örjan; Hedlund, Christer et al.

Part of Journal of Micromechanics and Microengineering, p. 359-, 2001.

Silicon fusion bond interfaces resilient to wet anisotropic etchants

Köhler, Johan; Strandman, Carola; Vallin, Örjan; Hedlund, Christer et al.

Part of Journal of Micromechanics and Microengineering, p. 359-363, 2001.

Structural and electroacoustic studies of AIN thin films during low temperature radio frequency sputter deposition

Engelmark, Fredrik; Iriarte, Gonzalo Fuentes; Katardjiev, Ilia V; Ottosson, M et al.

Part of J Vac Sci Technol, p. 2664-2669, 2001.

Thin film PV modules for low-concentrating systems

Wennerberg, Johan; Kessler, John; Hedström, J; Stolt, Lars et al.

Part of Solar Energy, p. 243-255, 2001.

An Auto-Calibrating Adaptive Array for Mobile Telecommunications

Wennström, Mathias; Strandell, Jonas; Öberg, Tommy; Lindskog, Erik et al.

Part of IEEE Transactions on Aerospace and Electronic Systems, p. 729-736, 2000.

DOI for An Auto-Calibrating Adaptive Array for Mobile Telecommunications

Booster reflectors for PV modules in Sweden

Rönnelid, M; Karlsson, B; Krohn, P; Wennerberg, Johan

Part of Prog Photovoltaic: Res Appl, p. 279-291, 2000.

Dynamic simulations of pulsed reactive sputtering processes

Jonsson, Lars; Nyberg, Tomas; Berg, Sören

Part of J Vac Sci Technol, p. 503-508, 2000.

Effect of post nitride-passivation processing on the long-term stability of polysilicon IC resistors

Rydberg, Matts; Smith, Ulf; Sjödin, H

Part of J. Vac. Sci. Technol. B, p. 690-694, 2000.

Electrochemical detection based on redox cycling using interdigitated microarray electrodes at mu L/min flow rates

Björefors, F; Strandman, Carola; Nyholm, L

Part of ELECTROANALYSIS, p. 255-261, 2000.

Field-emitting structures intended for a miniature X-ray source

Rangsten, Pelle; Ribbing, Carolina; Strandman, Carola; Hök, Bertil et al.

Part of Sensors & Actuators, p. 24-29, 2000.

Frequency response in pulsed DC reactive sputtering processes

Jonsson, Lars; Nyberg, Tomas; Katardjiev, Ilia; Berg, Sören

Part of Thin Solid Films, p. 43-48, 2000.

Fused hollow cathode cold atmospheric plasma

Barankova, Hana; Bardos, Ladislav

Part of Appl Phys Letters, p. 285-287, 2000.

Growth of Cu(In,Ga)Se2 thin films by coevaporation using alkaline precursors

Bodegård, Marika; Granath, Karin; Stolt, Lars

Part of Thin Solid Films, p. 9-16, 2000.

null

Vallin, Örjan; Bäcklund Ylva, []

Part of Journal of Micromechanics and Microengineering, p. 196-199, 2000.

High-temperature piezoresistive gauge fabricated on commercially available silicon-on-insulator wafers

Vallin, Örjan; Bäcklund, Ylva

Part of J Micromech Microeng, p. 196-199, 2000.

Influence on the Long-Term Stability of Polysilicon Resistors from Traces of Titanium and Tungsten

Rydberg, Matts; Smith, Ulf

Part of J Electrochem Soc, p. 3487-3493, 2000.

Long-term Stability and Electrical Properties of Compensation Doped Poly-Si IC-Resistors

Rydberg, Matts; Smith, Ulf

Part of IEEE Transaction on Electron Devices, p. 417-426, 2000.

Oxidation and induced damages in oxygen plasma in situ wafer bonding

Pasquariello, Donato; Hedlund, Christer; Hjort, Klas

Part of J Electrochem Soc, p. 2699-2703, 2000.

Patterning of tantalum pentoxide, a high epsilon material, by inductively coupled plasma etching

Jonsson, Lars; Westlinder, Jörgen; Engelmark, Fredrik; Hedlund, Christer et al.

Part of J Vac Sci Technol, p. 1906-1910, 2000.

Radio frequency hollow cathode source for large area cold atmospheric plasma applications

Bardos, Ladislav; Barankova, Hana

Part of Surface and Coatings Technology, p. 522-527, 2000.

Surface energy as a function of self-bias voltage in oxygen plasma wafer bonding

Pasquariello, Donato; Lindeberg, Mikael; Hedlund, Christer; Hjort, Klas

Part of Sensors & Actuators, p. 239-244, 2000.

Synthesis of highly oriented piezoelectric AlN films by reactive sputter deposition

Engelmark, Fredrik; Iriarte, Gonzalo Fuentes; Katardjiev, Ilia; Hårsta, Anders et al.

Part of J. Vac. Sci. Technol. A, p. 1609-1612, 2000.

The effect of NaF on Cu(In, Ga)Se-2 thin film solar cells

Granath, Karin; Bodegard, Marika; Stolt, Lars

Part of SOLAR ENERGY MATERIALS AND SOLAR CELLS, p. 279-293, 2000.

Weibull fracture probability for silicon wafer bond evaluation

Köhler, Johan; Jonsson, Kerstin; Greek, Staffan; Stenmark, Lars

Part of JOURNAL OF THE ELECTROCHEMICAL SOCIETY, p. 4683-4687, 2000.

A Simplified Treatment of Target Implantation Effects in Reactive Sputtering

Kappertz, Oliver; Nyberg, Tomas; Rosén, Daniel; Katardjiev, Ilia et al.

Part of The International Conference on Metallurgical Coatings and Thin Films in San Diego, USA, 2004.

Advances in Heuristic and Monte-Carlo Simulation of Reactive Sputtering and Technical Application

Pflug, Andreas; Sittinger, V; Scyszka, B; Nyberg, Tomas et al.

Part of Invited to the Symposium on Reactive Sputter Processes and Related Phenomena III, Ghent, Belgium, December 9-10, 2004.

AlN Coating and Oxidation on Silicon Field Emitters to Enhance Reliability for Space Applications

Wang, K L; Aplin, B J; Kent, S E; Huq, R et al.

Part of The 17th International Vacuum Nanotechnology Conference, 2004, Cambridge, California, USA, 2004.

An accurate direct extraction technique for the MBVD resonator model

Bjurström, Johan; Vestling, Lars; Olsson, Jörgen; Katardjiev, Ilia

Part of Proceedings of 34th European Microwave Conference, p. 1241-1244, 2004.

Characterization of the Cold Atmospheric Plasma Hybrid Source

Bardos, Ladislav; Barankova, Hana

Part of American Vacuum Society 51st Int Meeting, Anaheim, November, p. Paper PS-ThM4, 2004.

Hot Hollow Cathode Arc Deposition of Highly Oriented Chromium and Chromium Nitride Films

Bardos, L; Barankova, H

Part of Proc of the 47th Annual Tech Conf of the Society of Vacuum Coaters (SVC), Dallas, USA, April 2004, p. Paper E-3, p. 91, 2004.

Hot Hollow Cathode Diffuse Arc Deposition of Chromium Nitride Films

Barankova, Hana; Bardos, Ladislav; Gustavsson, Lars-Erik

Part of American Vacuum Society 51st Int Meeting, Anaheim,USA, November, 2004.

Modelling of Sputter Erosion Rate Enhancement from Ceramic Targets

Nyberg, Tomas; Kappertz, Oliver; Rosén, Daniel; Kubart, Tomas et al.

Part of Proceedings of Society of Vacuum Coaters, p. 324.328-, 2004.

Thermodynamic Simulation of the Endpoint Characteristics in a CIGS Deposition Process

Zimmermann, Uwe; Schöldström, Jens; Edoff, Marika; Stolt, Lars

Part of Nineteenth European Photovoltaic Solar Energy Conference, p. 1932-1935, 2004.

Download full text (pdf) of Thermodynamic Simulation of the Endpoint Characteristics in a CIGS Deposition Process

TRIDYN simulation of target poisoning in reactive sputtering

Rosén, Daniel; Katardjiev, Ilia; Berg, Sören; Möller, W

Part of COSIRES, Finland, 2004.

ALD metal-gate/high-k gate stack for Si and Si0.7Ge0.3 surface-channel pMOSFETs

Wu, D; Persson, S; Lindgren, A-C; Sjöblom, Gustaf et al.

Part of Proceedings of 33th ESSDERC2003, p. 263-266, 2003.

Analysis and improvments of high frequency substrate losses for RF MOSFETs

Ankarcrona, Johan; Eklund, Klas-Håkan; Vestling, Lars; Olsson, Jörgen

Part of Proceedings of IEEE SISPAD, p. 319-322, 2003.

Analysis of Zn(O,S) films for Cu(In,Ga)Se2 solar cells

Platzer Björkman, Charlotte; Kessler, John; Stolt, Lars

Part of Proceedings of the Estonian Academy of Sciences Physics Matematics 52(3) pp 299-307 (2003), 2003.

Atomic Layer Deposition of Zn(O,S) buffer layers for high efficiency Cu(In,Ga)Se2 solar cells

Platzer Björkman, Charlotte; Kessler, John; Stolt, Lars

Part of Proceedings of the 3rd World Conference on Photovoltaic Solar Energy Conversion, WCPEC-3, 1, Osaka, Japan, p. 461-464, 2003.

Basic Understanding of Reactive Sputtering Processes

Berg, Sören; Nyberg, Tomas

Part of Invited to the AVS 50th National Symposium in Baltimore, Maryland, USA, November 2-7, 2003, 2003.

Basic Understanding of the Pulsed DC Reactive Spitter Deposition Process

Berg, Sören; Nyberg, Tomas; Katardjiev, Ilia

Part of The 4th Asian-European Int Conf on Plasma Surface Engineering, AEPSE 2003, Jeju City, South Korea, September 28-October 2, 2003, 2003.

Cold Atmospheric Plasma Sources for Surface Treatment

Barankova, Hana; Bardos, Ladislav

Part of The 46th Annual Tech Conf of the Society of acuum Coaters (SVC), San Francisco, May 2003, Invited talk P-1, p. 427-430, 2003.

Control of reactive sputtering process using two reactive gases

Sproul, W D; Christie, D J; Carter, D C; Berg, Sören et al.

Part of Proc. of the AVS 4th International Conference on Microelectronics & Interfaces, Santa Clara, USA, p. 98-103, 2003.

Dependence of the Electromechanical Coupling on the Degree of Orientation of c-Textured Thin AlN Films

Bjurström, Johan; Rosén, Daniel; Katardjiev, Ilia; Yantchev, Ventsislav

Part of IEEE Ultrasonics Symposium, Honolulu, Hawaii, USA, 2003, 2003.

Development of a micronized Electrical Field-Flow Fractionation instrument with an improved electrode system

Veen, R; Jönsson, Mats; Gantelius, J; Lindberg, Ulf et al.

Part of The 225th ACS National Meeting, Elopto 2003, March 24-27, New Orleans, USA, 2003.

Effects of low-temperature water vapor annealing of strained SiGe surface-channel pMOSFETs with high-κ dielectric

Westlinder, Jörgen; Sjöblom, Gustaf; Wu, Dongping; Hellström, Per-Erik et al.

Part of Proceedings of ESSDERC, p. 525-528, 2003.

Flatband Voltage Adjustment USing Reactively Sputtered TiN Metal Gates

Sjöblom, Gustaf; Blom, Hans-Olof; Olsson, Jörgen

Part of Proc. of the AVS 4th International Conference on Microelectronics & Interfaces, Santa Clara, USA, p. 215-217, 2003.

New hybrid source of cold atmospheric plasma

Barankova, Hana; Bardos, Ladislav

Part of ICMCTF´03, San Diego, April, 2003.

New hybrid source with microwave and hollow cathode plasma

Bardos, Ladislav; Barankova, Hana

Part of 46th Annual Tech Conf of the Society of Vacuum Coaters (SVC), San Francisco, May, Paper E-8, Proc., p. 104-107, 2003.

New microwave and hollow cathode hybrid plasma sources

Bardos, Ladislav; Barankova, Hana

Part of Int Conf Metal Coat Thin Films, ICMCTF´03, San Diego, April, p. Paper G1/TS1-1, 2003.

New Plasma Sources for PE CVD

Barankova, Hana; Bardos, Ladislav

Part of Invited paper, 1st Int Symposium on Design and Technology of Coatings, Bonassola, Italy September 24-26, Proc ed by E Olzi and R Molena, ISBN 88-8080-046-9, 2003.

Optimized growth conditions for Cu(In,Ga)Se2 layers by co-evaporation at high deposition rates

Lundberg, Olle; Edoff, Marika Edoff; Stolt, Lars

Part of Material Research Conference, Spring 2003, San Francisco, USA, 2003.

Potential for light trapping in Cu(In,Ga)Se2 solar cells

Malmström, Jonas; Lundberg, Olle; Stolt, Lars

Part of Proceedings 3rd World Conference on Photovoltaic Energy Conversion (WCPEC-3 Organizing Committee, Osaka, 2003) Vol I, p. 344-347, 2003.

PVD of hard films inside narrow holes and pipes

Bardos, Ladislav; Barankova, Hana

Part of The 46th Annual Tech Conf of the Society of Vacuum Coaters (SVC), San Francisco, May, Paper H-5, Proc., p. 154-154, 2003.

Pyrotechnical microthrusters for space application

Rossi, C; Chaalane, A; Larangot, B; Conédéra, V et al.

Part of PowerMEMS 2003, Makuhari, Japan 2003, p. 57-60, 2003.

Quality assurance in complex microsystem development

Köhler, Johan; Marchand, L; Stenmark, Lars

Part of 4th Round Table on Micro/Nano Technology for Space, ESTEC, Noordwijk, The Netherlands 2003, p. 276-286, 2003.

Scaling of high-k dielectrics towards sub-Inm EOT

Heyns, M; Beck, S; Bender, H; Blomme, P et al.

Part of Proceedings of International Symposium on VLSI Technology, Systems, and Applications, p. 247-250, 2003.

Simulation and modeling of the substrate influence on the high frequency performance for RF LDMOS

Ankarcrona, Johan; Eklund, Klas-Håkan; Vestling, Lars; Olsson, Jörgen

Part of GHz2003 Symposium, Nov. 4-5, 2003.

Stable Reactive Sputtering Processes

Nyberg, Tomas; Berg, Sören

Part of ISSP 2003, The 7th International Symposium on Sputtering & Plasma Processes, June 11-13, Kanazawa, Japan, p. 235-239, 2003.

Stable reactive sputtering using 2 reactive gases

Nyberg, Tomas; Sproul, W D; Carter, K L; Berg, Sören

Part of ICMCTF 2003, The International Conference on Metallurgical Coatings and Thin Films April 28 - May 2, San Diego, USA, 2003.

Substrate Resistance Modeling for Noise Coupling Analysis

Kristiansson, Simon; Kagganti, Shiva P.; Ewert, Tony; Ingvarsson, Fredrik et al.

Part of Proceedings of the IEEE International Conference on Microelectronic Teststructures, p. 124-129, 2003.

Suppression of Spurious Lateral Modes in Thickness Excited FBAR Resonators

Rosén, Daniel; Bjurström, Johan; Katardjiev, Ilia; Engelmark, Fredrik

Part of IEEE Ultrasonics Symposium, Honolulu, Hawaii, USA, 2003, 2003.

Synthesis of C-AxisOriented AlN Thin Films on Metal Layers: Al, Mo, Ti, TiN and Ni

Iriarte, Gonzalo Fuentes; Bjurström, Johan; Westlinder, Jörgen; Engelmark, Fredrik et al.

Part of International Conference on Ultrasonics, Ferroelectrics and Frequency Control, Proceedings 1, p. 311-315, 2003.

Transmitter and receiver modules with integrated thermal control for spacecraft

Kratz, Henrik; Karlsson, Mikael; Eriksson, Anders; Stenmark, Lars

2003.

A miniturized Xenon Feed System for Electric Propulsion

Bejhed, Johan; Lindberg, Ulf; Stenmark, Lars

2002.

A Study of the Influence of the Ga Content on the Long-Term Stability of Cu(In,Ga)Se2 Thin Film Solar Cells

Malmström, Jonas; Wennerberg, Johan; Stolt, Lars

Part of Proc. E-MRS, June, Strasbourg, France, 2002.

Cold atmospheric plasma sources

Barankova, Hana; Bardos, Ladislav

Part of INVITED PAPER, ANZIO 2002, 5th Symp.Europ.Vac.Coaters, September 30, Rome-Anzio, Italy, abstract only, 2002.

Cold atmospheric plasma sources based on hollow cathodes

Barankova, Hana; Bardos, Ladislav

Part of INVITED presentation at 1st Topical Meeting on Pulsed and Atmospheric Pressure Plasma Processing, FMT - Forschungszentrum für Mikrostrukturtechnik, Univestity of Wuppertal, Wuppertal, March 2002, 2002.

Comparison Between Si-LDMOS and GaN-Based Microwave Power Transistors

Nuttinck, S; Gebara, E; Laskar, J; Rorsman, N et al.

Part of Proc of IEEE Lester Eastman Conference on High Performance Devices, p. 149-154, 2002.

Construction of a Miniature X-ray Source with Diamond Electrodes

Ribbing, Carolina; Hjort, Klas

Part of Invited talk at the 3rd UK Workshop on Diamond and Diamond-like Carbon, The Physics Congress 2002 (IoP), Abstract Book, Brighton, April 8-10, p. 12-13, 2002.

Development of a micr-machined thin film sun sensor for space application

Böhnke, Tomas; Stenmark, Lars

Part of Book of Abstracts - Eurosensors XVI, 2002.

Diffusion of indium and gallium in Cu(In,Ga)Se2 thin film solar cells

Lundberg, Olle; Lu, Jun; Rockett, Angus; Edoff, M et al.

Part of Proceedings of the International Conference on Ternary and Multinary Compounds, Paris, France, October, 2002.

Fused hollow cathode cold atmospheric plasma in monoatomic and molecular gases

Barankova, Hana; Bardos, Ladislav

Part of Symposium on Cold atmospheric Plasma Technologies, 202nd Meeting of The Electrochemical Society, Salt Lake City, October, abstract No. 458, 2002.

Growth of Cu(In,Ga)Se2 Films Using a Cu-poor/rich/poor Sequence: Substrate Temperature Effects

Kessler, John; Chityuttakan, Chanwit; Schöldström, Jens; Stolt, Lars

Part of Proc. E-MRS, June 2002, Strasbourg, France, 2002.

Hollow cathode atmospheric pressure plasma sources for surface treatment

Barankova, Hana; Bardos, Ladislav

Part of , 8th International Conference on Plasma Surfaced Engineering - PSE 2002, Garmisch-Partenkirchen, September, Keynote lecture K8, 2002.

Hollow cathode cold atmospheric plasma sources with monoatomic and molecular gases

Barankova, Hana; Bardos, Ladislav

Part of Int.Conf.Metall.Coat.&Thin Films - ICMCTF-02, April, San Diego, 2002.

Hollow Cathode Plasma Cleaning and Surface Activation

Barankova, Hana; Bardos, Ladislav

Part of Proceedings of the 45th Annual Tech.Conf. of the Society of Vacuum Coaters (SVC), Orlando, April 2002, www.svc.org., Proc, p. 109-112, 2002.

Interface Study of CuInSe2/ZnO and Cu(In,Ga)Se2/ZnO Devices Using ALD ZnO Buffer Layers

Platzer Björkman, Charlotte; Lu, Jun; Kessler, John; Stolt, Lars

Part of Proceedings of the Fifth Baltic Symposium on Atomic Layer Deposition, Tarttu, Estonia, October, 2002.

Investigation of ALCVD TM TiN/Al2O3/HfAlOx/Al2O3 stack on epitaxial Si and Si0.7Ge0.3

Wu, D; Lindgren, A-C; Persson, S; Hellberg, P-E et al.

Part of IEEE SISC, December, 2002.

Low-temperature wafer direct bonding by surface modification in vacuum

Takagi, H; Maeda, R; Ito, T; Suga, T et al.

Part of The 16th Symposium of the Japanese Institute of Electronics, Tokyo, Japan, March 18-20, 2002.

Micropropulsion systems for future space missions

Köhler, Johan; Eriksson, Anders; Stenmark, Lars

Part of Power MEMS, Tsukuba, Japan, p. 144-147, 2002.

Microsystems in space

Köhler, Johan; Stenmark, Lars

Part of The 7th Internationel Conference on Commercialization of Micro and Nano systems, Ypsilanti, Michigan, p. 129-132, 2002.

Miniature X-Ray Sources with Diamond Electrodes

Ribbing, Carolina; Hjort, Klas

Part of The 8th Int Conf on New Diamond Science and Technology, Melbourne, July 21-26, Abstract book, p. 115-, 2002.

NanoSpace-1:the Impacts of the First Swedish Nanosatellite On Spacecraft Architecture and Design

Bruhn, Fredrik; Köhler, Johan; Stenmark, Lars

Part of 53rd International Astronautical Congr, Houston, Texas, p. 1-11, 2002.

Novel BiCMOS Compatible, Short Channel LDMOS Technology for Medium Voltage RF & Power Applications

Litwin, Andrej; Bengtsson, Olof; Olsson, Jörgen

Part of IEEE MTT-S Digest, p. 35-39, 2002.

DOI for Novel BiCMOS Compatible, Short Channel LDMOS Technology for Medium Voltage RF & Power Applications

On the Thermal Stability of Atomic Layer Deposited (ALD) TiN as Gate Electrode in MOS Devices

Westlinder, Jörgen; Schram, T; Pantisano, L; Cartier, E et al.

Part of IEEE SISC, December, 2002.

Performance of Radio Frequency Hollow Cathodes at Low Gas Pressures

Bardos, Ladislav; Barankova, Hana; Lebedev, Y A

Part of Int.Conf.Metall.Coat.&Thin Films - ICMCTF-02, April 2002, San Diego, 2002.

Rapid Growth of Thin Cu(In,Ga)Se2 Layers for Solar Cells

Lundberg, Olle; Bodegård, Marika; Stolt, Lars

Part of Proc. E-MRS, June 2002, Strasbourg, France, 2002.

Re-crystallisation and Interdiffusion in CGS/CIS Bilayers

Bodegård, Marika; Lundberg, Olle; Lu, Jun; Stolt, Lars

Part of Proc E-MRS, June, Strasbourg, France, 2002.

Saw-tooth Reflective X-ray Optics with Sub-micron Resolution

Cederström, B; Ribbing, Carolina; Lundqvist, M

Part of Int Symp on Optical Science and Technology, SPIE´s 47th Annual Meeting, 7-11 July, Seattle, WA, USA, 2002.

Study of Zn(O,S) films for Cu(In,Ga)Se2 solar cells using a coupled XPS/UPS-ALD

Platzer Björkman, Charlotte; Kessler, John; Stolt, Lars

Part of Proc. E-MRS, June 2002, Strasbourg, France, 2002.

Vertical High Voltage Devices on Thick SOI with Back-End Trench Formation

Heinle, Ulrich; Pinardi, K; Olsson, Jörgen

Part of Proc of the 32nd ESSDERC’2002, pp. 295-298, 2002.

A base-collector architecture for SiGe HBTs using low-temperature CVD epitaxy combined with chemical-mechanical polishing

Suvar, E; Haralson, E; Forsberg, Markus; Radamson, H et al.

Part of The 19th Nordic Semiconductor Meeting, Copenhagen, Denmark, May, 2001.

A hybrid cold gas microthruster system for spacecraft

Köhler, Johan; Simu, Urban; Bejhed, Johan; Kratz, Henrik et al.

Part of Digest of Papers for the 11th Int Conf on Solid-State Sensors and Actuators - Transducers '01 and Eurosensors XV, Munich, Germany, June 10-14, p. 886-889, 2001.

Analysis of CIGS Films and Devices Resulting from Different Cu-rich to Cu-poor Transitions

Kessler, John; Schöldström, Jens; Stolt, Lars

Part of Proc. 17th European Photovoltaic Solar Energy Conference, Munich, Oct, 2001.

Chemical Mechanical Polishing for Surface Smoothing

Forsberg, Markus; Olsson, Jörgen

Part of The 19th Nordic Semiconductor Meeting, Copenhagen, Denmark, May 20-23, 2001.

Current transport in CuInS2 solar cells depending on absorber preparation

Reiss, J; Malmström, Jonas; Werner, A; Hengel, I et al.

Part of Materials Research Society Symposium Proceedings (Mater Res Soc, Warrendale (PA), 668, p. H9.41-6, 2001.

Diamond Membrane Based Structures for Miniature X-ray Sources

Ribbing, Carolina; Rangsten, Pelle; Hjort, Klas

Part of Diamond´01, 12th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides & Silicon Carbide,Budapest, Hungary, September 2-7, 2001.

Direct bonded quartz resonators

Vallin, Örjan; Einefors, Bo; Hedlund, Christer; Thornell, Greger

Part of Proc. of the IEEE International Frequency Control Symposium, Seattle, USA, June 6-8, 2001.

Effect of Dopants on Mechanical Polishing of Silicon

Forsberg, Markus; Keskitalo, Niklas; Olsson, Jörgen

Part of Proceedings of MAM2001, p. O4.4, March 5-7, Sigtuna Sweden, 2001.

Electrical characterization of thin Ta2O5 films

Westlinder, J; Blom, Hans-Olof; Olsson, J

2001.

Electrical Characterization of Thin Ta2O5 Films

Westlinder, Jörgen; Blom, Hans-Olof; Olsson, Jörgen

Part of The 19th Nordic Semiconductor Meeting, Copenhagen, Denmark, May, 2001.

Fused hollow cathode cold atmospheric plasma source

Barankova, Hana; Bardos, Ladislav

Part of 1st Symposium on Cold atmospheric Plasma Technologies, The Electrochemical Society Spring Meeting, Washington, 2001.

Growth of Coevaporated Cu(In,Ga)Se2 - The Influence of Rate Profiles on Film Morphology

Bodegård, Marika; Kessler, John; Lundberg, Olle; Schöldström, Jens et al.

Part of Mat. Res. Soc. Symp. Proc. 668, H2.2.1-H2.2.12, 2001.

High gain micromachined slot-coupled patch-antenna for 60 GHz WLAN application

Öjefors, Erik; Lindblom, J; Rydberg, Anders; Kurup, Danesh G et al.

Part of 8th COST 260 Meeting on Smart Antenna Computer Aided Design & Technology, Université de Rennes, France, 2001.

High Voltage Devices on SOI

Heinle, Ulrich; Olsson, Jörgen

Part of Presented at the Franco-Swedish Workshop on SOI, March 8-9, Grenoble, France, 2001.

High Voltage LDMOS Transistors for Increasing RF Power Density and Gain

Rorsman, N; Olsson, Jörgen; Fager, C; Vestling, Lars et al.

Part of GHz2001 Symposium, Nov. 26-27, 2001.

Highly Oriented Coatings at Low Substrate Temperatures

Bardos, Ladislav; Barankova, Hana

Part of Proceedings of the 44th Annual Tech.Conf. of the Society of Vacuum Coaters (SVC), Philadelphia, April, Proc., p. 125-129, 2001.

Hollow cathode plasma sources for large area surface treatment

Barankova, Hana; Bardos, Ladislav

Part of Invited paper at Int.Conf.Metall.Coat.&Thin Films - ICMCTF-01, San Diego, 2001.

Hydronamic addressing: A flowcell for improved signal quality in bioanalytical systems

Tidare, M; Roos, H; Lindberg, Ulf

Part of Transducers 01, Münich, 2001.

Influence of Ga on the Current Transport in Cu(In,Ga)Se2 Thin Film Solar Cells

Malmström, Jonas; Wennerberg, Johan; Bodegård, Marika; Stolt, Lars

Part of Proceedings 17th European Photovoltaic Solar Energy Conference (WIP-Renewable Energies, Munich, 2001) Vol II, p. 1265-1268, 2001.

Integrated capacitors using reactive DC magnetron Co-sputtered (Ta2O5)1-x(TiO2)x thin films

Westlinder, Jörgen; Engelmark, Fredrik; Blom, Hans-Olof; Olsson, Jörgen et al.

Part of The AVS 2nd International Conference on Microelectronics & Interfaces, Santa Clara, USA, 2001.

Mechanical reliability of silicon microsystem fusion bonds in spaceflight environment

Köhler, Johan; Jonsson, Kerstin; Bruhn, Fredrik; Marchand, L et al.

Part of Paper no: IAF-01-1.5.05, 52nd International Astronautical Congress, 1-5 Oct, Toulouse France, 2001.

Microstructured diamond membranes for miniature X-ray sources

Ribbing, Carolina; Rangsten, Pelle; Hjort, Klas

Part of Proc Diamond 2001,, Budapest, Hungary, September 3-7, 2001.

Modelling of Self Heating Effects of High Power Novel Vertical DMOS Transistors

Pinardi, K; Heinle, Ulrich; Bengtsson, S; Olsson, Jörgen

Part of The 19th Nordic Semiconductor Meeting, Copenhagen, Denmark, May, 2001.

Room temperature synthesis of c-axis oriented AlN thin piezoelectric films

Iriarte, Gonzalo Fuentes; Engelmark, Fredrik; Katardjiev, Ilia

Part of Presented at the AVS 2001, 2001.

Selective Etching of Al/AlN Structures for Metallization of SAW Devices

Engelmark, Fredrik; Iriarte, Gonzalo Fuentes; Katardjiev, Ilia

Part of Presented at AVS 2001, 2001.

Self Heating Effects of High Power DMOS Transistors

Pinardi, K; Heinle, Ulrich; Bengtsson, S; Olsson, Jörgen

Part of Presented at the Franco-Swedish Workshop on SOI, March 8-9, Grenoble, France, 2001.

SPICE Modeling of High Voltage LDMOS Transistors

Ankarcrona, Johan; Olsson, Jörgen

Part of The 19th Nordic Semiconductor Meeting, Copenhagen, Denmark, May, 2001.

Substitutional Effects of the Dielectric Constant in Ta2O5

Larsson, Karin; Westlinder, Jörgen; Blom, Hans-Olof; Olsson, Jörgen

Part of Presented at AVS, Oct, 2001.

The Influence of Na on the Microstructure of Cu(InxGa1-x)Se2 Based Solar Cell Thin Films

Lu, Jun; Bodegård, Marika; Granath, Karin; Kessler, John et al.

Part of 52nd annual meeting of the Scandinavian Society for Electron Microscopy, Stockholm 12-15 June 2001,Book of Abstracts : Abstract No P87, p. 184-185, 2001.

XPS/UPS monitoring of ALCVD ZnO growth on Cu(In,Ga)Se2 absorbers

Sterner, J; Platzer-Björkman, C; Stolt, L

p. 1118-1121 2001.

Anodic bonding of materials with large difference in thermal expansion

Hagman, Björn; Richard, Åse; Bäcklund, Ylva; Hedlund, Christer

Part of MME'00 (Micro Mechanics Europe), October 1-3, Uppsala, Sweden, 2000.

Back surface band gap gradings in Cu(In,Ga)Se2 solar cells

Dullweber, T; Lundberg, Olle; Malmström, Jonas; Bodegård, Marika et al.

Part of E-MRS, Strasbourgh, May 30 - June 2, 2000.

Chip mounting and interconnection in multi chip modules for space applications

Nilsson, Peter; Jönsson, Mats; Stenmark, Lars

Part of Proc MME`00 Oct, Uppsala, Sweden, 2000.

CIGS thin film PV modules for low-concentrating systems

Wennerberg, Johan; Kessler, John; Hedström, J; Stolt, Lars et al.

Part of The EuroSun 2000, Copenhagen, June, 2000.

Cu(In,Ga)Se2 devices: From cells to minimodules

Kessler, John; Bodegård, Marika; Hedström, J; Stolt, Lars

Part of E-MRS, Strasbourgh, May 30 – June 2, 2000.

Cu(In,Ga)Se2 fabricated by coevaporation

Stolt, Lars

Part of European Research Conference on Photovoltaic Devices, Berlin – Teltow, Germany, March 31 – April 5, Invited, 2000.

Degradation mechanisms of Cu(In,Ga)Se2-based thin film PV modules

Wennerberg, Johan; Kessler, John; Stolt, Lars

Part of The 16th European Photovoltaic Solar Energy Conference in Glasgow, 1-5 May, p. 309-312, 2000.

Diamond membrane based miniature X-ray source

Rangsten, Pelle; Ribbing, Carolina; Hollman, Patrik; Smith, Leif et al.

Part of Diamond 2000, Porto, Portugal, p. 16.1-, 2000.

Feasibility demonstration of the micropropulsion cold gas thruster system

Köhler, Johan; Simu, Urban; Jonsson, Kerstin; Lang, M et al.

Part of Proc 3rd Round Table on Micro/Nano-Technologies for Space May 2000, p. 219-225, 2000.

High efficiency thin film solar cells with low In content due to thin Cu(In,Ga)Se2 and Ga grading

Lundberg, Olle; Bodegård, Marika; Stolt, Lars

Part of Sixteenth European Photovoltaic Solar Energy Conference and Exhibition, Glasgow, May 1-5, 2000.

High voltage Cu(In,Ga)Se2 devices with Ga-profiling fabricated using co-evaporation

Bodegård, Marika; Lundberg, Olle; Malmström, Jonas; Stolt, Lars et al.

Part of Proceedings of the 28th IEEE Photovoltaic Specialists Conference, p. 430-433, 2000.

Improved output conductance for low-voltage microwave LDMOS transistors

Vestling, Lars; Valtonen, Roger; Heinle, Ulrich; Ankarcrona, Johan et al.

Part of Proc of the 30th ESSDERC´2000, p. 468-471, 2000.

Integration of high voltage devices on thick SOI substrates for automotive application

Heinle, Ulrich; Olsson, Jörgen; Bengtsson, S; Johansson, E

Part of Proceedings of the EUROSOI’2000, Oct. 25-27, Granada, Spain, 2000.

Membrane covered electrically isolated through-wafer via hole

Rosén, Daniel; Olsson, Jörgen; Hedlund, Christer

Part of Workshop Digest MME'00, Uppsala, Sweden, p. B4-, 2000.

Micromachining in Silicon for Passive Alignment of Optical Fibres

Bäcklund, Ylva

Part of Micro-Opto-Electro-Mechanical Systems, 22-23 May, Glasgow, Scotland, United Kingdom, Proc. of SPIE Vol. 4075, p. 118-, 2000.

Miniature X-ray source-development of a prototype

Strid, Niklas; Rangsten, Pelle; Ribbing, Carolina; Tirén, Jonas

Part of MME'00, Uppsala, Sweden, 2000.

New world record Cu(In,Ga)Se2 based minimodule: 16.6%

Kessler, John; Bodegård, Marika; Hedström, J; Stolt, Lars

Part of Sixteenth European Photovoltaic Solar Energy Conference and Exhibition, Glasgow, May 1-5, 2000.

Optimization of RF-sputtered ZnO/ZnO:Al for Cu(In,Ga)Se2 based devices

Kessler, J; Norling, J; Lundberg, O; Wennerberg, J et al.

p. 775-778 2000.

Optimization of RF-sputtered ZnO/ZnO:Al for Cu(In,Ga)Se2 based devices

Kessler, John; Lundberg, Olle; Wennerberg, Johan; Stolt, Lars

Part of Proc 16th EPVSEC, Glasgow, May, p. 775-778, 2000.

Output power characteristics of high voltage LDMOS transistors

Gebara, E; Rorsman, N; Olsson, Jörgen; Zirath, H et al.

Part of Proc of the GHz2000 Symposium, March 13-14, Gothenburg, Sweden, p. 75-78, 2000.

Oxygen plasma wafer bonding evaluated by the weibull fracture probability method

Jonsson, Kerstin; Köhler, Johan; Hedlund, Christer; Stenmark, Lars

Part of Proc of the Eleventh Micromechanics Europe Workshop, Oct, Uppsala, Sweden, 2000.

Power Characteristics of High Voltage LDMOS Transistors

Gebara, E; Rorsman, N; Olsson, Jörgen; Zirath, H et al.

Part of Proceedings of the IEEE European Microwave Conference, 2000.

Shallow and deep trench isolation for use in RF-bipolar IC:s

Forsberg, Markus; Björmander, C; Johansson, T; Ko, T et al.

Part of Proceedings of the 30th European Solid-State Device Research Conference, Cork, Ireland, 11-13 September, ESSDERC’2000, Sept, p. 212-215, 2000.

Silicon fusion bond interfaces resilient to wet anisotropic etchants

Köhler, Johan; Strandman, Carola; Vallin, Örjan; Hedlund, Christer et al.

Part of Micromechanics Europe 2000, Uppsala, p. 142-145, 2000.

Simulation and dielectric characterization of reactive DC magnetron Co-sputtering of (Ta2O5)1-x(TiO2)x

Westlinder, Jörgen; Zhang, Yanwen; Engelmark, Fredrik; Blom, Hans-Olof et al.

Part of American Vacuum Society 47th National Symposium 2000 Boston, USA, 2000.

Simulation of SOI MOSFETs at GHz-frequencies

Berg, J; Bengtsson, S; Olsson, Jörgen

Part of Proceedings of the GHz2000 Symposium, pp. 399-402, Gothenburg March 13-14, Sweden, 2000.

Space qualification of direct bonded silicon microsystems

Köhler, J; Jonsson, K; Jönsson, M; Stenmark, L et al.

2000.

Sulfurization of thin film solar cell absorbers

Sterner, Jan; Matthes, Th W; Kessler, John; Lu, Jun et al.

Part of Sixteent h European Photovoltaic Solar Energy Conference and Exhibition, Glasgow, May 1-5, p. 771-774, 2000.

A Study of Biological Particles in Bio-MEMS Devices using Dielectrophoresis

Jönsson, Mats; Aldaeus, F; Johansson, L E; Lindberg, Ulf et al.

Part of Micro Structure Workshop, 29-31 March, Ystad, Sweden, 2004.

CIGS Submodules with High Performance and High Manufacturability

Edoff, Marika; Woldegiorgis, Sara; Neretnicks, Peter; Ruth, Marta et al.

Part of 19th European Photovoltaic Solar Energy Conference and Exhibition, Paris, 7-11 June, 2004.

Complex Target Poisoning Effects in Reactive Sputtering

Rosén, Daniel; Kappertz, Oliver; Nyberg, Tomas; Katardjiev, Ilia et al.

Part of American Vacuum Society Symposium & Exhibition, Anaheim USA, 2004.

Escherica Coli Behavior in an Open Dielectrophoretic Microsystem

Aldaeus, F; Johansson, L E; Jönsson, Mats; Jonsson, G et al.

Part of 4th Workshop on Nanochemistry and Nanotechnology, 25-27 Aug, 2004.

Heuristic model of the plasma impedance in reactive magnetron sputtering

Pflug, A; Szyszka, B; Berg, Sören; Nyberg, Tomas et al.

Part of 5th International Conference on Coatings on Glass, Saarbrücken, Germany, July, 2004.

High Density Plasma PVD of CrN Films

Barankova, Hana; Bardos, Ladislav

Part of 6th Symp European Vacuum Coaters, September 2004, Rome-Anzio, Italy, p. Invited paper-, 2004.

High-Voltage SOI Devices for Automotive Applications

Olsson, Jörgen

Part of Proc of NATO Advanced Research Workshop on SOI, Kiev, Russia, 25-29 April. Invited, 2004.

Improved contrast in confocal microscopy by using a blue frequency doubled diode-pumped solid-state laser

Ribbing, Carolina; Karlsson, G; Palmskog, G; Brismar, H et al.

Part of Conference on Lasers and Electro-optics (CLEO 04) May 16-21, p. Paper CThII5-, 2004.

Influence of rotating magnets on hysteresis in reactive sputtering

Kappertz, Oliver; Nyberg, Tomas; Rosén, Daniel; Berg, Sören

Part of Society of Vacuum Coaters, 7th Annual Technical Conference Proceedings, April, 2004.

Interface passivation mechanisms in metal gated oxide capacitors

Lujan, G S; Schram, T; Sjöblom, Gustaf; Witters, T et al.

Part of Proc of the 34th ESSDERC, 2004.

Low Resistivity SOI Substrates for Improved Efficiency of RF Power-MOSFETs

Ankarcrona, Johan; Larsen, Mattias; Eklund, Klas Håkan; Vestling, Lars et al.

Part of Proc of NATO Advanced Research Workshop on SOI, Kiev 25-29 April, 2004.

New Materials for chemical and biosensors

Wingbrandt, H; Andersson, M; Salomonsson, A; Roy, S et al.

Part of International Symposium on Advanced Materials and Processing, ISAMAP2K4, 6-8 December, I.I. T., Kharagpur, India, 2004.

Relation between composition and optical properties of CdS films grown by chemical bath deposition

Malmström, Jonas; Kessler, John; Edoff, Marika; Stolt, Lars

Part of Proceedings 19th European Photovoltaic Solar Energy Conference (WIP-Münich, Münich, Vol II, p. 1909-1912, 2004.

The Stability in Damp Heat Conditions of Thin-film CIGS Solar Cells with Different Absorber Thickness

Malm, Ulf; Edoff, Marika; Stolt, Lars

Part of 19th European Photovoltaic Energy Conference, 7-11 June, Paris, France, p. 1890-1893, 2004.

Vital parts for RF microsystems under development for nanospacecraft at the Ångström Space Technology Centre (ÅSTC)

Kratz, Henrik; Öjefors, Erik; Stenmark, Lars

Part of Proceedings of MEMSWAVE, 2004., 2004.

A Transceiver with Integrated Thermal Control for Spacecraft

Kratz, Henrik; Karlsson, Mikael; Stenmark, Lars

Part of MEMSWAVE Heraklion 26th-28th June 2002, 2002.

Micromachined microwave components for high data rate communication

Ewert, Tony; Stenmark, Lars

Part of 3rd Round Table on Micro/Nano-Technologies for Space, ESTEC, Noordwijk, The Netherlands, 15-17 May, 2000, 2000.